The invention discloses a method for preparing a multiphase coupled WS2 / WN
solid lubrication film. The multiphase coupled WS2 / WN
solid lubrication film is formed on the surface of a
metal material base body in a magnetron
sputtering method. The method for preparing the multiphase coupled WS2 / WN
solid lubrication film includes the steps that the
metal material base body to be processed is preprocessed; the
metal material base body is put into a vacuum room, and
vacuum pumping is conducted; a low-energy
ion source is used for conducting
ion bombardment cleaning on the metal material base body; a magnetron
sputtering device is used for conducting
surface modification on the metal material base body, Ar gas and N2 gas are used as magnetron
sputtering and reacting gases, WS2 serves as the target material, a WS2 film layer is deposited on the surface of the metal material base body firstly, then a WS2 / WN film
composite film layer is deposited, the operation of depositing a WS2 film layer and the operation of depositing a WS2 / WN
composite film layer are cycled in turns, and 1-10 WS2 film
layers are deposited and 1-10 WS2 / WN
composite film layers are deposited; the metal material base body is put into an
acetone solution to be cleaned and then dried, and the dried metal material base body is sealed and stored in a vacuum mode.