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2238results about "Investigating moving sheets" patented technology

Optical sensor and method of operation

A multiple single use optical sensor includes a series of continuous sensor stripes deposited on a substrate web. At least one sample chamber is adapted to extend transversely across a discrete portion of the series of sensor stripes to facilitate analysis of a sample disposed therein. The sample chamber may be moved, or additional sample chambers provided to enable subsequent measurements of additional samples at unused discrete portions of the sensor stripes. The continuous nature of the sensor stripes provides consistency along the lengths thereof to enable calibration data obtained from one discrete portion of the sensor stripes to be utilized for testing an unknown sample an other discrete portion of the sensor stripes. This advantageously eliminates the need for any particular discrete portion of the sensor stripes to be contacted by more than one sample, for improved sensor performance.
Owner:SIEMENS HEALTHCARE DIAGNOSTICS INC

Wafer inspection system for distinguishing pits and particles

A surface inspection system and method is provided which detects defects such as particles or pits on the surface of a workpiece, such as a silicon wafer, and also distinguishes between pit defects and particle defects. The surface inspection system comprises an inspection station for receiving a workpiece and a scanner positioned and arranged to scan a surface of the workpiece at the inspection station. The scanner includes a light source arranged to project a beam of P-polarized light and a scanner positioned to scan the P-polarized light beam across the surface of the workpiece. The system further provides for detecting differences in the angular distribution of the light scattered from the workpiece and for distinguishing particle defects from pit defects based upon these differences.
Owner:ADE OPTICAL SYST
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