The invention disclosed a method for integrating CMOS circuit chips with carbon nanotubes (CNTs) into array-type sensors with signal processors enclosed. The method provides low-temperature and wafer-level fabrication processes including dripped a drop of dispersed CNTs solution on the top of CMOS chip, use micro probe card to contact with pairs of pads, with a function generator to generate dielectrophoresis (DEP) signal and with a lock-in amplifier to measure impedance value simultaneously. According to the impedance measurement it can detect the number of CNTs fixed on pair of pads. Only if the number of CNTs on the top of pair of pads were not expected, it would readjust the frequency of alternating current to the range of negative DEP force and repel CNTs from the top of pair of pads. Repeat positive DEP signal to attach CNTs until the number of CNTs as demand, then hold the DEP force until CNTs solution evaporated to make a well-contact between CNTs and pads. Furthermore, the surface of CNTs can be functionalized and let CNTs have high sensitivity to ambient molecules (Gas molecules, Bio molecules, et al.), then transfer the measured signal into signal processors of CMOS chips, the processors could be impedance measurement unit, current measurement unit, conductance measurement unit et. al., and it can measure, record and analyze the data of small varied signal directly.