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Force sensor based on Micro-Nano composite structure

A force sensor and combined structure technology, applied in the field of micro/nano electromechanical systems and sensing, can solve problems such as unsatisfactory physical properties of materials, and achieve the effects of small overall size, large deformation and good flexibility

Inactive Publication Date: 2006-07-05
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the material of the bridge beam is block silicon, after being formed by micro-processing technology, it is affected by material defects and processing, and its physical properties are not ideal.

Method used

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  • Force sensor based on Micro-Nano composite structure

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Embodiment Construction

[0023] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0024] Such as figure 1 As shown, the force sensor includes a substrate 1, which is monocrystalline silicon. The substrate 1 is covered with an insulating layer 2, which can be made of silicon oxide or silicon nitride. The insulating layer 2 is provided with four electrodes facing each other in pairs, including an electrode 3 , an electrode 5 , an electrode 6 and an electrode 9 , and these electrodes are made of polysilicon material. The bridge beams 4 and 8 are respectively lapped on the corresponding counter electrodes, such as figure 1 As shown, the two ends of the bridge beam 4 are respectively fixed on the electrode 3 and the electrode 5, and the two ends of the bridge beam 8 are respectively fixed on the electrode 6 and the electrode 9.

[0025] The mass block 7 is made of polysilicon material, and the mass block 7 is fixed a...

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Abstract

The invention discloses a force sensor based on micro-nano combined structure, comprising bridge beam, mass block, substrate and plural electrodes arranged on the substrate, where there is an insulating layer between the electrodes and the substrate, the two ends of the bridge beam are fixed on the electrodes, the mass block is fixed in the middle of the bridge beam, suspending in midair, and the bridge beam is a semiconductor oxide nano tape and the force sensor also comprises a resonance frequency detection circuit for measuring the resonance frequency of the bridge beam. The force sensor is combined of micro-electromechanical (MEM) sensor and nano material, adopts the semiconductor oxide nano tape as the bridge beam and the structure of the force sensor is controllable and no-defect and besides, the nano tape has excellent flexibility and can make larger deformation under the force action, and these advantages can improve the resolution and accuracy of the force sensor. It makes more measuring methods able to be selected for the force sensor.

Description

technical field [0001] The invention relates to the field of micro / nano electromechanical systems and sensing technologies, in particular to a force sensor based on a micro / nano composite structure. Background technique [0002] Force sensors, especially accelerometers and pressure sensors, made using MEMS technology, have been widely used in military, automotive, aerospace, medical and other fields due to their advantages of small size, low cost, easy integration and mass production. The usual microcomputer power sensor is a bridge-type beam supporting the structure of the mass block, and its materials are basically materials commonly used in micro-processing - silicon and its compounds. The size of the mass block is several hundred microns, and the cross-sectional size of the bridge beam is also on the order of microns. The resonant microcomputer power sensor is one of the commonly used working methods. Its working principle is: drive bridge beam—the bridge beam with mass...

Claims

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Application Information

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IPC IPC(8): G01L1/00G01L1/10G01L1/16G01L1/18B81B3/00B82B1/00
Inventor 周兆英朱荣王鼎渠叶雄英
Owner TSINGHUA UNIV
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