580 results about "Diffraction spectrum" patented technology

Metrology targets are formed on a substrate (W) by a lithographic process. A target (T) comprising one or more grating structures is illuminated with spatially coherent radiation under different conditions. Radiation (650) diffracted by from said target area interferes with reference radiation (652) interferes with to form an interference pattern at an image detector (623). One or more images of said interference pattern are captured. From the captured image(s) and from knowledge of the reference radiation a complex field of the collected scattered radiation at the detector. A synthetic radiometric image (814) of radiation diffracted by each grating is calculated from the complex field. From the synthetic radiometric images (814, 814′) of opposite portions of a diffractions spectrum of the grating, a measure of asymmetry in the grating is obtained. Using suitable targets, overlay and other performance parameters of the lithographic process can be calculated from the measured asymmetry.

The invention discloses mask-alignment aligning system and its grade combining system. The aligning system includes light source module, illumination module, imaging module, and detecting module. The grade combining system makes positive negative grade frequency spectrum facula of the alignment mark diffraction spectrum process corresponding overlap coherent, uses polychromatic light separating system to separate multiple wavelength light signal, measures light intensity or phase change at the corresponding position of the multiple wavelength multistage secondary diffracted facula to gain alignment mark position information. The invention has high alignment precision and stability.

An overlay target on a substrate includes two sets of gratings; the first set having a pitch P1 and the second set having a pitch P2 and each set including a grating with an orientation substantially perpendicular to the first grating of each set. When a layer of resist is to be aligned with the layer below it, the same overlay marks are provided on the upper layer and the relative positions of the overlay targets on the upper layer and the lower layer are compared by shining an overlay beam on to the overlay targets and measuring the diffraction spectrum of the reflected beam. Having two sets of overlay targets with different pitches in gratings enables the measurement of overlay errors that are greater than the pitch of either one of the overlay gratings.

Inkjet ink contains a pigment, a hydrosoluble solvent, and water, wherein the pigment is represented by the following chemical formula 1 and has a CuKα X-ray diffraction spectrum having a wavelength of 1.541 Å such that no main peak is observed at a Bragg (2θ±0.2°) angle in a range of 2θ of from 28.0° to 29.0°,

Toner contains a binder resin containing a crystalline resin having a urethane and/or urea bonding; and a colorant, wherein in a diffraction spectrum of the toner as measured by an X-ray diffraction instrument, a ratio {C/(C+A)} of an integral intensity C of the spectrum derived from the crystalline structure to an integral intensity A of the spectrum derived from the non-crystalline structure is 0.12 or greater, wherein the toner satisfies the following relation 1: T1−T2≦30° C. (Relation 1), where T1 represents the maximum endothermic peak in the first temperature rising from 0° C. to 100° C. at the temperature rising rate of 10° C./min and T2 represents the maximum exothermic peak in the first temperature falling from 100° C. to 0° C. at the temperature falling rate of 10° C./min as T1 and T2 are measured by diffraction scanning calorimetry (DSC).

A device for the production of holographic reconstructions having light modulators is disclosed. The device comprises at least one pixelated light modulator illuminated by at least one light source, and a focusing optical element field arrangement which images the light sources in an image plane after the light modulator. For the reconstruction, only one order of diffraction of the Fourier spectrum of the hologram should be used. The light modulator is provided with an assigned filter-aperture field arrangement which is located in the area of the image plane of the light source images and which has a plurality of aperture openings. Said aperture openings are designed in such a way that they each allow the passage of a prespecified area of the overall dimensions either smaller or the same as a diffraction order of the diffraction spectrum following Fourier transformation and produced from the holographic coding of the light modulator.

A carbon material for catalyst support use which, when used as a catalyst support, maintains a high porosity while being stable chemically, having electrical conductivity, being excellent in durability, and being excellent in diffusibility of the reaction starting materials and reaction products is provided. It is characterized by comprising dendritic carbon mesoporous structures which have 3D structures of branched carbon-containing rod shapes or carbon-containing ring shapes, having a pore size of 1 to 20 nm and a cumulative pore volume of 0.2 to 1.5 cc/g found by analyzing a nitrogen adsorption isotherm by the Dollimore-Heal method, and having a powder X-ray diffraction spectrum which has a peak corresponding to a 002 diffraction line of graphite between diffraction angles (2θ: degrees) of 20 to 30 degrees and has a peak with a half value width of 0.1 degree to 1.0 degree at 25.5 to 26.5 degrees.

The invention provides a method used for determining Bravais lattice of unknown crystal by electron backscatter diffraction. The invention is characterized in that the method comprises the steps as follows: 1) an electron backscatter diffraction spectrum is obtained and the crystal diffraction information in the diffraction spectrum is measured; 2) a two-dimensional reciprocal surface of the crystal is obtained; 3) a three-dimensional reciprocal primitive cell is reconstructed by the two-dimensional reciprocal surface; 4) the cell parameter of the three-dimensional reciprocal primitive cell s worked out according to the width of the Kikuchi band and the angle between the Kikuchi bands in the same Kikuchi electrode; 5) a reciprocal reduced cell of the crystal is solved; 6) the Bravais lattice of the crystal is determined in the reciprocal space; 7) the Bravais lattice of the crystal is determined. In the method, only a scanning electron microscope and an electron backscatter diffraction accessory are used to realize the analysis on unknown lattice of bulk crystals, and the exponential of the Kikuchi band and the Kikuchi electrode in the electron backscatter diffraction spectrum is marked at the same time. The method has no special requirement on the samples to be analyzed, is suitable for quickly analyzing bulk samples, and can be used for analyzing the microstructure morphologies and crystal structure in the buck samples.

The present invention provides a negative active material, a method of preparing the negative active material, a negative electrode including the negative active material, and a lithium battery comprising the electrode. The negative active material including: a composite including a matrix comprising silicon oxide, silicon carbide, carbon and silicon particles dispersed in the matrix; and a carbon coating film formed on a surface of the composite, wherein an intensity ratio of a SiC peak to a Si peak in an X-ray diffraction spectrum is at least 1.

An object of the invention is to improve the photosensitivity characteristics, characteristics on repeated use and stability of a photoreceptor. A photosensitive layer formed on a conductive support of a photoreceptor contains crystalline oxotitanylphthalocyanine having major peaks in an X-ray diffraction spectrum at Bragg angles (2theta±0.2°) of 7.3°, 9.4°, 9.6°, 11.6°, 13.3°, 17,9°, 24.1° and 27.2°, wherein a peak bundle formed by overlapping the peaks at 9.4° and 9.6° is the largest peak, and the peak at 27.2° is the secondary largest peak as a charge generating substance. Furthermore, it contains a bisamine compound, an N,N'-bisenamine compound, a styryl compound, an amine-hydrazone compound, a benzofuran-bishydrazone compound, a bisenamine compound, a benzofuran-bishydrazone compound or a benzofuran-bis-cyclic hydrazone compound represented by the particular structural formulae as a charge transporting substance.

Provided is toner that contains a toner particle, and an external additive containing a strontium titanate particle, wherein the toner has an average circularity of at least 0.935 and not more than 0.995, the strontium titanate particle has a number-average primary particle diameter of at least 10 nm and not more than 60 nm, the strontium titanate particle has a peak in the range of 39.700°±0.150° and a peak in the range of 46.200°±0.150° in a CuKα x-ray diffraction spectrum obtained in the 2θ range of at least 10° and not more than 90° where θ is the Bragg angle, and the ratio of the area Sb of the peak at 46.200°±0.150° to the area Sa of the peak at 39.700°±0.150° is at least 1.80 and not more than 2.30.