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1926results about "Force measurement using piezo-resistive materials" patented technology

Array type ultra-thin submissive force sensor and preparation method thereof

The invention relates to an array-type compliant force sensor and a method of preparation thereof, and belongs to the technical field of a force sensor. The sensor comprises upper and lower poles which are enclosed into one piece, and a conduction macromolecule sensitive film compressed between the poles, and a front end circuit connected with the upper and lower poles through signal lines. The conduction macromolecule sensitive film primarily adopts the conduction macromolecule sensitive film having the compressive resistance effect consisting of graphitized carbon black as the conduction phase, single-component silastic as the insulation phase, and nanometer SiO2 dispersant. The upper and lower poles are a plurality of poles made on the substrate of the film by making use of flexible printed circuit board process and signal lines connected with each strip-shaped pole. The upper and lower strip-shaped poles are crossed and constitute an N*N sensitive cell array with the conduction macromolecule sensitive film. The signal lines are gathered to form led-out closely spaced cables. The invention has the characteristics of fine and thin structure, good flexibility, large range, high precision and high resolution.
Owner:TSINGHUA UNIV

Method of manufacturing a sensor detecting a physical action as an applied force

A sensor comprises a semiconductor pellet (10) including a working portion (11) adapted to undergo action of a force, a fixed portion (13) fixed on the sensor body, and a flexible portion (13) having flexibility formed therebetween, a working body (20) for transmitting an exterted force to the working portion, and detector means (60-63) for transforming a mechanical deformation produced in the semiconductor pellet to an electric signal to thereby detect a force exerted on the working body as an electric signal. A signal processing circuit is applied to the sensor. This circuit uses analog multipliers (101-109) and analog adders / subtracters (111-113), and has a function to cancel interference produced in different directions. Within the sensor, two portions (E3, E4-E8) located at positions opposite to each other and producing a displacement therebetween by action of a force are determined. By exerting a coulomb force between both the portions, the test of the sensor is carried out. Further, a pedestal (21, 22) is provided around the working body (20). The working body and the pedestal are located with a predetermined gap or spacing therebetween. A displacement of the working body is caused to limitatively fall within a predetermined range corresponding to the spacing. The working body and the pedestal are provided by cutting a same common substrate (350, 350')
Owner:OKADA KAZUHIRO

Flexible pressure sensor and preparation method thereof

The invention discloses a flexible pressure sensor which comprises an induction layer, a substrate layer, an isolation layer and electrodes. The isolation layer is positioned between the induction layer and the substrate layer and bonded to the induction layer and the substrate layer, and enables electric contact between the induction layer and the substrate layer to be isolated discontinuously; the surface of the induction layer is provided with a first conductive layer, the surface of the substrate layer is provided with a second conductive layer, and the first and second conductive layers are bonded to the isolation layer in opposite directions; and the electrodes are led out of the first or second conductive layer and connected with an external circuit. The flexible pressure sensor is used to detect the size and fluctuation of pressure, a flexible conductive material on the specific substrate is bonded to other conductive substrate, the electrodes are led out, change of resistance between the electrodes is measured, and the size and fluctuation of the pressure is detected in directly. The pressure sensor of high flexibility and high reliability can be applied to a flexible bearing body, technology is simple, and the sensor can be compatible with a present processing technology of a resistant screen to realize scaled production and application.
Owner:常州第六元素半导体有限公司

Conductive-rubber-based flexible array clip pressure sensor and manufacturing method

The invention relates to a conductive-rubber-based flexible array clip pressure sensor and a manufacturing method. In the conductive-rubber-based flexible array clip pressure sensor, upper and lower electrode wires and electrode rings are printed on an upper electrode layer and an electrode layer; the electrode ring is provided with a rubber voltage-sensitive unit; a silicon rubber liner is arranged at the position where sensitive elements do not exist; the rubber voltage-sensitive unit is nested into the silicon rubber liner; the upper and lower electrode wires are led and connected to an electrode lead-out head; the upper and lower electrode layers are sealed by high viscose; and when force acts on the rubber voltage-sensitive unit, the rubber voltage-sensitive unit is compressed and deformed due to stress, so a resistance value of the rubber voltage-sensitive unit is changed, and pressure or concentrated loads at the point contact position can be reflected according to the variablequantity of the resistance value on the rubber voltage-sensitive unit relative to an initial resistance value. By a manufacturing method based on a silk-screen printing process, the flexible array clip sensor has the characteristics of light weight, low cost, simple manufacturing and mass production, and is long in service life and convenient to operate.
Owner:XI AN JIAOTONG UNIV

Carbon nanotube / polymer composite membrane array type flexible force sensor and manufacturing method thereof

The invention relates to a carbon nanotube / polymer composite membrane array type flexible force sensor and a manufacturing method thereof. The carbon nanotube / polymer composite membrane array type flexible force sensor comprises a parallel metal row electrode and a parallel metal column electrode which are respectively and graphically arranged on the upper and lower surfaces of a carbon nanotube / polymer composite membrane, an upper insulation protecting layer adhered onto the row electrode, and a lower insulation protecting layer adhered onto the column electrode, wherein the row electrode and the column electrode are distributed in a spatial intersection way, and a spatial intersection part and the carbon nanotube / polymer composite membrane contained in the spatial intersection part form a force sensing unit of the array type flexible force sensor; and the carbon nanotube / polymer composite membrane is made by a composite material that carbon nanotubes are uniformly dispersed in a polymer matrix material, and the mass ratio of the carbon nanotubes to the polymer matrix material is (0.1-15): 100. The carbon nanotube / polymer composite membrane in the array type flexible force sensor has the characteristics of excellent flexibility, good repeatability, stable performances, good consistency and the like.
Owner:TSINGHUA UNIV

Flexible pressure sensor and manufacturing method thereof

The invention discloses a flexible pressure sensor, which comprises two oppositely-arranged electrode structures, wherein each electrode structure comprises a flexible substrate and a conductive layer arranged on the flexible substrate; the conductive layers of the two electrode structures are connected in a mutually-facing abut joint mode; the flexible substrate comprises a substrate body and multiple convex structures arranged on the substrate body; and the conductive layer covers the surface, with the multiple convex structures, of the flexible substrate. According to the flexible pressure sensor disclosed by the invention, by using the characteristic that the inner multiple convex structures formed by a flexible material are likely to deform under a pressure effect, resistance changes, adjustment and control caused by contact area changes when the two conductive layers in the opposite electrode structures make contact can be realized, and thus, pressure sensing is realized. The invention also discloses a method of manufacturing the above flexible pressure sensor. Compared with an MEMS processing process generally adopted by the flexible pressure sensor in the prior art, the manufacturing method of the invention is simple and convenient, and the cost is lower.
Owner:SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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