The invention discloses an industrialized production process of a
crystalline silicon solar battery, which comprises the following steps of: selecting a
silicon chip; performing front surface matte making, phosphorous
diffusion, the removal of phosphorosilicate glass formed on the surface during the phosphorous
diffusion, and the deposition of
silicon nitride on the front surface through PECVD inturn, and then putting an anti-reflecting film protected
silicon ship provided with the front surface
silicon nitride into heated alkali liquor to perform back
polishing so as to remove a
diffusion layer on the back surface; and washing and
drying the
silicon chip, and printing and
sintering the
silicon chip by adopting a bending-resistant
aluminum paste silk screen. The process adopts a chemicalmethod to replace a
plasma etching process, realizes non-contact of a matte surface of the
silicon chip in the whole production flow, avoids matte surface damages caused by silicon
chip friction, so the probability of electric leakage after facade
silver paste sintering is reduced; the flat and clean back surface is favorable for the reaction of aluminum and silicon during the
sintering to form amore uniform aluminum
back surface field; and a polished surface has a stronger
reflex action compared with an irregular matte surface, and can increase the absorption of incident light, improve the
spectral response of the long-
wavelength of a battery
chip, and significantly improve a short-circuit current and an open-circuit
voltage.