The invention relates to a growth method and a growth device of a large-size
gallium oxide single crystal. The method comprises the steps of mounting a plurality of thermal field parts, which are used for heating and preserving heat to form a thermal field, in a
single crystal furnace horizontally and concentrically; placing an iraurita
crucible with a cover into the center of the thermal field, wherein an iraurita mould is embedded into the iraurita
crucible; fixing a specifically-oriented beta-Ga2O3
seed crystal in a
seed crystal clamp; placing a
gallium oxide raw material into the iraurita
crucible and covering the cover of the iraurita crucible; after vacuumizing, introducing
mixed gas of Ar and CO2 according to the ratio of 9:1 to 8:2 until the pressure intensity of a furnace chamber is 1.05 to 1.5 MPa; performing
induction heating so as to completely melt the
gallium oxide raw material; inoculating after
roasting the
seed crystal for 5 to 10 minutes; after the seed
crystal is in melting connection with the melt completely, seeding and
necking until the sectional size of the seed
crystal is reduced to be 1 to 2 mm; performing shouldering growth stage; performing constant-
diameter growth stage; when the growth of the
crystal is finished and the crystal is completely separated from the top end of the mould, stopping lifting and slowly cooling to
room temperature to obtain the transparent, integrated, high-quality and sheet-like
gallium oxide single crystal without crystal boundary.