The invention discloses a
semiconductor fingerprint identification sensor and a manufacture method thereof. The
semiconductor fingerprint identification sensor comprises an induction area, a
control area and an interface area, wherein the induction area, the
control area and the interface area are in communication connection;
fingerprint information induced by the induction area is sent to the
control area; after the fingerprint information is processed by the control area, the processed fingerprint information is output through the interface area; the induction area comprises an
insulation layer, a routing layer, a substrate layer and a
protection layer, wherein the
insulation layer, the routing layer, the substrate layer and the
protection layer are fixed in sequence; the routing layer is embedded between the
insulation layer and the substrate layer; one surface, which contacts with the
protection layer, on the substrate layer, is provided with sensor arrays; through holes corresponding to the sensor arrays are arranged on the substrate layer; and the sensor arrays are electrically connected with a sensing lead wire circuit of the routing layer through the through holes. The invention has the advantages of being low in cost, high in
signal to
noise ratio, high in reliability and simple in
processing technology.