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1763 results about "Colloidal silica" patented technology

Colloidal silicas are suspensions of fine amorphous, nonporous, and typically spherical silica particles in a liquid phase.

CMP slurry for metallic film, polishing method and method of manufacturing semiconductor device

A CMP slurry for metallic film is provided, which includes water, 0.01 to 0.3 wt %, based on a total quantity of the slurry, of polyvinylpyrrolidone having a weight average molecular weight of not less than 20,000, an oxidizing agent, a protective film-forming agent containing a first complexing agent for forming a water-insoluble complex and a second complexing agent for forming a water-soluble complex, and colloidal silica having a primary particle diameter ranging from 5 to 50 nm.
Owner:KIOXIA CORP
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