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Multilayer multielement high temperature resistant diamond-like nano composite thin film material

A nano-composite and thin-film material technology, applied in metal material coating process, coating, ion implantation plating, etc., can solve the problems of DLC film service life decline, DLC film is easy to be oxidized, and limit the wide application of films, etc., to achieve Improved friction and wear performance, increased operating temperature range, excellent friction and self-lubricating performance

Inactive Publication Date: 2014-06-18
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, diamond-like carbon films also limit their wide application due to their own problems. For example, in high-temperature air environments, DLC films are easily oxidized, resulting in reduced service life and loss of excellent performance of DLC films under harsh conditions.
According to a large number of experiments, the DLC film can maintain its excellent performance at 400 °C, and when the temperature continues to rise, the film structure changes significantly, more graphite phases are formed, tend to graphitize, and lose their original properties. excellent performance

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] Take a 304 stainless steel sheet with a size of 4cm×4cm, and the surface multi-element high-temperature resistant diamond-like nanocomposite film material structure is 204 stainless steel substrate / Ti layer / SiC layer / Si-doped diamond-like surface layer, and the treatment process is carried out according to the following steps: (1 ) The 304 stainless steel is subjected to conventional degreasing cleaning, followed by ultrasonic cleaning in acetone and ethanol solutions; (2) The 304 stainless steel is placed in a multi-arc ion plating-magnetron sputtering composite vapor deposition vacuum system for argon plasma Sputtering cleaning, the flow rate of argon gas is 50-70sccm, the bias voltage is 800-1000V, and the processing time is 30-40 minutes; (3) Multi-arc ion plating Ti layer, the metal Ti target is the cathode, and the processing time is 5-10 minutes; ( 4) The SiC layer is deposited by magnetron sputtering, the Si target is the cathode, the working gas is argon and met...

Embodiment 2

[0021] Take a 316 stainless steel sheet with a size of 4cm×4cm, the surface multi-element high temperature resistant diamond-like nanocomposite film material structure is 316 stainless steel substrate / Ti layer / SiC layer / Si-doped diamond-like surface layer, the treatment process is carried out according to the following steps: (1 ) The 316 stainless steel was subjected to conventional degreasing cleaning, followed by ultrasonic cleaning in acetone and ethanol solutions; (2) The 316 stainless steel was placed in a multi-arc ion plating-magnetron sputtering composite vapor deposition vacuum system for argon plasma Sputtering cleaning, the argon gas flow rate is 50-70sccm, the bias voltage is 800-1000V, and the processing time is 30-40 minutes; (3) Multi-arc ion plating Ti layer, the metal Ti target is the cathode, and the processing time is 5-10 minutes; ( 4) The SiC layer is deposited by magnetron sputtering, the Si target is the cathode, the working gas is argon and methane, the...

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Abstract

The invention discloses a multilayer multielement high temperature resistant diamond-like nano composite thin film material comprising a carbon steel substrate, a stainless steel substrate or a hard alloy substrate, a substrate bonding layer, an intermediate transition layer and a surface functional layer, the substrate bonding layer is a metal Ti bonding layer, the intermediate transition layer is a silicon carbide layer, and the surface functional layer is a Si doped diamond-like carbon film. Compared to general diamond-like thin film materials, the use temperature of the multilayer multielement high temperature resistant diamond-like nano composite thin film material is increased by 150 DEG C, and the wear resistance and service life of the multilayer multielement high temperature resistant diamond-like nano composite thin film material are increased.

Description

technical field [0001] The invention relates to a carbon steel, stainless steel, hard alloy surface multi-layer multi-element high temperature resistant diamond-like nanocomposite film material and a preparation method thereof. A gradient multi-layer multi-element high-temperature diamond-like nanocomposite coating is obtained on the surface, which belongs to the field of vacuum surface treatment and material surface protection. Background technique [0002] With the development of aerospace, automobiles, microelectronics, precision machinery, etc., higher requirements are put forward for the reliable operation of mechanical systems under harsh environmental conditions, such as high speed, high load, extreme temperature, radioactive materials and reaction atmosphere. . The guarantee for the efficient operation of mechanical parts is that the friction parts have excellent performance, especially low friction and wear resistance. Diamond-like carbon film (DLC) has excellent p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/16C23C14/06C23C14/32C23C14/35
Inventor 张俊彦郑愉张斌
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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