The invention discloses a manufacturing method for a CVD (
Chemical Vapor Deposition)
diamond /
diamond-like
composite coating tool with a complex shape. The manufacturing method comprises the steps as follows: depositing a layer of MCD (Micro Crystalline
Diamond) film on the surface of the tool by a hot wire CVD method, and generating
ion bombardment by
negative bias in the depositing process so as to ensure that the surface of the MCD film is smooth; and continuously depositing a layer of DLC (
Diamond-like Carbon) film, carrying out
ion bombardment on the tool surface coated with the MCD film by positive and negative pulse
ion power so as to remove impurities on the tool surface in the initial period, and removing the sharp crystalline grain edge of the
coating surface to enhance the flatness of the
coating and improve the surface activity of the
coating so as to achieve the effect of enhancing the interlayer
adhesion strength. Due to the manufacturing method, the surface of the integrated hard
alloy tool with the complex shape can be deposited to obtain the CVD
diamond / diamond-like
composite coating with excellent film-based
adhesion strength, surface wear and friction resistance and self lubricating property, and the
composite coating also has the characteristics of low
internal stress, smooth and flat surface, uniform thickness and the like.