Disclosed are methods and apparatus for analyzing the quality of
overlay targets. In one embodiment, a method of extracting data from an
overlay target is disclosed. Initially, image information or one or more intensity signals of the
overlay target are provided. An overlay error is obtained from the overlay target by analyzing the image information or the intensity
signal(s) of the overlay target. A
systematic error metric is also obtained from the overlay target by analyzing the image information or the intensity
signal(s) of the overlay target. For example, the
systematic error may indicate an
asymmetry metric for one or more portions of the overlay target. A
noise metric is further obtained from the overlay target by applying a
statistical model to the image information or the intensity
signal(s) of the overlay target.
Noise metric characterizes
noise, such as a grainy background, associated with the overlay target. In other embodiments, an overlay and / or
stepper analysis procedure is then performed based on the
systematic error metric and / or the
noise metric, as well as the overlay data.