2532results about "Light polarisation measurement" patented technology

An apparatus and method to determine a property of a substrate by measuring, in the pupil plane of a high numerical aperture lens, an angle-resolved spectrum as a result of radiation being reflected off the substrate. The property may be angle and wavelength dependent. The radiation that is reflected off the substrate is radially polarized.

An overlay measurement apparatus has a polarized light source for illuminating a sample with a polarized light beam and an optical system to capture light that is scattered by the sample. The optical system includes a polarizer for transmitting an orthogonal polarization component that is orthogonal to a polarization direction of the polarized light beam. A detector measures intensity of the orthogonal polarization component. A processing unitise connected to the detector, and is arranged to process the orthogonal polarization component for overlay metrology measurement using asymmetry data derived from the orthogonal polarization component.

An apparatus includes a first section operable to detect polarization-sensitive radiation emitted by an object, and a second section operable to determine a Jones matrix based on information obtained by the first section from the polarization-sensitive radiation. The second section thereafter transforms the Jones matrix into a Mueller matrix, the Mueller matrix being representative of properties of the object.

The present invention discloses simple and yet highly efficient configurations of optical coherence domain reflectometry systems. The combined use of a polarizing beam splitter with one or two polarization manipulator(s) that rotate the returned light wave polarization to an orthogonal direction, enables one to achieve high optical power delivery efficiency as well as fixed or predetermined output polarization state of the interfering light waves reaching a detector or detector array, which is especially beneficial for spectral domain optical coherence tomography. In addition, the system can be made insensitive to polarization fading resulting from the birefringence change in the sample and reference arms. Dispersion matching can also be easily achieved between the sample and the reference arm for high resolution longitudinal scanning.

Methods of detecting one or more parameters of a medium are disclosed. The methods include providing a waveguide grating device, contacting the waveguide grating with a medium, propagating a signal having at least one signal attribute through the waveguide, and comparing the modified signal attribute to a known signal attribute to detect a parameter of the medium.

The illumination profile of a radiation beam is initially measured using a CCD detector. A reference mirror is then placed in the focal plane of the high aperture lens and the reflected radiation measured. By comparing the illumination profile and the detected radiation it is possible to determine the transmission losses for S and P polarisation which can then be used in scatterometry modeling.

A microscope system for determining optical properties of a specimen includes a source of polarized light, a detector for detecting the intensity of light incident thereon, an optical path extending from the source to the detector, a condenser for providing light from the source to the specimen, an objective for receiving light from the specimen, a support for mounting the specimen, a sectored variable retarder mounted in the optical path, and a polarized light analyzer mounted in the path between the sectored variable retarder and the detector. The variable retarder has a multiple sectors. Each sector is individually addressable by a control signal that affects the light retardation characteristics of the sector.

An in vivo imaging device having an illumination system that creates a virtual source within a tissue region of a subject in a non-invasive manner. The illumination system transforms a maximum amount of illumination energy from a light source into a high contrast illumination pattern. The illumination pattern is projected onto the object plane in a manner that maximizes the depth to which clear images of sub-surface features can be obtained. The high intensity portion of the illumination pattern is directed onto the object plane outside the field of view of an image capturing device that detects the image. In this configuration, scattered light from within the tissue region interacts with the object being imaged. This illumination technique provides for a high contrast image of sub-surface phenomena such as vein structure, blood flow within veins, gland structure, etc.

A method of real-time processing and monitoring comprises the steps of blending a material of interest (e.g., an active pharmaceutical material), with a secondary material, (e.g., an excipient), illuminating the blended materials with light, reflecting light carrying information about the blended materials through at least one multivariate optical element (148) and detecting said light with a first detector (152), detecting a deflected portion of the information carrying light with a second detector (156), and determining in real-time at least one selected property of the blended materials based on the detector outputs.

An apparatus and method to determine the surface orientation of objects in a field of view is provided by utilizing an array of polarizers and a means for microscanning an image of the objects over the polarizer array. In the preferred embodiment, a sequence of three image frames is captured using a focal plane array of photodetectors. Between frames the image is displaced by a distance equal to a polarizer array element. By combining the signals recorded in the three image frames, the intensity, percent of linear polarization, and angle of the polarization plane can be determined for radiation from each point on the object. The intensity can be used to determine the temperature at a corresponding point on the object. The percent of linear polarization and angle of the polarization plane can be used to determine the surface orientation at a corresponding point on the object. Surface orientation data from different points on the object can be combined to determine the object's shape and pose. Images of the Stokes parameters can be captured and viewed at video frequency. In an alternative embodiment, multi-spectral images can be captured for objects with point source resolution. Potential applications are in robotic vision, machine vision, computer vision, remote sensing, and infrared missile seekers. Other applications are detection and recognition of objects, automatic object recognition, and surveillance. This method of sensing is potentially useful in autonomous navigation and obstacle avoidance systems in automobiles and automated manufacturing and quality control systems.

A process control method to monitor ion implantation process conditions by measuring the optical properties of a masking material is provided. A patterned masking material may protect underlying regions of a semiconductor substrate from undergoing a chemical or physical change during an ion implantation process. The patterned masking material, however, may also undergo a chemical or physical change during processing. The chemical or physical changes to the masking material during such processing may also cause the optical properties of the material to change. The optical properties of the masking material may be used to determine the concentration of ions implanted into the semiconductor substrate.

A fiber optic acoustic sensor system including an optical conductor having low reflectivity mirrors is provided. Optical sensors are provided by sections of the optical conductor bounded by pairs of the low reflectivity mirrors. Pulses of light are injected into the optical conductor and reflected by the low reflectivity mirrors. The reflected pulses of light are processed using a compensating interferometer to generate interference patterns representative of the environmental conditions acting upon the optical conductor.

An alignment target includes periodic patterns on two elements. The periodic patterns are aligned when the two elements are properly aligned. By measuring the two periodic patterns with an incident beam having a single polarization state and detecting the intensity of the resulting polarized light, it can be determined if the two elements are aligned. The same polarization state may be detected as is incident or different polarization states may be used. A reference measurement location may be used that includes a third periodic pattern on the first element and a fourth periodic pattern on the second element, which have a designed in offset, i.e., an offset when there is an offset of a known magnitude when the first and second element are properly aligned. The reference measurement location is similarly measured with a single polarization state.

An apparatus and a method of depositing a dielectric material film, including steps of initiating a process of depositing a dielectric material film under at least one controllable initial condition in an apparatus comprising a dielectric material deposition chamber and a spectroscopic ellipsometer; and measuring, by the spectroscopic ellipsometer, at least one ellipsometric parameter of the dielectric material film during the process of depositing the film.