The invention discloses a Zn: Ga2O3 film-based MSM structure solar-blind
ultraviolet photoelectric
detector and preparation method thereof. The method specifically comprises the following steps: using a c-surface
sapphire single crystal as the substrate, using Zn-doped beta-Ga2O3 film (Zn: Ga2O3) preferentially grown along
crystal plane as shown in the description through magnetron
sputtering growth as a light absorbing layer, and
sputtering an Au / Ti interdigital
electrode on the light absorbing layer as a collecting
electrode of a
photon-generated carrier, and preparing to acquire the Zn: Ga2O3 film-based MSM structure solar-blind
ultraviolet photoelectric
detector. The speed of photoresponse of the Ga2O3 film-based MSM structure solar-blind
ultraviolet photoelectric
detector through the
Zn doping, the Zn particles with specific number are placed around the light-up circle of the Ga2O3 target to grow the Zn: Ga2O3 film with specific concentration, and the method is simple. A commercial preparation method is used for growing the film through the magnetron
sputtering, the process is strong in
controllability, and easy to operate; the obtained film is compact in surface, stable and uniform in thickness, capable of being prepared in large scale, and good in
repeatability. The Zn: Ga2O3 film-based MSM structure solar-blind ultraviolet photoelectric detector prepared through the invention has potential application prospect in the solar-blind ultraviolet detection field.