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19194results about "Servomotor components" patented technology

Lithographic apparatus and device manufacturing method

In a lithographic apparatus, a localized area of the substrate surface under a projection system is immersed in liquid. The height of a liquid supply system above the surface of the substrate can be varied using actuators. A control system uses feedforward or feedback control with input of the surface height of the substrate to maintain the liquid supply system at a predetermined height above the surface of the substrate.
Owner:ASML NETHERLANDS BV

Fluid controller

Each of lines A, B is provided on each of opposite sides thereof with a tape heater 11, and a space for positioning a tape heater holding clip 13 therein is provided in each of locations between adjacent fluid control devices. The tape heaters 11 are held from opposite sides thereof to the line by the clip 13. The lines A, B provided with the heaters are each mounted on a line support member 10 removably attached to a base member 1. The line support member 10 has a heater insertion bore 14 formed therein and extending longitudinally thereof. A sheath heater 12 is inserted into the bore 14.
Owner:CKD +1

Substrate process apparatus, substrate process method, and computer readable storage medium

A vacuum chamber is evacuated through a first evacuation passage provided with a first valve and a second evacuation passage provided with a second valve. An opening degree of the first valve is adjusted so that a pressure in the vacuum chamber becomes substantially equal to a process pressure P; an opening degree of a butterfly valve further provided in the second evacuation passage is adjusted to substantially equal to a set value determined by a table in order to set flow rates of gases to be evacuated through the first evacuation passage and the second evacuation passage to be substantially equal to corresponding set values determined by the recipe; and an opening degree of the second valve is adjusted so that a measurement value of a differential pressure gauge further provided in the second evacuation passage becomes substantially equal to a differential pressure written in the table.
Owner:TOKYO ELECTRON LTD

Process-gas supply and processing system

A process-gas supply system 2 supplies a process gas diluted with a diluent gas to a gas using system 4. The process-gas supply system 2 includes a process gas tank 10, a diluent gas tank 12, a main gas duct 14 connecting the process gas tank 10 and the gas using system 4, and a diluent gas duct connecting the diluent gas tank 12 to the main gas duct. The respective main gas duct 14 and the diluent gas duct are provided with flow rate controllers FC1, FC2, and FC5. The diluent gas duct is connected to the main gas duct at a position on an immediately downstream side of one of a plurality of flow rate controllers other than the flow rate controller on the most downstream side. There is further provided a surplus-gas discharge duct 24 through which a surplus diluted process gas is discharged, the surplus-gas discharge duct 24 being connected to the main gas duct at a position on an immediately upstream side of one the flow rate controllers other than the flow rate controller on the most upstream side.
Owner:TOKYO ELECTRON LTD

Assay Cartridges and Methods of Using the Same

Assay cartridges are described that have a detection chamber, preferably having integrated electrodes, and other fluidic components which may include sample chambers, waste chambers, conduits, vents, bubble traps, reagent chambers, dry reagent pill zones and the like. In certain embodiments, these cartridges are adapted to receive and analyze a sample collected on an applicator stick. Also described are kits including such cartridges and a cartridge reader configured to analyze an assay conducted using an assay cartridge.
Owner:MESO SCALE TECH LLC

Control apparatus, method and diagnostic for hydraulic fill and drain

Hydraulic fill and drain of a clutch chamber is controlled with a blocking valve and a trim valve. The blocking valve selectively provides pressurized fluid to the trim valve which in turn selectively provides the pressurized fluid to the clutch chamber. Exhausting of the clutch chamber is effected through one of two alternate paths utilizing deactivation of one of the trim and blocking valves. Back up exhausting of the clutch chamber is effected through the other of the alternative paths. Such system allows for determination of valve failures and continued operation until such failures can be rectified.
Owner:ALLISON TRANSMISSION INC

Droplet creation techniques

The present invention is generally related to systems and methods for producing droplets. The droplets may contain varying species, e.g., for use as a library. In some cases, at least one droplet is used to create a plurality of droplets, using techniques such as flow-focusing techniques. In one set of embodiments, a plurality of droplets, containing varying species, can be divided to form a collection of droplets containing the various species therein. A collection of droplets, according to certain embodiments, may contain various subpopulations of droplets that all contain the same species therein. Such a collection of droplets may be used as a library in some cases, or may be used for other purposes.
Owner:PRESIDENT & FELLOWS OF HARVARD COLLEGE

Hydraulic circuit with a return line metering valve and method of operation

A hydraulic system controls the flow of fluid to and from several functions on a machine. Each function has a valve assembly through which fluid is supplied under pressure from a source to an actuator and through which fluid returns from the actuator to a shared return line connected by a return line metering valve to the system tank. There are several regeneration modes of operation in which fluid exhausted from one port is supplied into the other port of the same actuator, which eliminates or reduces the amount of hydraulic fluid that must be supplied from the source. In some regeneration modes, input fluid for an actuator is obtained from another hydraulic function via the shared return line. In these regeneration modes an electronic controller operates the return line metering valve to restrict fluid from flowing into the tank from the shared return line, so that the fluid will be available to be supplied into an actuator port.
Owner:HUSCO INT INC

Moving microdroplets

The movement and mixing of microdroplets through microchannels is described employing microscale devices, comprising microdroplet transport channels, reaction regions, electrophoresis modules, and radiation detectors. The discrete droplets are differentially heated and propelled through etched channels. Electronic components are fabricated on the same substrate material, allowing sensors and controlling circuitry to be incorporated in the same device.
Owner:RGT UNIV OF MICHIGAN

Hemodialysis system

A drain cassette for a dialysis unit has a fluid channel between venous and arterial connection ports, and a valve may controllably open and close fluid communication between a drain outlet port and the venous connection port or the arterial connection port. A blood circuit assembly and drain cassette may be removable from the dialysis unit, e.g., by hand and without the use of tools. A blood circuit assembly may include a single, unitary member that defines portions of a pair of blood pumps, control valves, channels to accurately position flexible tubing for an occluder, an air trap support, and / or other portions of the assembly. A blood circuit assembly engagement device may assist with retaining a blood circuit assembly on the dialysis unit, and / or with removal of the assembly. An actuator may operate a retainer element and an ejector element that interact with the assembly.
Owner:DEKA PROD LLP

Energy recovery system

An energy recovery system for a machine is disclosed. The energy recovery system may have a pump configured to provide a flow of pressurized fluid. The energy recovery system may also have a first fluid actuator with a first chamber and a second chamber and being configured to receive the pressurized fluid, a second fluid actuator with a third chamber and a fourth chamber and being configured to receive the pressurized fluid, and a first valve fluidly connected between the pump and the first and second actuators. The energy recovery system may additionally include an isolation unit with a first selectively restrictable passageway fluidly connecting the first chamber, the third chamber, and a first outlet of the first valve, and a second selectively restrictable passageway fluidly connecting the second chamber, the fourth chamber, and a second outlet of the first valve, as well as an energy recovery unit in fluid communication with the isolation unit. The isolation unit may be configured to direct a flow of pressurized fluid from the second actuator to the energy recovery unit. The energy recovery unit may be configured to convert the flow of pressurized fluid to a first mechanical power output.
Owner:CATERPILLAR INC

Scale-up of flow-focusing microfluidic devices

Parallel uses of microfluidic methods and devices for focusing and / or forming discontinuous sections of similar or dissimilar size in a fluid are described. In some aspects, the present invention relates generally to flow-focusing-type technology, and also to microfluidics, and more particularly parallel use of microfluidic systems arranged to control a dispersed phase within a dispersant, and the size, and size distribution, of a dispersed phase in a multi-phase fluid system, and systems for delivery of fluid components to multiple such devices.
Owner:PRESIDENT & FELLOWS OF HARVARD COLLEGE

Fluid end

A fluid end for a high-pressure pump including a unitary body with a plurality of horizontal passages each for receiving a reciprocating plunger at one of its ends and a pressure relief valve at the other of its ends. The body is provided with a corresponding number of vertical passages each of which intersect one of the horizontal passages and contains a suction valve at its bottom and a discharge valve at its top. A suction manifold is hingedly attached to the bottom of body to provide a flow of fluid into the body via the suction valves. A discharge passage intersects the vertical passages and receives fluid pressurized by the plungers via discharge valves and ports such from the fluid end.
Owner:GD ENERGY PROD LLC

Gas supply assembly, components thereof, and reactor system including same

Gas supply assemblies and reactors systems including the gas supply assemblies are disclosed. An exemplary gas supply assembly includes a vessel, a valve plate, a housing encasing the vessel and the valve plate, a gas feedthrough having a first end interior of the housing and a second end exterior of the housing, and one or more valves attached to the valve plate, wherein at least one valve is fluidly coupled to an interior of the vessel. The assemblies can further include a removable gas line having a first end coupled to the at least one valve and a second end coupled to the gas feedthrough. Additionally or alternatively, a gas supply assembly can include one or more valve plate leveling devices coupled to the valve plate.
Owner:ASM IP HLDG BV

Manifold system of removable components for distribution of fluids

A manifold system for enabling a distribution of fluids includes a plurality of individual manifold blocks that can be joined together to form a gas stick. Each manifold block will have a fluid passage way with an entrance port and exit port accessing a common surface. An active component can be mounted to one manifold block, while extending across a port of an adjacent manifold block. An alignment system can be provided to ensure that the entrance and exit ports are positioned in a plane containing the common surface to facilitate sealing.
Owner:ICHOR SYST INC

Remote intervention logic valving method and apparatus

A system of valves in which the valves operate over a designated pressure interval and are arranged to actuate performance of a sequenced set of events by downhole tools with the application of pressure to said valves.
Owner:EXXONMOBIL UPSTREAM RES CO

System for forming emulsions

System, including methods, apparatus, and kits, for forming emulsions. The system may include an instrument and a microfluidic chip received by the instrument. The instrument may apply pressure to prospective emulsion phases held by the chip, to drive formation and collection of emulsions in the chip. In some embodiments, the instrument may stop applying pressure to the chip when a change in pressure meeting a predefined condition is detected by the instrument. The change may indicate that an endpoint of droplet generation has been reached.
Owner:BIO RAD LAB INC

Universal quick-disconnect coupling and valve

A single-service package coupling and valve includes a fitment having a spout and a sliding tubular valve member mounted therein for receiving a cooperating dispensing connector of a liquid distributing and dispensing system, and an external adapter ring designed to cooperate with the mounting mechanisms of a plurality of conventional commercially available dispensing connectors. An internal adapter sleeve is mounted with in the sliding tubular valve member to provide a tight seal with any of the conventional dispensing connectors.
Owner:LIQUI BOX

Granular thermal energy storage mediums and devices for thermal energy storage systems

The invention provides compositions for use in thermal energy storage systems, including thermal energy storage mediums, fluid channeling devices and thermally conductive heat transfer elements, and methods for storing thermal energy. A thermal energy storage system is provided, comprising: (a) a granular thermal energy storage medium comprising at least a first size class and a second size class; wherein the individual granules of each size class deviate from the average granular size for that size class by no more than about ±50%; wherein first size class is the largest size class; wherein the ratio of the average size of the first size class to the average size of the second size class is at least about 2:1; and (b) one or more conduits disposed within the medium, and arranged to receive a source of thermal energy.
Owner:AREVA SOLAR

Restricted flow hands-free faucet

A faucet comprising a spout, a passageway, an electrically operable valve; a first manual valve; a first manual handle; and a bypass. The passageway conducts water flow through the spout. The electrically operable valve is disposed within the passageway. The first manual valve disposed within the passageway in series with the electrically operable valve. The first manual handle that controls the first manual valve. The bypass has a first end above the electrically operable valve, relative to the water flow, and a second end below the electrically operable valve, such that a portion of the water flow bypasses the electrically operable valve.
Owner:DELTA FAUCET COMPANY

Fluid manifold for endoscope system

A video endoscope system includes a reusable control cabinet and an endoscope that is connectable thereto. The endoscope may be used with a single patient and then disposed. The endoscope includes an illumination mechanism, an image sensor, and an elongate shaft having one or more lumens located therein. An articulation joint at the distal end of the endoscope allows the distal end to be oriented by the actuators in the control cabinet or actuators in a control handle of the endoscope. Fluidics, electrical, navigation, image, display and data entry controls are integrated into the system along with other accessories.
Owner:BOSTON SCI SCIMED INC
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