The invention discloses a MEMS (micro-electro-
mechanical system) fully decoupled closed-loop
gyroscope. The
gyroscope comprises a substrate and a sensitive device layer, wherein an insulating layer isarranged between the substrate and the sensitive device layer; the sensitive device layer comprises a first
substructure, a second
substructure and a
coupling connection beam; each of the first
substructure and the second substructure comprises a driving frame, driving folding beams, driving decoupling beams, a Coriolis
mass block, a detection frame, detection beams, detection decoupling beams, driving fixed comb teeth, driving movable comb teeth, driving detection fixed comb teeth, driving detection movable comb teeth, detection fixed comb teeth, detection movable comb teeth, force feedbackfixed comb teeth, force feedback movable comb teeth and anchor points. Generation of
quadrature error signals is suppressed, and the
zero bias stability index of the MEMS
gyroscope is improved; the gyroscope has compact structure and small
chip area, and can prevent a detection-mode sensitive
mass from twisting due to larger displacement, thereby having good overall
linearity and high measurementaccuracy.