3177 results about "Angle of incidence" patented technology

Alignment accuracy between two or more patterned layers is measured using a metrology target comprising substantially overlapping diffraction gratings formed in a test area of the layers being tested. An optical instrument illuminates all or part of the target area and measures the optical response. The instrument can measure transmission, reflectance, and / or ellipsometric parameters as a function of wavelength, polar angle of incidence, azimuthal angle of incidence, and / or polarization of the illumination and detected light. Overlay error or offset between those layers containing the test gratings is determined by a processor programmed to calculate an optical response for a set of parameters that include overlay error, using a model that accounts for diffraction by the gratings and interaction of the gratings with each others' diffracted field. The model parameters might also take account of manufactured asymmetries. The calculation may involve interpolation of pre-computed entries from a database accessible to the processor. The calculated and measured responses are iteratively compared and the model parameters changed to minimize the difference.

A half mirror layer has an angle dependency in which when an angle of incidence becomes larger than the angle of incidence range of image light, reflectance increases, such that it is possible to prevent unintended light, which is emitted to a light transmitting member from a light guiding member and is reflected inside a light transmitting member, from being returned to a light emission portion of the light guiding member after passing through the half mirror layer as a reflective film at a relatively large angle of incidence. Therefore, it is possible to prevent the image light passed through the light transmitting member from becoming ghost light while mitigating the demand for increasing processing accuracy of the light transmitting member, and bonding accuracy between the light guiding member and the light transmitting member.

In the following, the essential points are summarized again by means of groups of characteristics which each individually and in combination with one another characterize the invention specifically: 1. Information system for providing information in correlation with light incident on an eye, having a holographic element disposed in front of the eye, and an optical scanning device which detects light incident on the eye by way of the holographic element. 2. Information system according to Point 1, wherein the optical scanning device is at a fixed predetermined angular ratio with respect to the holographic element. 3. Information system according to Point 1 or 2, wherein the optical scanning device detects light which is refracted by the holographic element before it impinges on the eye and does not enter the eye. 4. Information system according to one of the preceding points, wherein the optical scanning device detects light which was first reflected back from the eye and was then refracted by the holographic element. 5. Information system according to one of the preceding points, wherein the holographic element refracts light originating from the field of vision of the eye only at several discrete wavelengths in the visible range before the light impinges on the eye for the detection by the optical scanning device, and refracts light reflected back from the eye only at one discrete wavelength in the infrared range for the detection by the optical scanning device. 6. Information system according to one of the preceding points, wherein the holographic element refracts light originating from the field of vision of the eye at fewer than 20, fewer than 10 or fewer than 5 discrete wavelengths in the visible range either before the light impinges on the eye or after its backscattering as a result of the eye for the detection by the optical scanning device. 7. Information system according to one of the preceding points, wherein the holographic element refracts light originating from the field of vision of the eye at a discrete wavelength in the infrared range either before the light impinges on the eye or after its backscattering as a result of the eye for the detection by the optical scanning device. 8. Information system according to one of the preceding points, wherein the holographic element refracts light reflected back by the eye only at a discrete wavelength in the infrared range for the detection by the optical scanning device. 9. Information system according to one of the preceding points, wherein the holographic element refracts light of one or several discrete wavelengths, at which the optical scanning device has a high sensitivity. 10. Information system according to one of the preceding points, wherein the holographic element refracts light a several discrete wavelengths such that the refracted light is guided to a common point, and the angle of incidence of the light on this point permits a clear optionally also wavelength-independent conclusion on the angle of incidence of the light upon the holographic element. 11. Information system according to one of the preceding points, having an optical projection device which projects light into the eye by way of the holographic element. 12. Information system according to Point 11, wherein the light detected by the optical detection device and the light projected in front of the optical projection device run in the opposite direction through a common light guiding lens system and can be focused such by the optical scanning device or projection device that their respective beams describe the same path from or into the eye. 13. Information system for providing information in correlation with information obtained from an eye, having a holographic element disposed in front of the eye, and an optical projection device which projects light into the eye by way of the holographic element. 14. Information system according to one of Points 11 to 13, wherein the optical projection device projects light only at one or several discrete wavelengths in the visible range and / or at a wavelength in the infrared range. 15. Information system according to one of Points 11 to 14, wherein the holographic element refracts the wavelengths of the projected light. 16. Information system according to one of Points 11-15, wherein the optical projection device is in a fixed predetermined angular ratio with respect to the holographic element. 17. Information system according to Point 16, wherein the holographic element comprises one or more optical flags, whose light reflection characteristics can be used by the information system by means of a photodetector for calibrating a projection angle of the optical projection device and / or a light guiding device. 18. Information system according to Point 17, including Point 12, wherein the information system uses the light reflection characteristics of the optical flags for calibrating a scanning angle of the optical scanning device and / or a light guiding device. 19. Information system according to Point 17, wherein the optical flags are generated in that reflecting elements are imaged during the creating of the holographic element such in the holographic element that they (something is missing) reflect light of one or several wavelengths which, corresponding to the predetermined angular ratio with respect to the optical projection device is incident on the holographic element, back along the path of incidence. 20. Information system according to Point 19, wherein the photodetector device has a splitter mirror which is arranged such in the light beam of the optical projection device that it guides a portion of the light, which impinges on the splitter mirror against the projection direction, in the direction of a photodetector which detects in at least two areas situated concentrically around one another. 21. Information system according to one of the preceding points, wherein the holographic element has light-refracting characteristics at one or several discrete wavelengths, which correspond to a reflection on the concave side of an area constructed according to the curvature of a rotationally symmetrical ellipsoid. 22. Information system according to one of the preceding points, wherein the holographic element has light refracting characteristics at one or several discrete wavelengths, which correspond to a refraction on the concave side of an area constructed according to the curvature of a rotationally symmetrical ellipsoid, which refraction corresponds to a reflection on a respective conical surface which is rotationally symmetrical about the axis of rotation of the ellipsoid and is perpendicular with respect to the ellipsoid at the site of the refraction. 23. Method of providing information in correlation with light incident on an eye, whereby a holographic element is disposed in front of the eye, and an optical scanning device detects the light incident on the eye by means of the holographic element. 24. Method according to Point 23, whereby the optical scanning device is at a fixed predetermined angular ratio with respect to the holographic element. 25. Method according to Point 23 or 24, whereby the optical scanning device detects light which is refracted by the holographic element before impinging on the eye and does not enter the eye. 26. Method according to one of Points 23 to 25, whereby the optical scanning device detects light which was first reflected back from the eye and was then refracted by the holographic element. 27. Method according to one of Points 23 to 26, whereby the holographic element refracts light originating from the field of vision of the eye only at several discrete wavelengths in the visible range before its impinging on the eye for the detection by the optical scanning device and refracts light reflected back from the eye only at a discrete wavelength in the infrared range for the detection by the optical scanning device. 28. Method according to one of Points 23 to 27, whereby the holographic element refracts light originating from the field of vision of the eye at fewer than 20, fewer than 10 or fewer than 5 discrete wavelengths in the visible range either before its impinging on the eye or after its backscattering as a result of the eye for the detection by the optical scanning device. 29. Method according to one of Points 23 to 28, whereby the holographic element refracts light originating from the visual field of the eye at a discrete wavelength in the infrared range either before its impinging on the eye or after its backscattering as a result of the eye for the detection by the optical scanning device. 30. Method according to one of Points 23 to 29, whereby the holographic element refracts light reflected back from the eye only at a discrete wavelength in the infrared range for the detection by the optical scanning device. 31. Method according to one of Points 23 to 30, whereby the holographic element refracts light of one or several discrete wavelengths, at which the optical scanning device has a high sensitivity. 32. Method according to one of Points 23 to 31, whereby the holographic element refracts light at several discrete wavelengths such that the refracted light is guided to a common point, an the angle of incidence of the light onto this point allows a clear, optionally also wavelength-independent conclusion on the angle of incidence of the light upon the holographic element. 33. Method according to one of Points 23 to 32, whereby an optical projection device projects light by way of the holographic element into the eye. 34. Method according to Point 33, whereby the light detected by the optical scanning device and the light projected in front of the optical projection device run in the opposite direction through a common light guiding lens system and can be focused such by the optical scanning device or projection device that their respective beams describe the same path from or into the eye. 35. Method of providing information in correlation with information obtained from an eye, whereby a holographic element is disposed in front of the eye, and an optical projection device projects light by way of the holographic element into the eye. 36. Method according to points 33 to 35, whereby the optical projection device projects light only at one or several discrete wavelengths in the visible range and / or at a wavelength in the infrared range. 37. Method according to one of Points 33 to 36, whereby the holographic element refracts the wavelengths of the projected light. 38. Method according to one of Points 33 to 37, whereby the optical projection device is in a fixed predetermined angular ratio with respect to the holographic element. 39. Method according to Point 38, whereby the holographic element is equipped with one or more optical flags, whose light reflection characteristics can be used by means of a photodetector device for calibrating a projection angle of the optical projection device and / or a light guiding device. 40. Method according to Point 39, including Point 34, whereby the light reflection characteristics of the optical flags are used for calibrating a scanning angle of the optical scanning device and / or a light guiding device. 41. Method according to Point 39, whereby the optical flags are generated in that reflecting elements are imaged during the creating of the holographic element such in the holographic element that they beam light of one or more wavelengths which, corresponding to the predetermined angular ratio with respect to the optical projection device is incident on the holographic element, back along the incidence path. 42. Method according to Point 41, whereby the photodetector device is equipped with a photodetector detecting in at least two areas situated concentrically around one another, and a splitter mirror which is arranged such in the light beam of the optical projection device that it directs a portion of the light impinging on the splitter mirror against the projecting direction, in the direction of the photodetector. 43. Method according to one of Points 23 to 42, whereby the holographic element has light-refracting characteristics at one or several discrete wavelengths which correspond to a reflection on the concave side of an area constructed according to a curvature of a rotationally symmetrical ellipsoid. 44. Method according to one of Points 23 to 43, whereby the holographic element has light-refracting characteristics at one or several discrete wavelengths, which correspond to a refraction on the concave side of an area constructed according to a curvature of a rotationally symmetrical ellipsoid, which refraction corresponds to a reflection on a respective conical surface rotationally symmetrical about the axis of rotation of the ellipsoid, which conical surface is perpendicular with respect to the ellipsoid at the site of the refraction. While the preceding description with respect to the title is limited to embodiments falling under the initially mentioned generic terms “scanning information system” and “projecting information system”, each individual discussed characteristic of their disclosure can also be used in an embodiment of the systems, devices and methods initially identified by reference to their full content. The applications by the same applicant and / or the same inventors mentioned in the present application should be considered to be a correlated invention complex.

A method and system are presented for determing a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure.

A variety of techniques may be employed, alone or in combination, to enhance contact between a processed substrate and applied megasonic energy. In accordance with one embodiment of the new invention, the vibration plate is brought into intimate contact with one surface of the substrate, while cleaning or processing fluid contacts the other. In accordance with an alternative embodiment of the present invention, a reflecting surface may be provided to cause emanated energy to be reflected back into the near field and make it more uniform. In accordance with another alternative embodiment of the present invention, energy may be transferred across a substrate bounded on both sides by liquid with incidence of megasonic energy that is either normal to the substrate surface or within a critical range of incident angles. In yet another embodiment, generated dilatational waves may be converted to surface waves prior to contacting the substrate.

A skin testing and imaging station and corresponding method for capturing, displaying and analyzing images of a person and for testing the skin using a variety of probes includes a digital camera, a light source capable of providing at least two different wavelengths of light, a plurality of probes for conducting skin tests, a touch-screen display and a computer for controlling the components of the station. The apparatus selectively captures and displays a plurality of digital images using different wavelengths of illuminating light, e.g., using a plurality of flashes and filters, some of which may be adjustable to adjust the angle of incidence of the illuminating light on the subject. In video mode, the camera displays a real time image on the display facilitating a user to position a probe for testing any specific area of the skin. Preferably, the apparatus is self-serve, allowing any person to capture, review and analyze the images and skin data. Verbal and / or graphic instructions to a user aid in use of the station. An intuitive graphic user interface with thumbnail images is employed. Focus control, zoom and synchronized side-by side comparison of images are available.

A method and system for providing an optical grating are described. The optical grating is configured for light of a wavelength. The optical grating includes a top cladding, a core, and bottom cladding. The core resides between the bottom cladding and the top cladding. The core includes a plurality of discrete ridges spaced apart by a nonlinear pitch. The light traverses the top cladding before the core and has a plurality of angles of incidence with the core. The nonlinear pitch of the core is larger for a larger angle of incidence of the plurality of angles of incidence.

A diffractive optical element for guiding a light having a color spectrum characterized by a plurality of wavelengths longer than a shortest wavelength, lambdaB, and shorter than a longest wavelength, lambdaR, the light striking the diffractive optical element at an angle greater than a first field-of-view angle, alpha<->FOV, and smaller than a second field-of-view angle, alpha<+>FOV. The diffractive optical element comprising a linear grating being formed in a light-transmissive substrate. The linear grating is characterized by a pitch, d, selected so as to allow total internal reflection of a light having wavelength of lambdaB and a striking angle of alpha<->FOV. The light-transmissive substrate is characterized by an index of refraction, ns, larger than a minimal index of refraction, nMIN, which is selected so as to allow total internal reflection of a light having wavelength of lambdaR and a striking angle of alpha<+>FOV.

A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.

In a scanning electron microscope, an emitted primary electron beam is diverted by an angle of at least about 45 degrees prior to incidence with a specimen. The beam may be bent by a magnetic separator. The separator may also serve to deflect secondary electron and back scattered electrons. As the angle of emissions and reflections from the specimen is close to the angle of incidence, bending the primary electron beam prior to incidence, allows the electron source to be located so as not to obstruct the travel of emissions and reflections to suitable detectors.

Disclosed are apparatus and methods for performing small angle x-ray scattering metrology. This system includes an x-ray source for generating x-rays and illumination optics for collecting and reflecting or refracting a portion of the generated x-rays towards a particular focus point on a semiconductor sample in the form of a plurality of incident beams at a plurality of different angles of incidence (AOIs). The system further includes a sensor for collecting output x-ray beams that are scattered from the sample in response to the incident beams on the sample at the different AOIs and a controller configured for controlling operation of the x-ray source and illumination optics and receiving the output x-rays beams and generating an image from such output x-rays.

A classification system for systems of n mirrors, whereby systems of mirrors are classified by a number C, is defined as follows:where: ai=1 if the angle of incidence of the chief ray at mirror i is negative,ai=0 if the angle of incidence of the chief ray at mirror i is positive,M is the magnification of the projection system, andindex i numbers the mirrors of the system in series. Four mirror systems, six mirror systems and eight mirror systems in accordance with the present invention are useful in EUV lithography projection systems.

A light emitting structure includes a semiconductor light emitting device capable of emitting first light having a first peak wavelength, a luminescent material capable of emitting second light having a second peak wavelength disposed over the semiconductor light emitting device, and a photonic band gap material disposed between the light emitting device and the luminescent material. The photonic band gap material is capable of transmitting the first light and reflecting the second light, regardless of the angle of incidence of the first and second light.

A spectrometer, or a spectral instrument using multiple non-interfering optical beam paths and special optical elements. The special optical elements for use with the instrument are used for directing the optical beam and / or altering the form of the beam. The instrument has the potential, depending upon the totality of the optical components incorporated into the instrument, to be a monochromator, a spectroradiometer, a spectrophotometer and a spectral source. The spectral instrument may further be a part of the spectral system. The system may include the spectral instrument, a power module and means for remote control of the instrument. Such remote control may be by use of a personal computer or a control system dedicated to the control, measurement and analysis of the collected information. The multiple non-interfering beam paths are created using specially designed optical elements such as a diffraction grating, a splitter box, a zero back-lash drive system for movement of the grating element. The orientation of and a physical / spatial relationship between the field lenses, slits, return mirror, reflecting prism, turning lenses all define the multiple, preferably two paths. Particularly, there is a double pass through the grating to increase dispersion, reduce scatter while maintaining a perfect temperature independent spectral match for the second pass. Using the same grating twice reduces scatter by about a factor of 1000, increases the dispersion by a factor of two, and eliminates any temperature-related mechanical spectral drift which often is present with two separate monochromators. Because of the specially designed grating structure, the grating can cause the concurrent diffraction of a plurality of incident optical beams, each of which beams have different angles of incidence and different angles of reflection. The path of the incident and the reflected beam to and from the grating is "off-axis". That is, the beams going to and from the grating do not use the optical axis of the grating structure.

Various processes for heating semiconductor wafers is disclosed. In particular, the present invention is directed to configuring light sources emitting light energy onto a wafer in order to optimize absorption of the energy by the wafer. Optimization is carried out by varying the angle of incidence of the light energy contacting the wafer, using multiple wavelengths of light, and configuring the light energy such that it contacts the wafer in a particular polarized state. In one embodiment, the light energy can be emitted by a laser that is scanned over the surface of the wafer.

A self-contained, portable apparatus and corresponding method for capturing, displaying and analyzing images of a person includes a housing for containing a digital camera, a light source capable of providing at least two different wavelengths of light, a touch-screen display and a computer for controlling the camera, the light source and the display. The apparatus selectively captures and displays a plurality of digital images using different wavelengths of illuminating light. The light source may include a plurality of flashes and filters, some of which may be adjustable to adjust the angle of incidence of the illuminating light on the subject. Preferably, the apparatus is self-serve, allowing any person to capture, review and analyze the images. To that end, the apparatus may provide a moving image and verbal instructions to a user to aid in positioning themselves relative to the camera. Instruction may further be provided by text or internet connection for using the apparatus and / or interpreting the captured images. An intuitive graphic user interface with thumbnail images is employed. Focus control, zoom and synchronized side-by side comparison of images are available.

Disclosed are system and method for characterizing a system consisting of a fluid sample on a two sided stage, utilizing data obtained by applying, from both sides thereof, beams of electromagnetic radiation to a fluid coated surface in a containing cell volume. The beams can have the same or different wavelength content and / or polarization state, and can be applied at the same or different magnitude angles-of-incidence, and a third typically unpolarized beam can be applied at a normal angle-of-incidence.

A method of visually quantifying a test material along with an imaging apparatus for practicing the method is disclosed. The method comprises: (a) illuminating the test material at a known angle of incidence with diffuse light of a known and adjustable polarization state; (b) receiving light from the test material with a polarization state modified by the test material; (c) measuring an intensity of the polarization components of the received light for each illuminated pixel substantially simultaneously; (d) calculating the Stokes Vector in two dimensions for each illuminated pixel; and (e) creating an image map for the known polarization state. The method may also include adjusting the known polarization or the incident angle of the diffuse light to create additional image maps. The method and apparatus are intended for use in medical imaging including minimally invasive surgery.

A solar photovoltaic panel test platform includes a test section and a signal processing section. The test section has a frame, a light-emitting unit disposed on the frame, a first angle adjustment unit and a second angle adjustment unit arranged on the frame, an air-cooling unit mounted on the first angle adjustment unit for connecting with a first solar photovoltaic panel, and a water-cooling unit mounted on the second angle adjustment unit for connecting with a second solar photovoltaic panel. The signal processing section is connected to the first and second angle adjustment units, the light-emitting unit, the air-cooling unit, the water-cooling unit, and the first and second solar photovoltaic panels. The signal processing section serves to receive sensing signals and transmit control signals. The solar photovoltaic panel test platform can provide different illuminations, angles of incidence and heat dissipation modes to test the efficiency of the solar photovoltaic panels.

A reflector, a method of producing same and a method of creating high omnidirectional reflection for a predetermined range of frequencies of incident electromagnetic energy for any angle of incidence and any polarization. The reflector includes a structure with a surface and a refractive index variation along the direction perpendicular to the surface while remaining nearly uniform along the surface. The structure is configured such that i) a range of frequencies exists defining a photonic band gap for electromagnetic energy incident along the perpendicular direction of said surface, ii) a range of frequencies exists defining a photonic band gap for electromagnetic energy incident along a direction approximately 90° from the perpendicular direction of said surface, and iii) a range of frequencies exists which is common to both of said photonic band gaps. In an exemplary embodiment, the reflector is configured as a photonic crystal.

Embodiments of a device and a technique are disclosed for locating the angular position of a radiating point source with respect to a detector comprising a point source of radiation, a variable transmissivity mask with pseudo-random variations, a multi-element detector and computing means for interpreting the detected image. The mask pattern, when illuminated by a point source of radiation, casts an image on the detector array. Computing means determine the pattern shift to allow determination of point source angular location in two dimensions. The mask transmissivity pattern and corresponding image vary in two dimensions, in such a manner as to yield two correlation peaks that indicate the incident angle in two dimensions. The differential shift and common mode shift in correlation peaks indicate the respective angles of incidence, allowing determination of the angular position of the light source.

A method and system detect directionality between two objects by measuring angles of signals incident on antenna arrays on at least one side to determine angle of incidence. The methods utilize Bluetooth Low Energy communications as the means for both the control protocol and for providing updated information for deriving directionality. Directionality information is broadcast on selected BLE advertising or data channels, or broadcast using a hopping pattern over the BLE data channels, both at a specific interval duty cycle. If a hopping pattern is selected to transmit directionality information, then anchor information is simultaneously broadcast on the BLE advertising or data channels at a different, asynchronous duty cycle. In additional embodiments, signals incident on antenna arrays located on both target and tracking sides are used to determine angle of incidence, separate antennas are combined to form new antennas and antenna models are used to anticipate known antenna structure responses.

Described is an optical film having a structured surface including a plurality of prismatic structures. Each prismatic structure has a base including at least two longer sides disposed opposite to each other along a first general direction and at least two shorter sides disposed opposite to each other along a second general direction. The body transmits light incident thereon along the first general direction when an angle of incidence is within a first predetermined angle range with respect to the axis and reflects light when the angle of incidence is outside the first predetermined angle range. The body transmits light incident thereon along the second general direction when an angle of incidence is within a second predetermined angle range with respect to the axis and reflects light when the angle of incidence is outside the second predetermined angle range. The optical film further includes a substrate portion having an additional optical characteristic different from an optical characteristic of the structured surface. Display devices including such optical films are also disclosed.

Systems, devices, and methods for combined angle- and wavelength multiplexing in holographic optical elements (“HOE”) are described. An angle- and wavelength-multiplexed HOE includes multiple angle-multiplexed sets of wavelength-multiplexed holograms. Each set of wavelength-multiplexed holograms includes at least two holograms that are each responsive to a different wavelength of light. Each angle-multiplexed set of wavelength-multiplexed holograms includes a respective set of wavelength-multiplexed holograms that are all responsive to light that is incident thereon with and angle of incidence that is within a particular range. An example application is described in which an angle- and wavelength-multiplexed HOE is used as a holographic combiner in a wearable heads-up display, where angle-multiplexing provides multiple spatially-separated exit pupils in the eyebox of the display and wavelength-multiplexing provides multiple colors to each respective exit pupil.

A zoom lens system comprising, in order from an object side: a first lens unit comprising two lens components; and a second lens unit comprising one lens component, during zooming, a space between the first lens unit and the second lens unit changing, the first lens unit and the second lens unit having aspherical surfaces, at least one aspherical surface of the first lens unit satisfying the following condition: R1 / h1<1.35, wherein R1 denotes a paraxial radius of curvature of the at least one aspherical surface, and h1 denotes a length from a first intersection between a chief ray reaching a point of maximum image height on an image surface and the at least one aspherical surface to an optical axis in the wide-angle end at a time when the chief ray enters the zoom Lens system with an angle of incidence equal to or larger than 36 degrees and passes through the at least one aspherical surface.