The invention discloses a
silicon micro resonant type
pressure sensor and a manufacturing method of the
silicon micro resonant type
pressure sensor, relates to a
pressure sensor and provides a
silicon micro resonant type pressure sensor which is based on
synovial membrane damping and a double pressure
membrane structure, and a manufacturing method of the pressure sensor. The pressure sensor comprises a
pressure sensitive layer, a resonant structure layer, a vacuum encapsulation
blocking layer and lead electrodes, wherein the upper part of the border frame of the
pressure sensitive layer is connected with the lower part of the border frame of a resonant structure layer; the upper border frame of the
pressure sensitive layer is internally provided with two pressure membranes and is provided with two cavities for holding parallel silicon islands; the top ends of the silicon islands are connected with a first transmission beam and a second transmission beam on the resonant structure layer; channels are formed between the two cavities, so that the first resonant beam, the second resonant beam, a first
mass block and a second
mass block on the resonant structure layer have space for free vibration; the upper part of the border frame of the resonant structure layer is connected with a
lower border frame of the vacuum encapsulating
blocking layer; a cavity is formed inside a
lower border frame of the
blocking layer; lead holes are formed on the vacuum encapsulating blocking layer; and the lead electrodes are connected with the resonant structure layer through the lead holes.