35917results about How to "Increase temperature" patented technology

Apparatus for forming a lesion in body tissue includes a probe having an active region with an electrode for contacting tissue to be treated, and an inactive region including an insulative sleeve around a portion of the electrode. The temperature of the inactive region is monitored using a temperature sensor. A controller supplies radio frequency energy to the electrode and samples signals from the temperature sensor. By performing a calculation using the sampled signals and a predetermined inactive region threshold temperature, and by adjusting the supplied radio frequency power, the inactive region of the probe can be maintained at or below an inactive region maximum temperature whilst the controller continues to supply radio frequency energy to the electrode. The probe has a second temperature sensor, mounted at a distal end of the electrode, the controller being configured to reduce the supplied radio frequency power when the electrode temperature reaches a predetermined maximum electrode temperature.

In a combined steam and gas turbine engine cycle, a combustion chamber is made durable against high pressure and enlarged in length to increase the operation pressure ratio, without exceeding the heat durability temperature of the system while increasing the fuel combustion gas mass flow four times as much as the conventional turbine system and simultaneously for greatly raising the thermal efficiency of the system and specific power of the combined steam and gas turbine engine.Water pipes and steam pipes are arranged inside the combustion chamber so that the combustion chamber can function as a heat exchanger and thereby convert most of the combustion thermal energy into super-critical steam energy for driving a steam turbine and subsequently raising the operation pressure ratio and the thermal efficiencies of the steam turbine cycle and gas turbine cycle. The combustion gas mass flow can be also increased by four times as much as the conventional turbine system (up to the theoretical air to fuel ratio) and the thermal efficiency and the specific power of the gas turbine cycle are considerably increased.Further, the thermal efficiency of the combined system is improved by installing a magnetic friction power transmission system to transmit the power of the system to outer loads.

An ultrasonic medical probe has an elongate shaft with a head portion having a distal end face oriented at least partially transversely to a longitudinal axis of the shaft. The head portion has a lateral surface extending substantially parallel to the longitudinal axis, the lateral surface being provided with outwardly or radially extending projections. The shaft of the probe is provided with an internal longitudinal channel or bore and at least one ancillary or tributary channel communicating at an inner end with the longitudinal channel or bore and extending to the lateral surface. The ancillary or tributary channel has an outer end disposed in a region about the projections. The projections may be finely configured and distributed so as to form a knurled surface on the head portion.

It is an object of the present invention to provide a wafer prober wafer holder that is highly rigid and increases the heat insulating effect, thereby improving positional accuracy, thermal uniformity, and chip temperature ramp-up and cooling rates, as well as a wafer prober device equipped therewith.

A wafer holder of the present invention includes a chuck top that mounts a wafer, and a support member that supports the chuck top, wherein, a restricting member is provided that covers an interface between the chuck top and the support member. By covering the gap between the chuck top and the support member with the restricting member, the heat insulating effect can be increased by preventing the flow of outside air through the gap into the support member, and the cooling rate can be particularly improved if cooling to a temperature below room temperature.

The robot arm of the present application is a robot arm that transports semiconductor wafers. The robot arm includes a hand, a lower arm link, and an upper arm link. The hand is connected to the lower arm link via a first joint. The upper arm link is connected to the lower arm link via a second joint. In the robot arm of the present application, the lower arm link is capable of being separated at a location between the first joint and the second joint.

Disclosed is a susceptor which achieves uniform temperature distribution of a wafer placed on the susceptor, and also disclosed is a substrate processing apparatus provided with the susceptor. An annular recess 12a is formed in an intermediate portion between the central portion and the peripheral portion of a wafer support surface of the susceptor 12. Due to the provision of the recess, the substrate heating effect by thermal radiation from the susceptor is suppressed in the intermediate portion. The geometrical dimension of the recess is determined taking the chamber internal pressure into consideration.

A substrate processing apparatus includes a chamber, a susceptor to receive a substrate and provided in the chamber, a gas supply source to supply a predetermined gas into the chamber, and a high frequency power source to treat the substrate by plasma. The susceptor includes a first ceramics base member including a flow passage to let a coolant pass through, a first conductive layer formed on a principal surface and a side surface on a substrate receiving side of the first ceramics base member, and an electrostatic chuck stacked on the first conductive layer and configured to electrostatically attract the wafer received thereon. A volume of the flow passage is equal to or more than a volume of the first ceramics base member. The high frequency power source is configured to supply high frequency power to the first conductive layer.

An object of the present invention is to provide a honeycomb filter for purifying exhaust gases which makes it possible to alleviate a thermal stress generated due to occurrence of a local temperature change and which is less likely to generate cracks and superior in strength and durability, an adhesive that has a low thermal capacity and is capable of alleviating the thermal stress, a coating material that has a low thermal capacity with a superior heat insulating property and is capable of alleviating the thermal stress, and a manufacturing method of the honeycomb filter for purifying exhaust gases that can improve precision in the outside dimension, and reduce damages in the manufacturing processes.

The present invention relates to a honeycomb filter for purifying exhaust gases, having a structure in that a plurality of column-shaped porous ceramic members, each having a number of through holes that are placed side by side in the length direction with partition wall interposed therebetween, are combined with one another through adhesive layers so that the partition wall that separate the through holes are allowed to function as a filter for collecting particulates, and in this structure, the thermal expansion coefficient α_L of the adhesive layer and the thermal expansion coefficient α_F of the porous ceramic member are designed to have the following relationship:

0.01<|α_L−α_F|/α_F<1.0.

A method for cleaning a process chamber, comprising the steps of introducing at least one cleaning gas to the process chamber; and employing a rapid heating module located in the process chamber, wherein the rapid heating module increases the temperature of chamber parts and improves the surface temperature uniformity of chamber parts when the module is turned on, thereby assisting the cleaning activity of the cleaning gas such that the process chamber is cleaned.

A gas inlet manifold for a plasma chamber having a perforated gas distribution plate suspended by flexible side walls. The flexible suspension minimizes mechanical stress due to thermal expansion of the gas distribution plate. In another aspect, the suspension provides thermal isolation between the gas distribution plate and other components of the chamber.

An LED can include a silicon substrate and a pair of electrodes formed inside a horn that is formed on the silicon substrate by anisotropic etching. The LED can include an LED chip mounted inside the horn, the LED chip being electrically connected to the pair of electrodes. A resin mold made of a resin material can be filled in the horn.

Disclosed is an ultrasonic surgical device having a distally/proximally movable fluid management system consisting of single lumen or multiple lumens. The invention provides for the delivery of irrigation fluid or the removal of fluid, debris or vapor from the tissue-effecting portion of the blade while minimizing the loading on the blade. The blades of the surgical device, when excited at a natural blade system frequency, will have modal shapes characterized by longitudinal, transverse and/or torsional motion and will have nodal locations for these motions at positions along the tissue effecting length of the blade. The instrument is designed to allow for the fluid management system to be positioned at one or more motion nodes to facilitate efficient removal of tissue or fluid, which tends to accumulate at such nodes of the ultrasonic surgical blades.

A non-aqueous electrolyte battery separator comprising a heat-resistant nitrogen-containing aromatic polymer and a ceramic powder.