The invention relates to a preparation method of a
tungsten sulfide target material, and belongs to the technical field of non-metallic target materials. Vacuum hot-pressing
sintering is adopted for preparation. The method comprises the following steps of
tungsten sulfide pretreatment, wherein
tungsten sulfide is mixed with
molybdenum disulfide
powder and
carbon dust to be uniform, and a mixture is obtained for use; vacuum hot-pressing
sintering, wherein the mixture obtained in step 1 is loaded into a mold, the mold with the mixture is placed in a
sintering furnace for sintering, the sinteringtemperature is controlled to be 1,300-1,550 DEG C, the sintering pressure is controlled to be 25-38 MPa, the
temperature and pressure are kept for 2-5 h, after sintering is completed, the temperatureis lowered to range from 810 DEG C to 850 DEG C, the pressure is released, when the temperature is lowered to be 150 DEG C or below, the material is taken out of the furnace, and a rough blank is obtained; finish
machining, wherein the rough blank obtained in step 2 is subjected to
cutting and plane
grinding, and the tungsten sulfide target material is obtained. Accordingly, the method is simple,easy to implement, safe and free of
pollution, and fills in the blank of tungsten sulfide target material preparation, and the prepared tungsten sulfide target material is high in density and good
instability.