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A method for etching a dielectric in a thermally controlled plasma etch chamber with an expanded processing window. The method is adapted to incorporate benefits of a the thermal control and high evacuation capability of the chamber. Etchent gases include hydrocarbons, oxygen and inert gas. Explanation is provided for enablling the use of hexafluoro-1,3-butadiene in a capacitively coupled etch plasma. The method is very useful for creating via, self aligned contacts, dual damascene, and other dielectric etch.

The present invention is directed to nanowire structures and interconnected nanowire networks comprising such structures, as well as methods for their production. The nanowire structures comprise a nanowire core, a carbon-based layer, and in additional embodiments, carbon-based structures such as nanographitic plates consisting of graphenes formed on the nanowire cores, interconnecting the nanowire structures in the networks. The networks are porous structures that can be formed into membranes or particles. The nanowire structures and the networks formed using them are useful in catalyst and electrode applications, including fuel cells, as well as field emission devices, support substrates and chromatographic applications.

According to some embodiments, a waveguide cable includes a dielectric core and a conducting layer surrounding the dielectric core. A first antenna may be provided at a first end of the waveguide cable to receive a digital signal and to propagate an electromagnetic wave through the dielectric core. A second antenna may be provided at a second end of the waveguide cable, opposite the first end, to receive the electromagnetic wave from the dielectric core and to provide the digital signal.

A gas-phase chemical reactor, a system including the reactor, and methods of using the reactor and system are disclosed. An exemplary reactor includes a reaction chamber and is configured to provide a precursor within the reaction chamber for a soak period—e.g., a period wherein a supply of the precursor to the reaction chamber is ceased and before purging of the reaction chamber begins. This allows relatively high residence times, relatively high partial pressures of the precursor(s) and / or a relatively high absolute pressure to be obtained within the reaction chamber during substrate processing.

In a system for data communication between an information terminal to be operated by a user and remote communication nodes, the present invention intends to suppress the power consumption of the information terminal. For that purpose, communication nodes 2, 3 and 4 each emit diffuse light carrying a pilot signal blinking at a low frequency to notify the presence of the communication node and an ID signal belonging to a higher frequency range, the ID signal containing inherent address etc. for identifying each communication node. A mobile phone 1 as the information terminal captures an image and processes the image data to detect the pilot signal of each communication node. Then, determining the position of each node and setting a limited range for reading the pixels around that position, the mobile phone 1 reads the detection signals of the pixels within the limited range at high speed and obtains identification information. This information is used to identify each node and eliminate influences of any other light source that apparently resembles the pilot signal.

A bone resection tool for resecting an end of a bone along a surface having a curvature comprises a guide, a cutting tool and a track follower. The guide is configured to be removably attached in a fixed position to the end of the bone. The guide is configured to include a track exhibiting a curvature generally corresponding to the curvature of the surface to be resected in the bone. The cutting tool includes a cutting face. The track follower is configured to couple to the cutting tool and cooperate with the track to facilitate reciprocation of the cutting tool relative to the guide to induce the cutting face to resect the bone along the surface having the curvature. A method for cutting a bone along a curved surface conforming to the curvature of a curved surface of the underside of a prosthetic component comprises the steps of incising the tissue surrounding the surface of the bone, positioning a guide alongside the surface of a bone to be cut, affixing the guide to the bone, interconnecting a cutter having a cutting face with the guide, maintaining the cutting face generally parallel to the tangent of the curved surface and traversing the cutting face along the bone while guiding the cutter along the track. The tissue incision incises the tissue surrounding the surface of the bone to be cut in a minimally invasive fashion. The positioned guide includes a track configured to assimilate the curvature of the curved surface of the underside of the prosthetic component.

In a multimedia recording and playback network for receiving from a content server a service package of multimedia content, the network including a media server in communication with the content server, a method of securely transmitting a master encryption key from the content server to the media server, including the steps downloading a service package certificate from the content server to the media server, authenticating, in the media server, the received service package certificate, the content server providing to the media server a key server certificate, a public key of the content server, and a client certificate request, the media server authenticating the key server certificate, providing to the content server, upon authentication of the key server certificate by the media server, a client certificate including a challenge signature, and a public key of the media server, the content server authenticating the client certificate including the challenge signature received from the media server, the media server requesting the master encryption key from the content server, and the content server responding by transmitting the master encryption key to media server.

An apparatus includes an upper electrode and a lower electrode for supporting a wafer disposed opposite each other within a process chamber. A first RF power supply configured to apply a first RF power having a relatively higher frequency is connected to the upper electrode. A second RF power supply configured to apply a second RF power having a relatively lower frequency is connected to the lower electrode. A variable DC power supply is connected to the upper electrode. A process gas is supplied into the process chamber while any one of application voltage, application current, and application power from the variable DC power supply to the upper electrode is controlled, to generate plasma of the process gas so as to perform plasma etching.

The present invention provides a system, method and apparatus for treating a liquid by providing a santitary type stainless steel hydrocyclone, flowing the liquid through the hydrocyclone, and turning on a plasma torch attached to the hydrocyclone such that a plasma arc irradiates the liquid. The hydrocyclone can be a forward flow hydrocyclone, a reverse flow hydrocyclone, a through flow hydrocyclone, a hydrocyclone pump or a volute.

The invention relates to a nanofiber web preparing apparatus and method via an electro-blown spinning. The nanofiber web preparing method comprises: feeding a polymer solution, which is dissolved into a given solvent, toward a spinning nozzle; discharging the polymer solution via the spinning nozzle, which is applied with a high voltage, while injecting compressed air via the lower end of the spinning nozzle; and collecting fiber spun in the form of a web on a grounded suction collector under the spinning nozzle, in which both of thermoplastic and thermosetting resins are applicable, solution doesn't need to be heated and insulation is readily realized.