5983results about How to "Temperature control" patented technology

A tray 15 for a dry etching apparatus 1 has substrate accommodation holes 19A to 19D penetrating thickness direction and a substrate support portion 21 supporting an outer peripheral edge portion of a lower surface 2a of a substrate 2. A dielectric plate 23 has a tray support surface 28 supporting a lower surface of the tray 15, substrate placement portions 29A through 29D inserted from a lower surface side of the tray 15 into the substrate accommodation holes 19A through 19D and having a substrate placement surface 31 at its upper end surface for placing the substrate 2. A dc voltage applying mechanism 43 applies a dc voltage to an electrostatic attraction electrode 40. A heat conduction gas supply mechanism 45 supplies a heat conduction gas between the substrate 2 and substrate placement surface 31. The substrate 2 can be retained on the substrate placement surface 31 with high degree of adhesion. This results in that the cooling efficiency of the substrate 2 is improved and processing is uniformed at the entire region of the substrate surface including the vicinity of the outer peripheral edge.

A load control system for a building having a lighting load, a window, and a heating and cooling system comprises a lighting control device for controlling the amount of power delivered to the lighting load, a motorized window treatment comprising a window treatment fabric for covering the window, a temperature control device for controlling a setpoint temperature of the heating and cooling system to thus control a present temperature in the building, and a dynamic keypad comprising a visual display and operable to receive a user input. The dynamic keypad allows a user to select, adjust, and monitor a plurality of energy-savings modes of the load control system. For example, the dynamic keypad allows the user to enable and adjust a setback temperature of the temperature control device on-the-fly.

A pedestal assembly and method for controlling temperature of a substrate during processing is provided. In one embodiment, the pedestal assembly includes a support member that is coupled to a base by a material layer. The material layer has at least two regions having different coefficients of thermal conductivity. In another embodiment, the support member is an electrostatic chuck. In further embodiments, a pedestal assembly has channels formed between the base and support member for providing cooling gas in proximity to the material layer to further control heat transfer between the support member and the base, thereby controlling the temperature profile of a substrate disposed on the support member.

A method and system for controlled thermal injury of human superficial tissue based on the ability to controllably create thermal lesions of variable shape, size, and depth via precise spatial and temporal control of acoustic energy deposition. The apparatus includes a control system and probes that facilitate treatment planning, control and delivery of energy, and monitoring of treatment conditions.

A method and system for noninvasive face lifts and deep tissue tightening are disclosed. An exemplary method and treatment system are configured for the imaging, monitoring, and thermal injury to treat the SMAS region. In accordance with an exemplary embodiment, the exemplary method and system are configured for treating the SMAS region by first, imaging of the region of interest for localization of the treatment area and surrounding structures, second, delivery of ultrasound energy at a depth, distribution, timing, and energy level to achieve the desired therapeutic effect, and third to monitor the treatment area before, during, and after therapy to plan and assess the results and/or provide feedback.

An air conditioning apparatus for a vehicle seat includes a seat blower unit disposed in a lower side of the seat, and a seat duct for leading air from an air conditioning unit to the seat through the seat blower unit. In the air conditioning apparatus, it can be determined that heat load of a passenger compartment is decreased to a predetermined value based on an operation state of a unit blower of the air conditioning unit, and the seat blower is stopped when the heat load is decreased to the predetermined value. Further, the seat blower is turned on or off according to the heat load of the passenger compartment, so that temperature of the seat can be controlled within a predetermined range. On the other hand, even when the unit blower is stopped when a water temperature of a heating unit of the air conditioning unit is lower than a set temperature, the seat blower unit and an electrical heater disposed in the seat duct are operated so that air passing through the heating unit is heated by the electrical unit and is blown into the seat by the seat blower unit.

A pedestal assembly and method for controlling temperature of a substrate during processing is provided. In one embodiment, the pedestal assembly includes an electrostatic chuck coupled to a metallic base. The electrostatic chuck includes at least one chucking electrode and metallic base includes at least two fluidly isolated conduit loops disposed therein. In another embodiment, the pedestal assembly includes a support member that is coupled to a base by a material layer. The material layer has at least two regions having different coefficients of thermal conductivity. In another embodiment, the support member is an electrostatic chuck. In further embodiments, a pedestal assembly has channels formed between the base and support member for providing cooling gas in proximity to the material layer to further control heat transfer between the support member and the base, thereby controlling the temperature profile of a substrate disposed on the support member.

The invention provides a method for preparing a polymer microporous foaming material by supercritical mould foaming. The method comprises the following steps of: heating a foaming mould on a mould press to the foaming temperature; placing a polymer into the mould; closing the mould by using the mould press; sealing the mould; introducing supercritical fluid, which swells and diffuses to the polymer, into the mould; and opening the mould by using the mould press to release pressure and foam to obtain the polymer microporous foaming material. Compared with the prior art, the method has the advantages that: the high-temperature and high-pressure supercritical fluid is used for swelling the polymer, so the moulding cycle is greatly shortened; the limit that only microporous foaming sheet material with lesser thickness can be manufactured in the prior art is broken through, so a polymer microporous foaming plate with greater thickness can be manufactured; when the mould is opened, the pressure-releasing speed is high and the foaming pore core-forming speed is high, so the formed microporous foaming material has smaller foaming pores, higher pore density and more excellent performance; and multiple layers of moulds can be placed on one mould press, so the method is suitable for industrialized scale production.

A vaporizing reservoir including a containment vessel having a first shaft port exposed to ambient and one or more sidewalls defining a body portion having an interior cavity and a vaporizing portion communicated to the interior cavity; an inductive coil disposed within the vaporizing portion, the inductive coil electrically disconnected outside of the containment vessel and configured for inductive heating; and an air shaft communicated to the vaporizing portion and extending to the first shaft port. Fluid or solid material may be present in the interior cavity for vaporization. For fluid material, a wick may be included with the inductive coil to facilitate communication of the material to the inductive coil. An exterior inductive coil heats the inductive coil within the vaporizing portion and vaporizes the material communicated to the interior inductive coil. Vapor from the heated interior inductive coil is extracted through the air shaft.

A method and device for increasing blood flow by applying positive pressure to extremities of a mammal and/or controlling the temperature of the mammal. The device includes one or more collapsible and pliant body elements capable of expanding and flexibly applying pressurized compression forces to the extremity of the mammal by attaching one or more pressure-applying gas plenums as close to the extremity as possibly. The flexible extremity device can be used independently or can be used in conjunction with thermal pads disposed to the one or more collapsible and pliant body elements. Alternatively, the one or more collapsible and pliant body elements can be manufactured into thermal pads.

The invention relates to a radiating and cooling device for a power battery. An aluminum hollow cold plate shell is in the form of a radiating fin; the inside of the shell is hollow; a plurality of groove spaces are formed on the aluminum shell; power batteries can be embedded into grooves; the aluminum hollow cold plate shell is filled with a phase change material; radiating fins are arranged on an aluminum hollow cold plate shell bottom plate; a snakelike copper tube is arranged at the bottom of an aluminum shell cavity, and is contacted with the phase change material; a liquid cooling working medium is introduced into the snakelike copper tube; the snakelike copper tube, a pump and an external heat exchanger are connected in series, so that an active liquid cooling system is formed; a temperature sensor is arranged on the surface of the power battery; and a temperature switch is connected in series with a pump body power supply. The flow of the cooling working medium can be adjusted according to different requirements of battery temperature control; the using amount of a metal is reduced by adding the phase change material on the premise of ensuring the battery radiating effect, so that the cost of a battery radiating device is reduced effectively; and the requirements of different power batteries are met.