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6587 results about "Projection system" patented technology

Gradient immersion lithography

In a lithographic projection apparatus, a space between an optical element of a projection system is filled with a first fluid and a second fluid separated by a translucent plate. The first and second fluids have first and second indices of refraction, respectively, that are different from one another. The first fluid is provided in a space between a substrate and the translucent plate and preferably has an index of refraction similar to the index of refraction of the substrate. The second fluid is provided in a space between the translucent plate and the optical element and preferably has an index of refraction similar to the index of refraction of the optical element. The translucent plate has a third index of refraction between the first and second indices of refraction. The third index of refraction may be equal to the first index of refraction or the second index of refraction. A device manufacturing method includes filling a space between the optical element and the substrate with at least two fluids having different indices of refraction.
Owner:ASML NETHERLANDS BV

Lithographic apparatus and device manufacturing method

In a lithographic apparatus, a localized area of the substrate surface under a projection system is immersed in liquid. The height of a liquid supply system above the surface of the substrate can be varied using actuators. A control system uses feedforward or feedback control with input of the surface height of the substrate to maintain the liquid supply system at a predetermined height above the surface of the substrate.
Owner:ASML NETHERLANDS BV

Lithographic apparatus and device manufacturing method

A lithographic projection apparatus wherein a liquid supply system provides a space between a projection system and a substrate with liquid. The liquid supply system comprises a member. A liquid seal is formed between the member and the substrate by a flow of liquid. In an embodiment, the liquid seal is formed by a flow of liquid from an inlet to an outlet of the member.
Owner:ASML NETHERLANDS BV

Digital mask-image-projection-based additive manufacturing that applies shearing force to detach each added layer

A three-dimensional object may be produced in cascaded layers from a liquid resin that solidifies upon exposure to light. A translation stage may be positioned relative to a vat that is suitable for solidifying the highest un-solidified layer of the three-dimensional object directly beneath any existing, solidified layers of the three-dimensional object. A mask image projection system may project a two-dimensional image of the highest un-solidified layer through a transparent bottom of the vat and into the liquid resin. This may cause at least a portion of the liquid resin to solidify in the shape of the two-dimensional image and to adhere to the bottom of a surface beneath the solidified layer. A shearing force may be applied between the bottom surface of the solidified layer and the surface beneath that is great enough to detach the solidified layer from the surface beneath.
Owner:UNIV OF SOUTHERN CALIFORNIA

Lithographic Focus and Dose Measurement Using A 2-D Target

In order to determine whether an exposure apparatus is outputting the correct dose of radiation and its projection system is focusing the radiation correctly, a test pattern is used on a mask for printing a specific marker onto a substrate. This marker is then measured by an inspection apparatus, such as a scatterometer, to determine whether there are errors in focus and dose and other related properties. The test pattern is configured such that changes in focus and dose may be easily determined by measuring the properties of a pattern that is exposed using the mask. The test pattern may be a 2D pattern where physical or geometric properties, e.g., pitch, are different in each of the two dimensions. The test pattern may also be a one-dimensional pattern made up of an array of structures in one dimension, the structures being made up of at least one substructure, the substructures reacting differently to focus and dose and giving rise to an exposed pattern from which focus and dose may be determined.
Owner:ASML NETHERLANDS BV

Seamless, maskless lithography system using spatial light modulator

The invention is a seamless projection lithography system that eliminates the need for masks through the use of a programmable Spatial Light Modulator (SLM) with high parallel processing power. Illuminating the SLM with a radiation source (1), which while preferably a pulsed laser may be a shuttered lamp or multiple lasers with alternating synchronization, provides a patterning image of many pixels via a projection system (4) onto a substrate (5). The preferred SLM is a Deformable Micromirror Device (3) for reflective pixel selection using a synchronized pulse laser. An alternative SLM is a Liquid Crystal Light Valve (LCLV) (45) for pass-through pixel selection. Electronic programming enables pixel selection control for error correction of faulty pixel elements. Pixel selection control also provides for negative and positive imaging and for complementary overlapping polygon development for seamless uniform dosage. The invention provides seamless scanning by complementary overlapping scans to equalize radiation dosage, to expose a pattern on a large area substrate (5). The invention is suitable for rapid prototyping, flexible manufacturing, and even mask making.
Owner:ANVIK CORP

Lithographic apparatus and device manufacturing method

A lithographic apparatus for immersion lithography is described in which a compensation controller controls actuators to apply forces to the substrate equal in magnitude and opposite in direction to forces which are applied to the substrate by a liquid supply system which supplies liquid between the projection system and the substrate.
Owner:ASML NETHERLANDS BV

Projection optical system and method for photolithography and exposure apparatus and method using same

InactiveUS20050248856A1Large image-sideWide effective image forming areaSemiconductor/solid-state device manufacturingMicroscopesWide fieldProjection system
Optical Projection System and Method for Photolithography. A lithographic immersion projection system and method for projecting an image at high resolution over a wide field of view. The projection system and method include a final lens which decreases the marginal ray angle of the optical path before light passes into the immersion liquid to impinge on the image plane.
Owner:NIKON CORP

Lithographic apparatus and device manufacturing method

A lithographic apparatus is disclosed wherein a liquid supply system is configured to at least partly fill a region between a substrate and a projection system of the lithographic apparatus with a liquid and having a liquid confinement structure fixed in a plane substantially perpendicular to an optical axis of the projection system and configured to cooperate with a substrate table configured to hold the substrate in order to restrict the liquid to a region above an upper surface of the substrate table so that a side of the substrate to be exposed is substantially covered in the liquid during exposure.
Owner:ASML NETHERLANDS BV

Single panel color video projection display using reflective banded color falling-raster illumination

A projection display system. The projection system includes a light source, illumination optics that are capable of splitting the light from the source into individual color bands, and folding mirrors. The folding mirrors operate to direct the color bands to a reflective element that has a contoured surface. The contoured surface of the reflective element causes the light to form into scanning rasters that are recombined and sent to a spatial light modulator. The spatial light modulator is typically made up of a panel of individually addressable elements. If the spatial light modulator requires polarized light, a polarizing beam splitter and quarter-wave plate are included as part of the illumination optics.
Owner:SHARP LAB OF AMERICA INC

Interactive virtual thematic environment

The present invention is directed to a method of integrating information, including real-time information, into a virtual thematic environment using a computer system, including accessing the stored information from a database or downloading the real-time information from a source external to the thematic environment; inserting the real-time information into the thematic environment; and displaying the information to a user within the thematic environment. In one embodiment, the computer system is connected to a holographic projection system such that the images from the thematic environment can be projected as holographic projections. The computer system includes an interactive software application platform having at least one thematic / publishing logic module which contains thematic environment rules; at least one digital content library module which provides content management on the thematic environment; and at least one quantum imaging environment (QIE) module which interprets content such that the content is manipulated and accessed by any device.
Owner:QUANTUM IMAGING LLC

Lithographic apparatus and device manufacturing method

In a lithographic projection apparatus, a liquid supply system maintains liquid in a space between a projection system of the lithographic projection apparatus and a substrate. A sensor positioned on a substrate table, which holds the substrate, is configured to be exposed to radiation when immersed in liquid (e.g., under the same conditions as the substrate will be exposed to radiation). By having a surface of an absorption element of the sensor, that is to be in contact with liquid, formed of one or fewer metal types, long life of the sensor may be obtained.
Owner:ASML NETHERLANDS BV

Wireless wrist computing and control device and method for 3D imaging, mapping, networking and interfacing

An apparatus and method for light and optical depth mapping, 3D imaging, modeling, networking, and interfacing on an autonomous, intelligent, wearable wireless wrist computing, display and control system for onboard and remote device and graphic user interface control. Embodiments of the invention enable augmentation of people, objects, devices and spaces into a virtual environment and augmentation of virtual objects and interfaces into the physical world through its wireless multimedia streaming and multi-interface display and projection systems.
Owner:EYECAM INC

Method and system for free-space imaging display and interface

This invention comprises a method and system for displaying free-space, full color, high-resolution video or still images while simultaneously enabling the user to have real-time direct interaction with the visual images. The system comprises a self-generating means for creating a dynamic, non-solid particle cloud by ejecting atomized condensate present in the surrounding air, in a controlled fashion, into an invisible particle cloud. A projection system consisting of an image generating means and projection optics, projects an image onto the particle cloud. Any physical intrusion, occurring spatially within the image region, is captured by a detection system and the intrusion information is used to enable real-time user interaction in updating the image. This input / output (I / O) interface provides a display and computer link, permitting the user to select, translate and manipulate free-space floating visual information beyond the physical constraints of the device creating the image.
Owner:IO2 TECH

Efficient two-panel projection system employing complementary illumination

An imaging system, comprising a broadband unpolarized white light source (81), a polarization converter system for converting polarization axes of unpolarized white light into a substantially single polarization axis, to produce a beam of polarized light, a selective polarization filter (82), adapted to selectively rotate a polarization axis of a selected spectral band of light of the with respect to remaining polarized light based on a control signal (119), a polarized beam splitter (84), for separating light having a the substantially single polarization axis from light having a rotated polarization axis, a pair of electro-optic spatial light modulators (86, 89), disposed along a path of light within the spectral band and a path of remaining light outside the spectral band, respectively, and being adapted to modulate an image therein, and a polarized beam splitter (88), for recombining modulated light from the pair of light modulators. In a preferred embodiment, the selective polarization filter (82, 72) is divided into a plurality of regions (70, 71), each adapted to independently and selectively rotate a polarization axis of a selected spectral band of light of the with respect to remaining polarized light.
Owner:PHILIPS ELECTRONICS NORTH AMERICA

High numerical aperture ring field projection system for extreme ultraviolet lithography

An all-refelctive optical system for a projection photolithography camera has a source of EUV radiation, a wafer and a mask to be imaged on the wafer. The optical system includes a first concave mirror, a second mirror, a third convex mirror, a fourth concave mirror, a fifth convex mirror and a sixth concave mirror. The system is configured such that five of the six mirrors receives a chief ray at an incidence angle less than substantially 12 DEG , and each of the six mirrors receives a chief ray at an incidence angle of less than substantially 15 DEG . Four of the six reflecting surfaces have an aspheric departure of less than substantially 7 mu m. Five of the six reflecting surfaces have an aspheric departure of less than substantially 14 mu m. Each of the six refelecting surfaces has an aspheric departure of less than 16.0 mu m.
Owner:EUV

Compact, head-mountable display device with suspended eyepiece assembly

A compact, lightweight, head-mountable display device is provided for transmitting an image to a user's eye. The device includes a projection system including a display attached at one end to a head-mountable support fixture. An eyepiece assembly is attached to a second end of the support fixture. The support fixture maintains the projection system and the eyepiece assembly in alignment along an optical path through free space between the projection system and the eyepiece assembly, with the projection system disposed to transmit the image on the optical path and the eyepiece assembly disposed to receive the image from the projection system and to direct the image to the user's eye.
Owner:GOOGLE LLC

Control of appliances, kitchen and home

InactiveUS20100182136A1Ease kitchenEase house workProgramme controlWashing controlling processesOlder peopleThe Internet
The disclosed invention is generally in the field of control of appliances in the home, and in their networking and connectivity also with audio systems and internet sources and the integration of these elements in a connected manner. Preferred apparatus generally employs a video projection system and one or more TV cameras. Embodiments of the invention may be used to enhance the social interaction and enjoyment of persons in the kitchen and reduce the work of food preparation. The invention may be used in many rooms of the house, and contribute to the well being of seniors and others living therein.
Owner:PRYOR TIMOTHY

Enhanced safety during laser projection

The present invention is directed to systems and methods that provide enhanced eye safety for image projection systems. In particular, the instant invention provides enhanced eye safety for long throw laser projection systems.
Owner:IMAX THEATERS INT

Method and device for performing stereoscopic image display based on color selective filters

In one aspect, the present invention relates to a stereoscopic projection system including a projection device with at least one filter which filters a parameter of the light in a color selective manner. The at least one filter which filters a parameter of the light in a color selective manner has a spectral characteristic for transmitting light in a first wavelength band or set of wavelength bands and for reflecting light in a second wavelength band or set of wavelength bands. The projection device includes a device, such as e.g. a rotating wheel or a sliding filter, for fast synchronized switching between light in different wavelength bands or sets of wavelength bands. In a further aspect, a stereoscopic projection system is provided in which a combination of a first and a second filter mechanism are used, the first filter mechanism being a filter which filters a parameter of the light in a color selective manner, such as a color selective filter or a color selective retarder, and the second filter mechanism preferably being a polarizer or a shutter.
Owner:INFITEC

Magnetic resonance imaging having patient video, microphone and motion tracking

Critical needs for MRI patient instruction, testing, comfort, motion control, and speech communication are provided for better imaging which leads to more effective medical care. An MRI Digital Video Projection System is disclosed which provides better quality display to the patient to better inform, instruct, test, and comfort the patient plus the potential to stimulate the brain with microsecond onset times to better diagnose brain function. An MRI Motion Tracker and Patient Augmented Visual Feedback System enables monitoring patient body part motion, providing real time feedback to the patient and / or technician to substantially improve diagnostic yield of scanning sessions, particularly for children and mentally challenged individuals. An MR Forward Predictive Noise Canceling Microphone System removes the intense MRI acoustic noise improving patient communication, patient safety and enabling coding of speech output. These systems can be used individually but maximum benefit is from providing all three.
Owner:PITTSBURGH UNIV OF +1
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