The invention discloses
plasma cleaning equipment in a two-sided turnover door structure. The
plasma cleaning equipment comprises a vacuum
system, a door, a
vacuum chamber body, a hinge, a rack component, a high-pressure lead-in component, a support, a polar plate, a hinge fixing plate, a hinge shaft, a hinge plate, a positioning device, a rotary shaft, a
handle and a
computer control system, wherein the vacuum
system has the main characteristics that the
plasma cleaning equipment consists of a roots pump (main pump), a
screw pump (backing pump) and a roughing valve; the door has the main characteristics that the door consists of a flat plate, and a lamp rack component is arranged on the flat plate; the
vacuum chamber body has the main characteristics that the
vacuum chamber body consists of a shell; a sealing ring, an air suction opening, an observation window, an
atmosphere point
measurement point, an air charging system, a gauge tube port and an air entraining device; and the air entraining device comprises a precise gas
mass flowmeter. The
plasma cleaning equipment has the advantages that compared with a lamp processed by the traditional equipment, the film-matrix
binding force and the reflective rate after the lamp processed by the
plasma cleaning equipment is subjected to
vacuum coating can be improved greatly. Compared with the traditional equipment, the
plasma cleaning equipment is simple in structure, smaller in occupied area, shorter in
production cycle and higher in efficiency.