Flexible pressure sensor and preparation method thereof

Abstract

The invention discloses a flexible pressure sensor which comprises an induction layer, a substrate layer, an isolation layer and electrodes. The isolation layer is positioned between the induction layer and the substrate layer and bonded to the induction layer and the substrate layer, and enables electric contact between the induction layer and the substrate layer to be isolated discontinuously; the surface of the induction layer is provided with a first conductive layer, the surface of the substrate layer is provided with a second conductive layer, and the first and second conductive layers are bonded to the isolation layer in opposite directions; and the electrodes are led out of the first or second conductive layer and connected with an external circuit. The flexible pressure sensor is used to detect the size and fluctuation of pressure, a flexible conductive material on the specific substrate is bonded to other conductive substrate, the electrodes are led out, change of resistance between the electrodes is measured, and the size and fluctuation of the pressure is detected in directly. The pressure sensor of high flexibility and high reliability can be applied to a flexible bearing body, technology is simple, and the sensor can be compatible with a present processing technology of a resistant screen to realize scaled production and application.

Description

technical field [0001] The invention relates to a pressure sensor and a preparation method thereof, which are used for detecting the magnitude and fluctuation of pressure, in particular to a flexible pressure sensor. Background technique [0002] Pressure sensor is the most commonly used sensor in industrial practice. It is widely used in various industrial automatic control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production automatic control, aerospace, military industry, petrochemical, oil wells, electric power, ships, machine tools, Pipeline and many other industries. The principles and applications of pressure sensors are mainly as follows: [0003] 1. Strain gauge pressure sensor: its principle and application There are many types of mechanical sensors, such as resistance strain gauge pressure sensor, semiconductor strain gauge pressure sensor, piezoresistive pressure sensor, inductive pressure sensor, ca...

AI Technical Summary

Problems solved by technology

The working principle and application mode of the above-mentioned existing pressure sensors are difficult to meet the requirements

In the prior art, piezoelectric films of PVDF or ZnO materials are mostly used. Although these materials can realize the function of pressure sensing, their sensitivity is not very high due to the influence of material characteristics, and they cannot accurately identify extremely weak strains.

In addition, when these materials are applied in the flexible wearable electronics industry, the high sensitivity under flexible conditions cannot be achieved, and the stability is also poor.

[0009] Patent CN104359597A discloses a pressure sensor. This pressure sensor uses two layers of conductive materials whose inner surfaces are covered with carbon nanotubes or graphene, and is assembled in dislocation. When it is squeezed and deformed, the contact area of ​​the two layers changes, resulting in resistance However, in this process, two layers of conductive materials need to be covered on the surface with a certain shape. The process is complicated and it is difficult to realize it completely. Moreover, the sensitivity of the measurement is affected by the surface flatness, and the precise control of the surface flatness is very difficult. High cost, difficult to apply on a large scale

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