38609results about How to "Good repeatability" patented technology

A method of depositing a silicon oxide film on a resist pattern or etched lines formed on a substrate by plasma enhanced atomic layer deposition (PEALD) includes: providing a substrate on which a resist pattern or etched lines are formed in a PEALD reactor; controlling a temperature of a susceptor on which the substrate is placed at less than 50° C. as a deposition temperature; introducing a silicon-containing precursor and an oxygen-supplying reactant to the PEALD reactor and applying RF power therein in a cycle, while the deposition temperature is controlled substantially or nearly at a constant temperature of less than 50° C., thereby depositing a silicon oxide atomic layer on the resist pattern or etched lines; and repeating the cycle multiple times substantially or nearly at the constant temperature to deposit a silicon oxide atomic film on the resist pattern or etched lines.

The present invention describes a method and apparatus for forming a uniform silicon containing film in a single wafer reactor. According to the present invention, a silicon containing film is deposited in a resistively heated single wafer chamber utilizing a process gas having a silicon source gas and which provides an activation energy less than 0.5 eV at a temperature between 750° C.-550° C.

The invention generally provides a ground shield for use in a physical vapor deposition (PVD) chamber. In one embodiment, a ground shield includes a generally cylindrical body comprising an outer wall, an inner upper wall, an inner lower wall having a diameter less than a diameter of the inner upper wall and a reentrant feature coupling the upper and inner lower walls. The reentrant feature advantageously prevents arching between the shield and target, which promotes greater process uniformity and repeatability along with longer chamber component service life.

A chip integrated waveguide feeding print antenna is composed by a chip with its two metal sides being transfixed with metal through holes in array. The two metal sides are in axial symmetry. There is an intergrading section to one side of the waveguide centerline on two surface of the chip linking with transmission line. To the outer end of the intergrading section links a vibrator antenna. To the opposite side of the intergrading section on the waveguide links a micro-strip intergrading commutator linking with micro-strip transmission line.

A short range radiolocation system and associated methods that allow the location of an item, such as equipment, containers, pallets, vehicles, or personnel, within a defined area. A small, battery powered, self-contained tag is provided to an item to be located. The tag includes a spread-spectrum transmitter that transmits a spread-spectrum code and identification information. A plurality of receivers positioned about the area receive signals from a transmitting tag. The position of the tag, and hence the item, is located by triangulation. The system employs three different ranging techniques for providing coarse, intermediate, and fine spatial position resolution. Coarse positioning information is provided by use of direct-sequence code phase transmitted as a spread-spectrum signal. Intermediate positioning information is provided by the use of a difference signal transmitted with the direct-sequence spread-spectrum code. Fine positioning information is provided by use of carrier phase measurements. An algorithm is employed to combine the three data sets to provide accurate location measurements.

The invention discloses a trajectory tracking control method used for an automatic driving robot of a vehicle, which relates to electronic control technologies of vehicles. The desired trajectory of a vehicle is described in a data point mode to obtain the current position information of the vehicle; humanoid driving is carried out according to the current driving direction at the current vehicle position to preview a distance ahead; the position obtained by previewing is compared with the desired trajectory to determine the lateral position deviation, the angle deviation and the vehicle speed deviation of the coordinate position obtained by previewing relative to the desired trajectory; then, the vehicle direction is jointly controlled by a trajectory tracking and speed controller according to position deviation and direction deviation; and according to vehicle speed deviation, the control quantities of an accelerator pedal and a brake pedal are determined with a fuzzy control method. The trajectory tracking control method is suitable for controlling the trajectory tracking of any trajectory, various vehicle types and various working conditions, and an automatic driving robot performs the control. The trajectory tracking control method has high precision and good repeatability and has an important meaning for guaranteeing the quality of vehicle reliability experiments and improving experiment safety.

The invention discloses a carbon / silicon / carbon nano composite structure cathode material and a preparation method thereof, belonging to the technical field of electrochemical power supply technologies. The cathode material consists of a carbon-based conductive substrate, nano silicon and a nano carbon coating layer, wherein the nano silicon is uniformly distributed on the carbon-based conductive substrate; the nano carbon coating layer is arranged on the surface of the nano silicon; the carbon-based conductive substrate is porous carbon, a carbon nanotube or graphene; the nano silicon exists in the state of nanoparticles or nano films; the weight percentage of the nano silicon in the cathode material is 10-90 percent; and the thickness of the nano carbon coating layer is 0.1-10 nanometers. The preparation method comprises the following steps of: depositing nano silicon on the carbon substrate in a reaction space in oxygen-free atmosphere by adopting a chemical vapor deposition process; and coating nano carbon on the surface of the nano silicon by adopting the chemical vapor deposition process. In the obtained carbon / silicon / carbon composite cathode material, the volume change of a silicon electrode material is controlled effectively in the charging and discharging processes, the electrode structure is kept complete, the circulation volume is large, the circulation service life is long, and the electrochemical performance is high.

Equipment for infrared vision of anatomical structures applicable to assist the physicians in endoscopic, fetoscopic or laparoscopic operations and methods for signal processing to enhance said vision, comprising two units that work together: a multimodal or multispectral imaging unit, constituted by a device comprising an endoscope or fetoscope or laparoscope, and additional optical systems to acquire multimodal images of the interior of the patient's body; and an image processing unit, to which said images are transferred, comprising processing devices with a navigation interface which process said images and display the patient's enhanced anatomical map image and the endoscope location, equipped with hardware and software that apply at least five different vision-enhancing methods, namely normalization, segmentation, tracking, mapping and fusion.

The invention discloses a film deposition method which comprises the following steps: placing a first electrode plate used as an anode and a second electrode plate used as a cathode in parallel in a reaction chamber, wherein the surface of the second electrode plate facing to the first electrode plate is provided with a sacrificial layer; putting a substrate on the surface of the first electrode plate facing to the sacrificial layer; leading etching gas into the reaction chamber; grounding the first electrode plate, and applying DC negative voltage to the second electrode plate; ionizing the etching gas into a plasma so as to etch the sacrificial layer, and depositing a film on the surface of the substrate. The film deposition method can improve the performance, particularly the stability of the film and the uniformity of large-area film deposition.

The present invention relates generally to semiconductor fabrication and particularly to fabricating magnetic tunnel junction devices. In particular, this invention relates to a method for using the dielectric layer in tunnel junctions as an etch stop layer to eliminate electrical shorting that can result from the patterning process.

A plasma processing apparatus has a liquid storage vessel which is formed outside of a dielectric window and in which a plasma-exciting coil or electrode is placed inside and moreover in which an electrically insulative liquid is stored in the inside of the liquid storage vessel, as well as a cooling unit and a heating unit for the liquid. Temperature of the liquid stored in the liquid storage portion is adjusted, by which temperature of the plasma-exciting coil or electrode and the dielectric window is controlled via the liquid.

A graphical password authentication arrangement and method display a grid on a display upon a user's request to access a restricted resource. The graphical password authentication arrangement requires the user to enter his or her access password by selecting one or more intersections on the grid on the display with an input device. A processing means determines whether to grant the user to access the restricted resource by comparing the access password entered with a corresponding file password for the user, which is stored in a storage means.

The invention relates to a catalyst for dehydrogenating propane to prepare propone, which uses thermal-resistant oxide as carrier, uses palladium-group metal as main catalyst, uses IV A group metal and rare-earth metal as agents, uses halogen as modifier, and uses inorganic oxide with high temperature resistance as adhesive. The inventive catalyst under high temperature and low pressure has higher propane transfer rate, propone selectivity and reaction stability. And the preparation comprises that at 60-100Deg. C, immerging thermal-resistant oxide with rare-earth metal water solution for 2-10h, at 60-180Deg. C baking for 2-10h, at 400-600Deg. C baking for 3-10h, immerging said carrier and the water solution which contains palladium metal and IVA metal at 60-100Deg. C for 2-10h, and baking for 2-10h at 60-180Deg. C, adding adhesive, protruding agent and acid gel solvent, protruding and shaping, baking for 2-10h at 60-180Deg. C, activating for 3-10h at 400-600Deg. C, and reducing for 2-10h in hydrogen flow at 400-600Deg. C.

The present invention discloses a rice whole genome SNP chip and an application thereof. A method for preparing the chip comprises: (1) obtaining a first class of probes on a chip, wherein sequencing is performed to obtain a parental genome sequence, resequencing data of other rice varieties in a public database are combined, a Nipponbare genome is adopted as a reference sequence, a MAQ software is adopted to match and analyze all the sequencing data, and finally a SNP marker is screened; (2) obtaining a second class of probes on the chip, wherein a rice function gene is obtained from the public database, sequence difference reflecting gene function is searched, and a SNP / INDEL probe is designed according to the sequence difference; (3) adopting an infinium chip manufacturing technology to produce a SNP chip; and (4) testing accuracy and application efficiency of the chip. The chip of the present invention can be applicable for rice germplasm resource molecule marker fingerprint analysis, seed authenticity detection, filial generation genotyping, and other related researches.

This invention incorporates the techniques of geophysical technology into medical imaging. Ultrasound waves are generated from multiple, simultaneous sources tuned for maximum penetration, resolution, and image quality. Digitally recorded reflections from throughout the body are combined into a file available for automated interpretation and wavelet attribute analyses. Unique points within the object are imaged from multiple positions for signal-to-noise enhancement and wavelet velocity determinations. This system describes gaining critical efficiencies by reducing equation variables to known quantities. Sources and receivers are locked in invariant, known positions. Statistically valid measurements of densities and wavelet velocities are combined with object models and initial parameter assumptions. This makes possible three-dimensional images for viewing manipulation, mathematical analyses, and detailed interpretation, even of the body in motion. The invention imposes a Cartesian coordinate system on the image of the object. This makes reference to any structure within the object repeatable and precise. Finally, the invention teaches how the recording and storing of the received signals from a whole body analysis makes a subsequent search for structures and details within the object possible without reexamining the object.

A reaction-based process has been developed for the selective removal of carbon dioxide from a multicomponent gas mixture. The proposed process effects the separation of CO2 from a mixture of gases by its reaction with metal oxides. The Calcium based Reaction Separation for CO2 process consists of contacting a CO2 laden gas with calcium oxide in a reactor such that CaO captures the CO2 by the formation of calcium carbonate. Once “spent”, CaCO3 is regenerated by its calcination leading to the formation of fresh CaO sorbent. The “regenerated” CaO is then recycled for the further capture of more CO2. This process also identifies the application of a mesoporous CaCO3 structure, that attains >90% conversion over multiple carbonation and calcination cycles. Lastly, thermal regeneration (calcination) under vacuum provided a better sorbent structure that maintained reproducible reactivity levels over multiple cycles.

A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system comprises an inspection station for receiving a workpiece and a scanner positioned and arranged to scan a surface of the workpiece at the inspection station. The scanner includes a light source arranged to project a beam of P-polarized light and a scanner positioned to scan the P-polarized light beam across the surface of the workpiece. The system further provides for detecting differences in the angular distribution of the light scattered from the workpiece and for distinguishing particle defects from pit defects based upon these differences.

Methods of fabricating devices for collecting a sample of physiological and for measuring a characteristic, e.g., an analyte concentration, of the sampled physiological sample. The devices are in the form of a test strip which include a biosensor and at least one skin-piercing element which is a planar extension of a portion of the biosensor. The fabrication methods provide various or forming the test strip and the skin-piercing element.

The invention provides a method for preparing a complexly shaped biomedical porous titanium molybdenum alloy implant body and belongs to the technical field of biomedical porous metallic material preparation. The method comprises the following steps of: taking a mixture of titanium and molybdenum metallic element powder and organic polymer powder as raw materials, and then preparing the biomedical porous titanium molybdenum alloy implant body by adopting the processes, such as three-dimensional modeling, selective laser-firing rapid forming, thermal de-greasing, vacuum sintering, and the like. The processing steps are simple, the period is short, the use ratio of materials is high, the cost is low, any complexly shaped porous titanium alloy implant body can be conveniently manufactured, and the method has efficiency and economic advantages in individual design and rapid manufacturing of the implant body. A titanium molybdenum alloy material prepared by using the method has the advantages that pore space is uniform, adjustment scopes of porosity, aperture ratio and aperture are wide, elasticity modulus and compression strength are in close proximity to natural bone, and the demand on biomechanical compatibility required by a biomedical material is met.

A reaction-based process has been developed for the selective removal of carbon dioxide (CO2) from a multicomponent gas mixture to provide a gaseous stream depleted in CO2 compared to the inlet CO2 concentration in the stream. The proposed process effects the separation of CO2 from a mixture of gases (such as flue gas / fuel gas) by its reaction with metal oxides (such as calcium oxide). The Calcium based Reaction Separation for CO2 (CaRS-CO2) process consists of contacting a CO2 laden gas with calcium oxide (CaO) in a reactor such that CaO captures the CO2 by the formation of calcium carbonate (CaCO3). Once “spent”, CaCO3 is regenerated by its calcination leading to the formation of fresh CaO sorbent and the evolution of a concentrated stream of CO2. The “regenerated” CaO is then recycled for the further capture of more CO2. This carbonation-calcination cycle forms the basis of the CaRS-CO2 process. This process also identifies the application of a mesoporous CaCO3 structure, developed by a process detailed elsewhere, that attains >90% conversion over multiple carbonation and calcination cycles. Lastly, thermal regeneration (calcination) under vacuum provided a better sorbent structure that maintained reproducible reactivity levels over multiple cycles.

A reaction-based process has been developed for the selective removal of carbon dioxide (CO2) from a multicomponent gas mixture to provide a gaseous stream depleted in CO2 compared to the inlet CO2 concentration in the stream. The proposed process effects the separation of CO2 from a mixture of gases (such as flue gas / fuel gas) by its reaction with metal oxides (such as calcium oxide). The Calcium based Reaction Separation for CO2 (CaRS—CO2) process consists of contacting a CO2 laden gas with calcium oxide (CaO) in a reactor such that CaO captures the CO2 by the formation of calcium carbonate (CaCOa). Once “spent”, CaCO3 is regenerated by its calcination leading to the formation of fresh CaO sorbent and the evolution of a concentrated stream of CO2. The “regenerated” CaO is then recycled for the further capture of more CO2. This carbonation-calcination cycle forms the basis of the CaRS—CO2 process. This process also identifies the application of a mesoporous CaCO3 structure, developed by a process detailed elsewhere, that attains >90% conversion over multiple carbonation and calcination cycles. Lastly, thermal regeneration (calcination) under vacuum provided a better sorbent structure that maintained reproducible reactivity levels over multiple cycles.

The present invention includes an apparatus, system and method for the development and use of transcriptional modules by obtaining individual gene expression levels from cells obtained from one or more patients with a disease or condition; recording the expression value for each gene in a table that is divided into clusters; iteratively selecting gene expression values for one or more transcriptional modules by: selecting for the module the genes from each cluster that match in every disease or condition; removing the selected genes from the analysis; and repeating the process of gene expression value selection for genes that cluster in a sub-fraction of the diseases or conditions; and iteratively repeating the generation of modules.

A biosensor is constituted by disposing an electrode system including a working electrode and a counter electrode on a substrate, forming an inorganic particulate-containing layer containing inorganic particulates thereon, and forming a reagent layer containing a reagent thereon. The inorganic particulates make it possible to prevent impurities in a sample from being in contact with the electrode system and being adsorbed therein, so that measurement is performed with high precision. The inorganic particulate-containing layer can be formed by applying a dispersion system of inorganic particulates and drying them, and it is preferable that the inorganic particulates are contained in the form of aggregates.

A pharmaceutical formulation for delayed release of the active ingredient 3-(3-dimethylamino-1-ethyl-2-methylpropyl)phenol or a pharmaceutically acceptable salt thereof in a matrix containing between 1 and 80 wt. % of at least one pharmaceutically acceptable hydrophilic or hydrophobic polymer as a matrix forming agent and exhibiting in vivo the following release rate: 3 to 35% by weight (based on 100% by weight active ingredient) 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 0.5 hours; 5 to 50% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 1 hour; 10 to 75% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 2 hours; 15 to 82% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 3 hours; 30 to 97% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 6 hours; more than 50% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 12 hours; more than 70% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 18 hours, and more than 80% by weight 3-(3-dimethylamino-1-ethyl-2-methyl-propyl)phenol released after 24 hours.

This invention concerns the method of extracting salvianolic acid A from Chinese crude drug: danshen root, and the quality control methods and drug combinations, and the application of this drug. It can be used in the preparation of the prevention drugs for cardiovascular disease, liver damage, liver fibrosis, pulmonary fibrosis and other.

The invention discloses a method for grafting a polymer ona surface of graphene. The method comprises the following steps: adding 1 part by weight of graphene or graphene oxide, 10-1000 parts by weight of solvent and 10-1000 parts by weight of vinyl monomer, and adding 0.01-10 parts by weight of initiator under introduction of nitrogen; heating to 55-90 DEG C, and carrying out reaction for 1.5-60hours; and precipitating, centrifugating, washing, and drying, thus obtaining a product of polymer-grafted graphene. The method is convenient and simple in process, can be used for the large-scale production, is the universal method and ensures that a variety of polymers can be grated onto the graphene. The obtained functionalized graphene has good solubility and good solution processability, is conducive and has extensive application value in micro-nano electronics, machinery, chemical industry, high-performance materials and other fields.