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109results about How to "Great fabrication" patented technology

Method for forming openings in low dielectric constant material layer

The invention is directed towards a method for forming openings in low-k dielectric layers and a structure for forming an opening thereof. A mask layer comprising at least one metal hard mask layer and one or more hard mask layers is applied on the dielectric layer for forming the opening.
Owner:UNITED MICROELECTRONICS CORP

Scatterometry and acoustic based active control of thin film deposition process

A system for monitoring and controlling the deposition of thin films employed in semiconductor fabrication is provided. The system includes one or more acoustic and / or ultrasonic wave sources, each source directing waves onto one or more thin films deposited on a wafer. Waves reflected from the thin film is collected by a monitoring system, which processes the collected waves. Waves passing through the thin film may similarly be collected by the monitoring system, which processes the collected waves. The collected waves are indicative of the presence of impurities and / or defects in the deposited thin film. The monitoring system analyzes and provides the collected wave data to a processor, which determines whether adjustments to thin film deposition parameters are needed. The system also includes a plurality of thin film deposition devices associated with depositing thin films on the wafer. The processor selectively controls thin film deposition parameters and devices to facilitate regulating deposition.
Owner:GLOBALFOUNDRIES INC

Curing resin composition and sealants and end-sealing materials for displays

It is an object of the invention to provide a curing resin composition that scarcely causes pollution of a liquid crystal owing to elution of its components to the liquid crystal material and therefore, causes little unevenness of color in liquid crystal display in the case of using it as a sealant for a liquid crystal display element or an end-sealing material for a liquid crystal display element in fabrication of a liquid crystal display element and that is excellent in the storage stability and therefore, optimum for fabrication of a display apparatus especially by one drop fill process and to provide a sealant for a display element and an end-sealing material for a display element using the composition.
The invention provides a curing resin composition to be used for a sealant or an end-sealing material for a display element, which comprises a curing resin together with a photopolymerization initiator and/or a curing agent and, has a carbonyl group derived from a (meth)acryl group together with an epoxy group and/or a hydroxyl group derived from an epoxy group and, a cured product of which has nitrogen atoms at a ratio of 3 to 10% by atom in the total of carbon atoms, hydrogen atoms and nitrogen atoms in the composition; a volume resistance of 1×1013 Ω·cm or higher; a dielectric constant of 3 or higher at 100 kHz; and a glass transition temperature of 80 to 150° C.
Owner:SEKISUI CHEM CO LTD +1

Apparatus for feeding inner wrapper for wrapping cigarette bundles

An apparatus for feeding an inner wrapper for an inner pack in a cigarette package has a rotatable web roll (R) formed by winding a web for the inner wrapper. The web has aluminum foil and a paper layer laminated onto the aluminum foil and containing menthol. The feeding apparatus further includes a scraper roller (45) for removing the menthol from the outer circumferential surface of the web roll (R), namely the surface of the aluminum foil. The scraper roller (45) has a plurality of scrapers (55) arranged in the outer circumferential surface thereof, the scrapers (55) being brought into contact with the outer circumferential surface of the web roll (R). The scrapers (55) are made of felt material.
Owner:JAPAN TOBACCO INC

Method and apparatus for specimen fabrication

A specimen fabrication apparatus including: a specimen chamber, a sample stage in the specimen chamber, to mount a specimen substrate, a transfer unit to extract a micro-specimen from the specimen substrate, and to transfer the micro-specimen, within the specimen chamber; a specimen holder in the specimen chamber, to receive the micro-specimen from the transfer unit, and to have the micro-specimen affixed thereto, and an irradiating optical system to irradiate an ion beam to the specimen substrate or to the micro-specimen affixed to the specimen holder, wherein the transfer unit effects transfer of the micro-specimen from the specimen substrate to the specimen holder, and the irradiating optical system irradiates the ion beam onto the micro-specimen affixed to the specimen holder, while the specimen chamber remains substantially sealed.
Owner:HITACHI LTD
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