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Preparation method of nickel-iron-copper-molybdenum alloy target material

A molybdenum alloy and nickel-iron-copper technology is applied in the field of nickel-iron-copper-molybdenum alloy target preparation, which can solve the problems of affecting the sputtering film quality, high gas impurity content, prolonging the production cycle, etc., and achieves low sputtering power and high sputtering power. Magnetic permeability, the effect of ensuring uniformity

Active Publication Date: 2021-08-17
XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the application device needs to be further prepared into a target by powder sintering, which greatly prolongs the production cycle and increases the production cost.
At the same time, powder sintering has the problems of high gas impurity content and low relative density, which affect the quality of sputtered films

Method used

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  • Preparation method of nickel-iron-copper-molybdenum alloy target material
  • Preparation method of nickel-iron-copper-molybdenum alloy target material
  • Preparation method of nickel-iron-copper-molybdenum alloy target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] An embodiment of a method for preparing a nickel-iron-copper-molybdenum target of the present invention is as follows:

[0034] (1) Weigh 8.169kg of Ni, 1.414kg of Fe, 0.574kg of Cu and 0.693kg of Mo raw materials according to the required ratio of the target material, and put the Ni and Mo raw materials into a water-cooled copper crucible;

[0035] (2) Vacuumize the water-cooled copper crucible to 2.0×10 -2 Pa, fill the furnace with nitrogen to wash the furnace, after vacuuming again, fill with new nitrogen, keep the pressure in the melting furnace at 0.06MPa, let the Ni and Mo materials be heated to 1500°C in a vacuum environment, and the materials will be completely melted after smelting for 14 minutes , cooled to room temperature to obtain alloy ingot A;

[0036] (3) Put the weighed Fe and Cu raw materials into a water-cooled copper crucible equipped with alloy ingot A, and the water-cooled copper crucible is evacuated to 2.0×10 -2 Pa, fill the furnace with nitrog...

Embodiment 2

[0044] An embodiment of a method for preparing a nickel-iron-copper-molybdenum target of the present invention is as follows:

[0045] (1) Weigh 8.130kg of Ni, 1.347kg of Fe, 0.517kg of Cu and 0.636kg of Mo raw materials according to the required ratio of the target material, and put the Ni and Mo raw materials into a water-cooled copper crucible;

[0046] (2) Vacuumize the water-cooled copper crucible to 2.0×10 -2 Pa, fill the furnace with nitrogen to wash the furnace, and after vacuuming again, fill in new nitrogen to keep the pressure in the melting furnace at 0.06MPa, let the Ni and Mo materials be heated to 1550°C in a vacuum environment, and the materials will be completely melted after smelting for 7 minutes , cooled to room temperature to obtain alloy ingot A;

[0047] (3) Put the weighed Fe and Cu raw materials into a water-cooled copper crucible equipped with alloy ingot A, and the water-cooled copper crucible is evacuated to 2.0×10 -2 Pa, fill the furnace with nit...

Embodiment 3

[0054] An embodiment of a method for preparing a nickel-iron-copper-molybdenum target of the present invention is as follows:

[0055] (1) Weigh 8.324kg of Ni, 1.474kg of Fe, 0.633kg of Cu and 0.753kg of Mo raw materials according to the required ratio of the target material, and put the Ni and Mo raw materials into a water-cooled copper crucible;

[0056] (2) Vacuumize the water-cooled copper crucible to 2.0×10 -2 Pa, fill the furnace with nitrogen to wash the furnace, and after vacuuming again, fill in new nitrogen to keep the pressure in the melting furnace at 0.12MPa, let the Ni and Mo materials be heated to 1500°C in a vacuum environment, and the materials will be completely melted after smelting for 14 minutes , cooled to room temperature to obtain alloy ingot A;

[0057] (3) Put the weighed Fe and Cu raw materials into a water-cooled copper crucible equipped with alloy ingot A, and the water-cooled copper crucible is evacuated to 2.0×10 -2 Pa, fill the furnace with ni...

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Abstract

The invention discloses a preparation method of a nickel-iron-copper-molybdenum alloy target material. The preparation method of the nickel-iron-copper-molybdenum alloy target material comprises the following steps that (1) raw materials Mo and raw materials Ni are added into a smelting furnace, suspension smelting is carried out in a vacuum environment, and an alloy ingot A is obtained after cooling; (2) raw materials Fe and raw materials Cu are added into the smelting furnace containing the alloy ingot A in the step (1), smelting treatment continues to be conducted in the vacuum environment, and an alloy ingot B is obtained after cooling; (3) the alloy ingot B is refined for three times in the vacuum environment, and the melt of the alloy ingot B is cast after the third refining to obtain a cast ingot; and (4) the cast ingot obtained in the step (3) is rolled, and the nickel-iron-copper-molybdenum alloy target material is obtained. According to the preparation method, a nickel-molybdenum alloy is firstly smelted, then the raw materials Fe and Cu are added to be smelted again, and then three times of homogenizing refining are combined, so that the uniformity of components of the nickel-iron-copper-molybdenum alloy target material is guaranteed to a large extent, and the target material has the performance of high resistivity, high relative density and high magnetic permeability.

Description

technical field [0001] The invention belongs to the technical field of target material preparation, and in particular relates to a method for preparing a nickel-iron-copper-molybdenum alloy target material. Background technique [0002] In recent years, with the continuous improvement of electronic equipment, device miniaturization and energy-saving requirements, the demand for developing soft magnetic materials with high response, high efficiency density and low loss is increasing. However, due to the small resistivity of soft magnetic alloy materials, its application under higher frequency conditions is limited. The nickel-iron-copper-molybdenum target can be widely used in inductors, high-sensitivity sensors and write head materials due to its high resistivity, high saturation magnetic induction, high magnetic permeability and low coercive force. [0003] The article (Synthesis of the NiFeCuMo soft Magnetic Powders by Mechanical Alloying) prepares Ni-Fe-Cu-Mo soft magnet...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C22C1/03C22C19/03B22D7/06
CPCC23C14/3414C22C1/03C22C1/023C22C19/03B22D7/005B22D7/064
Inventor 张俊飞蔡新志童培云朱刘冉成义
Owner XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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