The invention discloses a method for preparing a high-compact ITO target material through two-step
sintering. The method comprises the following steps: firstly manufacturing the
raw material into a biscuit, keeping warm and
degreasing under the
air atmosphere, directly placing under the
air atmosphere to warm to 800-1300 DEG C after the
degreasing and keeping warm for 5-30 hours to perform the first step of pre-
sintering; placing the pre-sintered
green body on a
sintering bearing plate, warming to 1500-1600 DEG C and keeping warm for 5-30 hours under the
oxygen atmosphere so as to perform the second step of sintering; stopping introducing the
oxygen 1-5 hours before finishing the sintering; and performing furnace cooling to obtain an ITO target sintering body. The pre-sintering is performed under the
air atmosphere so that the sintering time of the
oxygen atmosphere can be shortened, the production
energy consumption is greatly lowered; the
degreasing and the pre-sintering process are integrated so that the sintering total time is saved; the pre-sintering enables the particles in the
green body to be further homogenized, the abnormal
crystal grain growth is avoided, and the microscopic homogeneity of the target is improved, and the strength and the
thermal shock resistance are improved; the prepared ITO target density reaches to 7.128g / cu.cm and more.