AlTiN coating and preparation method thereof
A coating and transition layer technology, applied in the field of AlTiN coating and its preparation, can solve the problems of high friction coefficient of AlTiN coating, rough surface of AlTiN coating, insufficient plasma density, etc. It is not easy to peel off and the effect of reducing the number of large particles on the surface
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[0032] In order to make the purpose, features and advantages of the present invention more obvious and understandable, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the following The described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0033] see figure 1 As shown, the present embodiment provides a method for preparing an AlTiN coating, including the following steps in sequence: step S1, cleaning the substrate; step S2, etching; step S3, depositing a Cr bombardment implant layer; step S4, process of depositing a CrN transition layer; step S5, process of depositing an A...
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