Semiconductor fingerprint identification sensor and manufacture method thereof

Abstract

The invention discloses a semiconductor fingerprint identification sensor and a manufacture method thereof. The semiconductor fingerprint identification sensor comprises an induction area, a control area and an interface area, wherein the induction area, the control area and the interface area are in communication connection; fingerprint information induced by the induction area is sent to the control area; after the fingerprint information is processed by the control area, the processed fingerprint information is output through the interface area; the induction area comprises an insulation layer, a routing layer, a substrate layer and a protection layer, wherein the insulation layer, the routing layer, the substrate layer and the protection layer are fixed in sequence; the routing layer is embedded between the insulation layer and the substrate layer; one surface, which contacts with the protection layer, on the substrate layer, is provided with sensor arrays; through holes corresponding to the sensor arrays are arranged on the substrate layer; and the sensor arrays are electrically connected with a sensing lead wire circuit of the routing layer through the through holes. The invention has the advantages of being low in cost, high in signal to noise ratio, high in reliability and simple in processing technology.

Description

Technical field [0001] The invention relates to a semiconductor fingerprint identification sensor and a manufacturing method thereof, belonging to the technical field of fingerprint identification. Background technique [0002] At present, the existing fingerprint recognition sensors mainly include optical fingerprint recognition sensors, surface acoustic wave fingerprint recognition sensors, and semiconductor fingerprint recognition sensors. [0003] The principle of the optical fingerprint recognition sensor is mainly the principle of optical photography and reflection. Its advantages are strong antistatic ability, low product cost, long service life, high dependence on light, inability to identify fake fingers, and poor applicability to wet and dry fingers And other shortcomings. [0004] The surface acoustic wave fingerprint recognition sensor has the disadvantages of large size and high power consumption. [0005] The semiconductor fingerprint sensor mainly uses the principles o...

AI Technical Summary

Problems solved by technology

But its disadvantages are also obvious: the use of single crystal silicon as a Sensor (inductor) has high cost, low signal-to-noise ratio, poor reliability, etc.

Existing semiconductor fingerprint sensors use single-crystal silicon substrates to make sensing units, and the price of single-crystal silicon substrates is calculated based on the size of the area. Increasing the sensor area will increase the cost sharply

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