2162 results about "Getter" patented technology

A highly sensitive silicon micro-machined sensor package is provided for use in a micro-g environment that can also resist high shock in excess of 5000 g. The sensor is provided to measure acceleration in cooperation with associated electronics which are required to have electrical contact with sensor elements. The sensor is sealed in a high vacuum environment, and is arranged and designed to be free of temperature induced stress to the sensor. The sensor die package assembly comprises a silicon micro-machined sensor die, a ceramic package, two contact springs, a shorting clip, solder preform, a metal lid and a getter foil for ensuring a good vacuum for an extended period. The sensor die comprises a moving mass with eight supporting flexures on both sides of the proof mass. The proof mass's movement is protected on both sides by a top and a bottom cap. Acceleration applied to the package and the die causes the proof mass to move vertically in relation with the adjacent caps. The changes in distance between the proof mass and the caps in turn generate a change in an electrical signal which corresponds to the capacitance changes between the gaps. The sensor die package arrangement provides that the sensor die be secured within an evacuated ceramic case. Electrical connections made between external contacts of the case and contacts of the sensor die within the case are made through conductive springs, thereby minimizing materials in the interior of the case which would outgass in the vacuum environment.

The invention discloses a nanometer multiple-layer composite thermal insulation material and a preparation method thereof. The nanometer multiple-layer thermal insulation composite material is formed by alternatively overlapping an infrared reflecting screen and a spacer; the ratio of total layer amounts n of the infrared reflecting screens and the spacers to the total thickness of the nanometer multiple-layer composite thermal insulation material is 0.5-4; the infrared reflecting screen is a metal foil or a metal plated foil; the spacer is a thermostability nanometer porous aerogel composite thermal insulation material; the infrared reflecting screen and the spacer are combined by being adhered with thermostability adhesives or in puncturing connection by thermostability sewing threads. The invention also comprises the preparation method of the nanometer multiple-layer composite thermal insulation material. The nanometer multiple-layer composite thermal insulation material of the invention has low density, favorable mechanical property and favorable high-temperature thermal insulation property, lowers requirements on the vacuum degree by a VIP plate when being used as vacuum thermal insulation plate core materials, does not need getter and can satisfy harsh high-efficiency thermal insulation using requirements on materials by aviation, aerospace and civil fields. The method of the invention can prepare thermal insulation material members with large size and complex shape.

The present method provides tools for growing conformal metal nitride, metal carbide and metal thin films, and nanolaminate structures incorporating these films, from aggressive chemicals. The amount of corrosive chemical compounds, such as hydrogen halides, is reduced during the deposition of transition metal, transition metal carbide and transition metal nitride thin films on various surfaces, such as metals and oxides. Getter compounds protect surfaces sensitive to hydrogen halides and ammonium halides, such as aluminum, copper, silicon oxide and the layers being deposited, against corrosion. Nanolaminate structures (20) incorporating metal nitrides, such as titanium nitride (30) and tungsten nitride (40), and metal carbides, and methods for forming the same, are also disclosed.

The invention provides a vacuum insulation panel to which moisture and gas do not easily adsorb while it is being processed or being in storage in an unfinished state. The vacuum insulation panel includes a core provided with air circulation, a getter material which adsorbs moisture and gas from the core, an inner film bag which accommodates the core and the getter material, and an outer barrier bag which accommodates the inner film bag. The getter material is filled in an incision provided on the surface of the core. To prevent the getter material from getting out of the incision, the opening of the incision is narrowed by evacuating air from the interior of the inner film bag and, concurrently, compressing the inner film bag and the core.