The invention discloses a method for preparing
Metal carbide-inlaid
Diamond-like Carbon (MC / DLC) films with the thicknesses larger than 30 micrometers, belongs to the field of preparation of hard abrasion-resistant coatings, and particularly relates to a technology for preparing MC / DLC thick films by the aid of
magnetic filter plasma deposition processes.MC / DLC thick film structures comprise
ion injection pinning
layers,
metal transition
layers and the MC / DLC films.The method has the advantages that the DC / DLC films prepared by the aid of
ion injection technologies,
magnetic filter technologies and
cathodic arc deposition technologies are high in
binding force, the arc current intensity, the
magnetic field intensity of bent pipes and the gas inflow of gas with carbon are controlled in deposition procedures, accordingly, the thicknesses, the
hardness, the rub resistance and the abrasion resistance of the MC / DLC thick films can be optimized, and the high-quality MC / DLC thick films can be prepared by the aid of the method;
magnetic filter plasma deposition equipment for implementing the method has proprietary
intellectual property rights and is easy to operate, processes are mature, the MC / DC films can be produced on a large scale, and the method is suitable for deposition application to high-
hardness abrasion-resistant coatings in all industrial components such as bearings of cutters.