886 results about "Electrostatic attraction" patented technology

A tray 15 for a dry etching apparatus 1 has substrate accommodation holes 19A to 19D penetrating thickness direction and a substrate support portion 21 supporting an outer peripheral edge portion of a lower surface 2a of a substrate 2. A dielectric plate 23 has a tray support surface 28 supporting a lower surface of the tray 15, substrate placement portions 29A through 29D inserted from a lower surface side of the tray 15 into the substrate accommodation holes 19A through 19D and having a substrate placement surface 31 at its upper end surface for placing the substrate 2. A dc voltage applying mechanism 43 applies a dc voltage to an electrostatic attraction electrode 40. A heat conduction gas supply mechanism 45 supplies a heat conduction gas between the substrate 2 and substrate placement surface 31. The substrate 2 can be retained on the substrate placement surface 31 with high degree of adhesion. This results in that the cooling efficiency of the substrate 2 is improved and processing is uniformed at the entire region of the substrate surface including the vicinity of the outer peripheral edge.

A tray 15 for a dry etching apparatus 1 has substrate accommodation holes 19A to 19D penetrating thickness direction and a substrate support portion 21 supporting an outer peripheral edge portion of a lower surface 2a of a substrate 2. A dielectric plate 23 has a tray support surface 28 supporting a lower surface of the tray 15, substrate placement portions 29A through 29D inserted from a lower surface side of the tray 15 into the substrate accommodation holes 19A through 19D and having a substrate placement surface 31 at its upper end surface for placing the substrate 2. A dc voltage applying mechanism 43 applies a dc voltage to an electrostatic attraction electrode 40. A heat conduction gas supply mechanism 45 supplies a heat conduction gas between the substrate 2 and substrate placement surface 31. The substrate 2 can be retained on the substrate placement surface 31 with high degree of adhesion. This results in that the cooling efficiency of the substrate 2 is improved and processing is uniformed at the entire region of the substrate surface including the vicinity of the outer peripheral edge.

Provided are a conductive endless belt, a method of producing the same, and an image forming apparatus employing the same, the conductive endless belt having both desirable intended belt properties and surface properties, and being producible without known problems in terms of cost and quality. A conductive endless belt 100 is used as a transfer / transport conductive endless belt for a tandem system in which the conductive endless belt is circularly driven by a drive member so as to transport a recording medium held by the belt through electrostatic attraction to four differing image forming bodies, in which the toner images are sequentially transferred onto the recording medium. The conductive endless belt 100 is composed of a belt base 101 having thereon a resin layer 102, the resin layer 102 containing an ultraviolet or electron beam curable resin. The resin layer 102 preferably contains a conductive agent, specifically carbon black.

An electrostatic chuck device includes an electrostatic chuck member and a temperature controlling base member. The electrostatic chuck member has a ceramic plate having a mounting surface on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction provided on the other surface on the side opposite the mounting surface of the ceramic plate. The temperature controlling base member is disposed on the surface on the side opposite the ceramic plate side of the electrode for electrostatic attraction and cools the electrostatic chuck member. The ceramic plate has a dike portion which extends to the temperature controlling base member side and surrounds the electrode for electrostatic attraction, the temperature controlling base member has a groove portion accommodating an end part of the dike portion, and a space between the groove portion and the dike portion is filled with a filling part formed of a resin material.

Surfactants (e.g., fluorosurfactants) for stabilizing aqueous or hydrocarbon droplets in a fluorophilic continuous phase are presented. In some embodiments, fluorosurfactants include a fluorophilic tail soluble in a fluorophilic (e.g., fluorocarbon) continuous phase, and a headgroup soluble in either an aqueous phase or a lipophilic (e.g., hydrocarbon) phase. The combination of a fluorophilic tail and a headgroup may be chosen so as to create a surfactant with a suitable geometry for forming stabilized reverse emulsion droplets having a disperse aqueous or lipophilic phase in a continuous, fluorophilic phase. In some embodiments, the headgroup is preferably non-ionic and can prevent or limit the adsorption of molecules at the interface between the surfactant and the discontinuous phase. This configuration can allow the droplet to serve, for example, as a reaction site for certain chemical and / or biological reactions. In another embodiment, aqueous droplets are stabilized in a fluorocarbon phase at least in part by the electrostatic attraction of two oppositely charged or polar components, one of which is at least partially soluble in the dispersed phase, the other at least partially soluble in the continuous phase. One component may provide collodial stability of the emulsion, and the other may prevent the adsorption of biomolecules at the interface between a component and the discontinous phase. Advantageously, surfactants and surfactant combinations of the invention may provide sufficient stabilization against coalescence of droplets, without interfering with processes that can be carried out inside the droplets.

An apparatus and method for electrostatic spray deposition of small targets, such as medical devices like stents. The apparatus includes a target holder which applies a first electrical potential to the target, and an electrostatic dispensing nozzle which applies a second potential sufficient to attract the coating fluid from the nozzle toward the target. Because the entire dispensing nozzle is conductive, the coating fluid may receive a greater charge than may be obtained with internal electrode-type nozzles. Electrostatic attraction of the coating fluid to the target is enhanced by the combination of higher charge density imparted to the coating fluid by the conductive nozzle, and application of a momentary voltage spike to the target to provide consistent conductivity between the target and its holder, thereby ensuring the target is presents the full first potential applied to the holder. The voltage spike may also be used independently of the conductive nozzle.

An apparatus and method for electrostatic spray deposition of small targets, such as medical devices like stents. The apparatus includes a target holder which applies a first electrical potential to the target, and an electrostatic dispensing nozzle which applies a second potential sufficient to attract the coating fluid from the nozzle toward the target. Because the entire dispensing nozzle is conductive, the coating fluid may receive a greater charge than may be obtained with internal electrode-type nozzles. Electrostatic attraction of the coating fluid to the target is enhanced by the combination of higher charge density imparted to the coating fluid by the conductive nozzle, and application of a momentary voltage spike to the target to provide consistent conductivity between the target and its holder, thereby ensuring the target is presents the full first potential applied to the holder. The voltage spike may also be used independently of the conductive nozzle.

An optical deflection device includes a substrate; a plurality of regulating members including upper portions including stoppers; a fulcrum member serving as an electrode; a plate member; and a plurality of electrodes. The plurality of regulating members, the fulcrum member, and the plurality of electrodes are provided on the substrate, with the plate member approximately opposite to the plurality of electrodes and movable in a space formed by the substrate, the fulcrum member, and the stoppers. The plate member includes unfixed edge portions, a light reflecting region, and a conductive layer electrically connected to the fulcrum member. By fixing at least a part of the plurality of electrodes to predetermined potentials and changing a potential of the fulcrum member, the plate member is displaced around the fulcrum member by electrostatic attraction force, and a light incident in the light reflecting region in a direction is deflected and reflected in another direction.

Fistly, said ivnention utilizes polyamine aminolyzed polyester polymer surface to obtain polymer whose surface has free amine group, then uses acid to make acidification to make polymer surface possess positive charge, and utilzies electrostatic attraction layer-to-layer self-assembling method to alternatively assemble single layer or several layers of different polyanions and polycations with biological activity on its surface, and these biological activity polyelectrolytes which are layer-to-layer self-assembled still retain their original biological activity so as to obtain the invented plane membrane and three-D porous support material with cell compatibility and its product.

A high performance liquid chromatography system employs a nebulizer with a flow restriction at the exit of its mixing chamber to produce finer droplets, and an adjustable impactor for increased control over droplet sizes. Downstream of the mixing chamber, the nebulizer can incorporate tubing that is permeable to the sample liquid, to promote aerosol drying through perevaporation. A condensation particle counter downstream of the nebulizer uses water as the working medium, and is adjustable to control threshold nucleation sizes and droplet growth rates. A particle size selector employing diffusion, electrostatic attraction or selection based on electrical mobility, is advantageously positioned between the nebulizer and the CPC.

An electrostatic chuck according to the present invention exhibits a greater attractive force by virtue of the Johnson-Rahbeck effect, while ensuring satisfactory insulation in a ceramic portion present below an electrostatic attraction electrode thereof in a temperature range of 250 to 450° C. The electrostatic chuck is produced by superposing green sheets printed with a conductive paste and green sheets not printed with the conductive paste in a predetermined order with a binding liquid applied on the respective green sheets, heat- and press-bonding the superposed green sheets and firing the heat- and press-bonded green sheets. During the production, a conductive component of the electrostatic attraction electrode is diffused into the ceramic portion present between the electrode and an attractive surface of the chuck.

The invention provides an electrostatic chuck capable of widening a temperature range when the temperature of a flat substrate is controlled and reducing a variation in thermal conductivity between the electrostatic chuck and the flat substrate over time. According to an aspect of the invention, an electrostatic chuck includes: a body that has an internal electrode for attracting a flat substrate by an electrostatic force provided therein; a plurality of protrusions that are formed on one surface of the body, serving as an electrostatic attraction surface; and one or more minute projections that are provided on each of top surfaces of some or all of the plurality of protrusions. In the electrostatic chuck, a region of the top surface of each of the minute projections on which the flat substrate is loaded is referred to as a mounting surface, and the total area of the mounting surfaces of the minute projections is equal to or larger than 0.01% and equal to or smaller than 2% of the area of the electrostatic attraction surface.

A method and apparatus for the separation of particles from a flow of gas, where both large, heavy and small, light particles can be separated off from the gas by means of the combined effect of an electrostatic attraction force and a centrifugal force in a centrifugal separator (10) of the type that comprises a rotor (14) that has a plurality of adjacent surface elements (16) with intermediate gas flow gaps (48) and that is mounted in such a way that it can rotate in a surrounding casing (12), which casing has an inlet (18) for unclean gas and an outlet (22) for clean gas and an outlet (24) for separated-of f particles. A charging unit (44) ionizes the particles upstream of the rotor (14). An electrical field is generated between adjacent surface elements (16) of the rotor in order to attract the ionized light particles towards a face of the surface elements by means of the electrostatic force. By means of the centrifugal force created by the rotor, the particles that have accumulated on the surface elements are thrown towards the inside of the casing and are led out through the outlet.

An electrostatic pressure transducer (e.g., a condenser microphone) includes a plate having a plurality of holes and forming a fixed electrode, a diaphragm forming a vibrating electrode, at lease one spacer that is positioned between the plate and the diaphragm in the ring-shaped internal area internally of the peripheral end of the diaphragm, and a stopper plate having an opening, which is positioned opposite to the plate with respect to the diaphragm. The diaphragm vibrates relative to the plate in such a way that, due to electrostatic attraction, the internal portion thereof moves close to the plate while the external portion thereof moves opposite to the plate, wherein the peripheral end thereof partially comes in contact with the opening edge of the stopper plate. Thus, it is possible to realize flat frequency characteristics while improving the sensitivity in low-frequency ranges.

An electrostatic chuck for holding a wafer includes a ceramic plate of which one main surface is formed to work as a mounting surface for mounting the wafer, and electrostatic attraction electrodes formed on a lower surface of the ceramic plate or in the ceramic plate. A recess portion having a depth in a range of from 3 to 10 mum is formed on one main surface of the ceramic plate excluding an outer peripheral portion thereof. The waviness of a top face of the outer peripheral portion is set to 1 to 3 mum, a gas groove is provided to a peripheral portion of a bottom surface of the recess-portion bottom surface, and electrostatic attraction electrodes are disposed in the ceramic plate disposed below the bottom surface of the convex portion. In the electrostatic chuck thus constructed, even a wafer having a deformation such as a warped portion can be firmly attracted, a uniform temperature distribution over a wafer surface can be implemented, leakage of a heat-conductive gas can be suppressed, and moreover, high wafer-dechucking sensitivity can be exhibited.

Disclosed herein is a latchable MEMS switch device capable of retaining its ON or OFF state even after the external power source is turned off. It is unnecessary not only to introduce novel materials such as magnetic material but also to form complicated structures. At least one of the cantilever and pull-down electrode of a cold switch is connected to a second MEMS switch. A capacitor between the cantilever and pull-down electrode of the cold switch is charged by the second MEMS switch. Thereafter since the cold switch is isolated in the device, the charge remains stored. Therefore, the cold switch can remain in the ON state since the charge continues to create electrostatic attraction between the cantilever and the pull-down electrode.

The invention relates to an antibacterial finishing method for textile containing cellulose. The method uses natural polymer chitosan and sodium alginate as wall materials; traditional Chinese medicine extracts are used as a core material and are subjected to encapsulation by a micro capsule technology; then an afterfinishing method is employed to treat the microcapsule to the partially carboxymethylated textile containing cellulose, so as to endow the textile with antibacterial performance and good wash fastness through electrostatic attraction between the carboxyl on cellulose fiber and chitosan, as well as the crosslinking effect of the cross-linking agent. The raw materials employed by the invention are green, environment-friendly, safe and high-efficiency, and the obtained textile has good antibacterial effect on common staphylococcus aureus, Eschierichia coli and bacillus subtilis.

A molding apparatus of a glass material according to the present invention is characterized by containing means for holding a glass material and a molding die in contact with each other, means for heating the glass material and the molding die, and means for applying a voltage across the glass material and the molding die, in which press-molding is performed by electrostatic attraction acting between a surface of the glass material and a surface of the molding die. Further, a molded product of a glass material according to the present invention is characterized by including an alkali metal as a component, in which a concentration of the alkali metal is lowered in vicinity of a surface to be molded as compared with that of a glass base material.

In a capacitor microphone, a diaphragm is positioned opposite to a fixed electrode for covering inner holes of a ring-shaped support, wherein when the diaphragm is deflected to approach the fixed electrode due to electrostatic attraction upon application of a bias voltage, internal stress that occurs on the diaphragm is canceled by compressive stress that is applied to the diaphragm in advance. The diaphragm is formed using a multilayered structure including a first thin film and a second thin film whose internal stress differs from the internal stress of the first thin film, thus adjusting the total internal stress thereof. The diaphragm can be formed in such a way that a center layer having a single-layered structure is sandwiched between first and second coating layers having controlled residual tensions and resistance against hydrofluoric acid.

An air purifier provides various air purification functions relating to various environmental conditions by increasing a purification function relative to specific contaminants through replacement of a filter based on the environment to be purified. The air purifier includes a main body of a structure allowing air to pass therethrough. A replaceable filter is received into the main body and is replaceable on a basis of the environmental properties of a space to be purified, removing contaminants in the air passing through the main body. Further, the air purifier includes a dust collecting unit to charge dust particles electrically and to collect the dust particles by electrostatic attraction. In addition, a metal filter functions to collect the dust particles charged in the dust collecting unit, and a HEPA filter is used to collect micro-contaminants. The metal filter is positioned in front of the HEPA filter.

The invention discloses a preparation method of a supercapacitor based on a grapheme-carbon nanotube composite material. Firstly, blending is performed to the grapheme and the carbon nanotube which are with opposite charges. Through an electrostatic attraction effect, the carbon nanotube is inserted into the grapheme so as to obtain the grapheme-carbon nanotube composite material. Then, the obtained grapheme-carbon nanotube composite material is used to prepare an electrode slice of the supercapacitor and packaging is performed so as to obtain the supercapacitor. In a traditional preparation method, the grapheme-carbon nanotube composite material is prepared by directly blending and then the supercapacitor is formed by assembling. Compared to the traditional preparation method, by using the preparation method of the invention, a composite material production rate is high and a supercapacitor preparation efficiency can be improved greatly. An ionic liquid is taken as a electrolyte. And a decomposition voltage of the ionic liquid is higher than the decomposition voltage of a traditional water system electrolyte and an organic electrolyte.

An ink jet apparatus electrifies ink (2) in a nozzle (4), and ejects the ink (2) from an ink ejecting hole (4b) onto a printing medium (8) by a first electric field generated between the nozzle (4) and the printing medium (8). The ink jet apparatus includes an ink catching device which includes an ink catching portion (14) provided at a position adjacent to the nozzle (4) and catches an ejected substance ejected from the nozzle (4). In addition, between the nozzle (4) and the ink catching portion (14), the ink jet apparatus applies a voltage for generating a second electric field which (i) causes the ejected substance, which is formed from the ink (2) or the ink (2) whose viscosity is changed, to be ejected from the nozzle (4) and (ii) causes the ink catching portion to attract the ejected substance. With this, in a configuration which utilizes an electrostatic force to eject fluid, it is possible to promptly remove a clogging of an ejection head at any position, and it is also possible to realize less initial ejection fluctuation and improve the reliability of ejection.

First, through a coating step, a photolithography step and an etching step, a plurality of electrodes 142, 142, . . . are formed on a base plate 141. Next, a resist layer 143b is formed on the base plate 141 so as to cover all of the electrodes 142, 142, . . . , and by exposing and developing the resist layer 143b, a nozzle 103 having a super minute diameter is formed to stand with respect to the base plate 141 so as to make the resist layer 143b correspond to each electrode 142, and an in-nozzle passage is formed in each nozzle 103.

The present invention relates to dielectric actuators or sensors of the kind wherein electrostatic attraction between two electrodes located on an elastomeric body leads to a compression of the body in a first direction and a corresponding extension of the body in a second direction. The dielectric actuator / sensor structure comprises a first sheet of elastomeric material having at least one smooth surface and a second surface and a second sheet of elastomeric material having at least one smooth surface and a second surface. The sheets are laminated together with their second surfaces exposed, and there is provided a first electrode on the second surface of the first sheet and second electrode on the second surface of the second sheet.

Method and apparatus for selectively actuating a cantilevered probe for applying a compound to a substrate in nanolithography. A probe having a probe electrode and a substrate having a counter electrode are provided. Voltage applied to the probe electrode and / or counter electrode provides electrostatic attraction between them, moving a probe tip into sufficient proximity to the substrate to apply the patterning compound. Alternatively, a flexible cantilevered probe anchored to a holder includes a layer of conductive material forming a probe electrode. A counter electrode on the holder faces the probe electrode. The holder and probe are positioned so that a probe tip applies the compound to the substrate. The probe is disposed between the substrate and the counter electrode. An electrostatic attractive force generated between the probe electrode and the counter electrode flexes the probe and lifts the tip away from the substrate to suspend writing.

In a method for adjusting the sensitivity of a photodetector, the bandgap of the photodetection material is adjusted by inducing strain in the photodetection material. Such adjustments can be made in situ and continuously, in a reproducible and repeatable manner. In embodiments of the method, the photodetection material is graphene, carbon nanotubes or graphene nanoribbon. The use of graphene permits a dynamically-adjustable sensitivity over a dynamic range of radiation having wavelengths of 1.38 microns or less, up to at least 60 microns. In an adjustable photodetector, a graphene layer is suspended over a silicon substrate by a layer of an insulating material. Adjusting the voltage across the graphene layer and the silicon substrate induces strain in the graphene layer by electrostatic attraction.

In order to solve problems involved in micromolding of a glass, according to the present invention, there can be provided a technology for enabling molding of a glass without applying a large load.A molding apparatus of a glass material according to the present invention is characterized by containing means for holding a glass material and a molding die in contact with each other, means for heating the glass material and the molding die, and means for applying a voltage across the glass material and the molding die, in which press-molding is performed by electrostatic attraction acting between a surface of the glass material and a surface of the molding die. Further, a molded product of a glass material according to the present invention is characterized by including an alkali metal as a component, in which a concentration of the alkali metal is lowered in vicinity of a surface to be molded as compared with that of a glass base material.