Silicon nitride-based heating body and preparation process thereof
A preparation process and technology for a silicon nitride substrate are applied in the field of heating body components to achieve the effects of fast reaction, simple preparation process and material cost saving
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Embodiment 1
[0024] A heating body, which includes a silicon nitride substrate and a tin oxide film coated on the surface of the substrate, specifically prepared through the following steps:
[0025] S1. Cutting the silicon nitride substrate into a size with an outer diameter of 10 mm and a length of 80 mm, and then grinding and polishing to a surface roughness of Ra=1.2-1.6 μm;
[0026] S2. Place the pretreated silicon nitride substrate in a sintering furnace at 1100° C. for sintering in argon for 4 hours;
[0027] S3, prepare the reaction solution according to the following mass percentage: SnCl 4 .5H 2 O: 96.2%, SbCl 3 : 0.8%, CuO: 0.11%, MgO: 0.03%, FeO: 0.022%, HF: 0.024%, ethanol: 0.038%, the balance is deionized water and unavoidable impurities; pass the prepared reaction solution through 0.3MPa Air pressure atomization forms small droplets with an atomization volume of 200mL / m, and the small droplets are transferred to the surface of the silicon nitride substrate at a temperatur...
Embodiment 2
[0030] A heating body, which includes a silicon nitride substrate and a tin oxide film coated on the surface of the substrate, specifically prepared through the following steps:
[0031] S1. Cut the silicon nitride substrate into a size with an outer diameter of 12 mm and a length of 90 mm, and then polish and polish it to a surface roughness of Ra=1.2-1.6 μm;
[0032] S2. Place the pretreated silicon nitride substrate in a sintering furnace at 1150° C. for sintering in argon for 3 hours;
[0033] S3, prepare the reaction solution according to the following mass percentage: SnCl 4 .5H 2 O: 96.8%, SbCl 3 : 0.85%, CuO: 0.12%, MgO: 0.035%, FeO: 0.023%, HF: 0.028%, ethanol: 0.04%, the balance is deionized water and unavoidable impurities; pass the prepared reaction solution through 0.35MPa Air pressure atomization forms small droplets with an atomization volume of 220mL / m, and the small droplets are transferred to the surface of the silicon nitride substrate at a temperature of...
Embodiment 3
[0036] A heating body, which includes a silicon nitride substrate and a tin oxide film coated on the surface of the substrate, specifically prepared through the following steps:
[0037] S1. Cutting the silicon nitride substrate into a size with an outer diameter of 14 mm and a length of 100 mm, and then grinding and polishing to a surface roughness of Ra=1.2-1.6 μm;
[0038] S2. Place the pretreated silicon nitride substrate in a sintering furnace at 1200° C. for sintering in argon for 3 hours;
[0039] S3, prepare the reaction solution according to the following mass percentage: SnCl 4 .5H 2O: 97.5%, SbCl 3 : 0.9%, CuO: 0.14%, MgO: 0.04%, FeO: 0.025%, HF: 0.03%, ethanol: 0.042%, the balance is deionized water and unavoidable impurities; pass the prepared reaction solution through 0.4MPa Air pressure atomization forms small droplets with an atomization volume of 250mL / m, and the small droplets are transferred to the surface of the silicon nitride substrate at a temperature...
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