The invention relates to a Ni-Mn-Ti-based multi-element
alloy target material, a preparation method thereof and a film. Firstly, an
alloy ingot is prepared through
electric arc melting, the purity and compactness of the
alloy are improved, and multiple elements are fully alloyed; subsequently, a thin strip is thrown out at a certain wheel speed through rapid
quenching for a melt, the
porosity in the material is reduced, a subsequent heat treatment process is simplified, grains are refined, and element distribution tends to be more uniform; then, the thin strip is ground into alloy
powder, the problem of non-uniform components caused by a too
low melting point or a too high
melting point of a
single element is effectively solved, and the
phase change temperature span is widened under the condition that the original
magnetism is ensured; and finally, the
quaternary alloy target material is prepared through
hot pressing. According to the invention, the advantages of
electric arc melting and high-temperature
hot pressing preparation are integrated, and the rapid
quenching for the melt is combined, so that the target material which is uniform in component, low in
porosity, high in purity, small in grain size and wide in
phase change temperature zone span can be prepared; and NiMnTi-based alloy is adopted as the target material, and the prepared film has good mechanical performance, so that subsequent
stress regulation and control are facilitated, and the multifunctional film is obtained.