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2116results about "Fluid pressure measurement using ohmic-resistance variation" patented technology

Media isolated pressure transducer having boss comprising single metal diaphragm

A pressure sensor for sensing a pressure of a fluid includes a monolithic metal including substrate having a substantially planar top side, wherein the metallic comprising substrate includes s a relatively thick boss near a center of the substrate and a thinned sensing portion that is elastically deformable and pressure-sensitive positioned radially outward from the boss. At least one dielectric layer is on the top side of the substrate. A plurality of piezoresistors are on the dielectric layer, wherein the piezoresistors are positioned over the thinned diaphragm portion. At least one overglaze layer is over the conductor layer that provides apertures for electrically contacting the plurality of piezoresistors. A sensing system includes a housing including at least a first port for coupling to a fluid for measurement of a pressure of the fluid and at least one sensor in the housing including a pressure sensor according to an embodiment of the invention.
Owner:HONEYWELL INT INC

Integrated silicon chip for testing acceleration, pressure and temperature, and manufacturing method thereof

The invention relates to an integrated silicon chip for testing acceleration, pressure and temperature, and the manufacturing method thereof. The invention is characterized in manufacturing the pressure sensor, temperature sensor and accelerometers of thermoelectric pile on to one chip by the same micro processing technology. The acceleration is detected by adopting thermal convection type accelerometers, using polysilicon resistor as heater, using a thermoelectric pile composed of two pairs of metals (such as aluminium and tungsten-titanium) and P type or N type polysilicon to detect the temperature difference in the sealed cavity caused by acceleration. The high accurate absolute pressure sensor is manufactured by using silicon nitride film with low stress as the core structure layer of the pressure sensor chip, and forming force sensitive resistor track by polysilicon film, forming vacuum reference cavity by TEOS bolt in LPCVD furnace. At the same time, the temperature sensor is composed by using polysilicon thermistor to detect temperature change. The integrated chip achieves the advantages of microminiaturization, low cost, high precision, high reliability and high stability.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Scale measuring device for pitching dynamic derivative experiment

The invention provides a scale measuring device for a pitching dynamic derivative experiment. An electric motor is arranged in a motor support rod; a motor output shaft is connected with a transmission shaft via a speed reducer and a shaft coupling; the transmission shaft is rotationally connected with a scale support rod; the rear end of the scale support rod is fixedly connected with the front end of the motor support rod; the front end of the transmission shaft is provided with an eccentric wheel which is provided with a lug; the lug is inserted into a sliding chute of a slide block; upper and lower cross springs of a cross spring scale have a crisscross structure respectively, and the front and rear ends thereof are fixedly connected with a scale frame via a front seat; and central positions of the upper and lower cross springs are provided with supporting cylinders. The scale measuring device for the pitching dynamic derivative experiment is a novel pitching dynamic derivative scale device. A pitching direct derivative of an aerial craft and a rolling crossover derivative induced by yaw oscillation can be measured under a big attack angle by designing a special vibrating mechanism, the cross spring scale and a pitching five-component scale structure. The scale measuring device for the pitching dynamic derivative experiment can meet the requirement of a wind tunnel trial.
Owner:SHENGYANG AERODYNAMIC INST AVIATION IND CORP OF CHINA
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