The invention relates to a method for rapidly corroding and patterning an
indium tin oxide (ITO) surface by using an electrochemical technology, belonging to the fields of
electrochemistry and micro-nanotechnologies. Aiming at the problem of the traditional ITO-corroding method, the method for rapidly corroding and patterning the
indium tin oxide surface by using the electrochemical technology, provided by the invention, comprises the steps as follows: (1) washing the ITO surface; (2) pressing a used
photoresist into a protective film on an ITO substrate by using a plastic-envelop
machine, directly placing a
mask of a used pattern, performing
ultraviolet exposure and developing, and forming and washing to form a needed pattern; (3) corroding exposed ITO part of the
photoresist on the ITO surface with diluted
hydrochloric acid as a corrosive liquid by using
cyclic voltammetry or
chronoamperometry and the electrochemical technology; and (4) washing an electrochemically corroded ITO
glass sheet by using an alkali solution, removing a protective
photoresist film; and
drying by using N2 to obtain a patterned ITO surface. The method for rapidly corroding and patterning the
indium tin oxide surface by using the electrochemical technology has the advantages of simplicity in operation, high speed, good corrosive effect, clearness of borders, low cost and the like.