The invention discloses a preparation method of an Mo-V-C-N
composite coating. The method comprises the steps that firstly, a substrate is treated; secondly, an Mo target, a V arc target and the substrate are placed, and a
vacuum chamber is vacuumized and heated; thirdly, the substrate is etched; fourthly, an Mo priming layer is formed through deposition; fifthly, an Mo-V buffer layer is formed through deposition; sixthly, an Mo-V-N
transition layer is formed through deposition; seventhly, an Mo-V-C-N body layer is formed through deposition; eighthly,
vacuum annealing treatment is performed; and ninthly, the substrate provided with the Mo-V-C-N
composite coating on the surface is obtained through cooling. According to the preparation method, through layered arrangement of the Mo-V-C-N
composite coating, good component transition is formed, good combination with the substrate is ensured, and
cracking and stripping of the Mo-V-C-N composite
coating are avoided; and the prepared Mo-V-C-Ncomposite
coating is uniform and dense in structure, high in
hardness, good in
toughness, low in
friction coefficient and good in
wear resistance, has a lubricating effect under both high temperatureand low temperature and is suitable for serving as a space self-lubricating layer.