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407 results about "Phase grating" patented technology

Electronically controlled volume phase grating devices, systems and fabrication methods

InactiveUS20050232530A1Efficient and small device form factorLow costOptical light guidesNon-linear opticsSemiconductor materialsPhase grating
Electrically controlled volume phase gratings and electrically controlled Bragg Gratings can provide variable diffraction gratings that can be operated in a transmissive and / or reflective mode. They can be made from electro-optic materials placed directly on glass or semiconductor materials, utilizing conventional Liquid Crystal on Silicon (LCOS) processes and equipment. Highly efficient and / or small device form factors may be provided.
Owner:META PLATFORMS TECH LLC

Alignment method and micro-device manufacturing method used for shadow cast scan photo-etching machine

The invention discloses an alignment method of phase grating detection by using three basic grating periods applied in a scanning projection lithography tool and a micro-device manufacturing way by using the method. The alignment method of the invention applied in the scanning projection lithography tool uses three periods phase grating in a substrate marker or a substrate station reference marker, uses a first order diffraction light of the three periods as an alignment signal, simultaneously realizes a big capture range and gets high alignment precision and strong signal intensity, improves system signal to noise ratio, simplifies optical design and debugging difficulty, simplifies hardware realization, reduces signal processing cost and improves alignment efficiency.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Absolute position miniature grating encoder readhead using fiber optic receiver channels

ActiveUS7053362B2Highly accurate and economical and high configurationOvercome disadvantagesMaterial analysis by optical meansUsing optical meansFiberPhase grating
An absolute position fiber optic encoder readhead having multiple readhead portions for sensing the displacement of respective scale grating tracks of a scale is disclosed. The detector channels of the readhead portions are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead portions are configured to detect the displacement of a self-image of a respective scale grating track of the scale. In various exemplary embodiments, the fiber optic readhead portions are constructed according to various design relationships that provide a relatively high signal-to-noise ratio. Accordingly, high levels of displacement signal interpolation may be achieved, allowing submicrometer displacement measurements. The fiber optic encoder readhead portions may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1–2 millimeters, resulting in a very small overall absolute readhead dimension that is dependent on the number of readhead portions that are incorporated. Optical fiber receiver channels carrying binary optical signals derived from a scale code track may be provided in the readhead, to provide an extended absolute measurement range.
Owner:MITUTOYO CORP

Structure for wavelength selection switch

InactiveCN102226848AReduce design linksEasy to debugOptical light guidesPhase gratingEllipse
The invention relates to a structure for a wavelength selection switch composed of a collimator array 1, a beam-expanding prism group 2, a polarization independent transmission phase grating 3, a focusing lens 4 and an MEMS (Micro-electromechanical System) micro-mirror array 5. The volumes of the devices can be reduced by adding a reflector 6 or a steering prism 7 in an optical path. One of the collimator array 1 is used as an input port while the others are used as output ports; DWDM (Dense WaveLength Division Multiplexing) light beams are input and converted to elliptical light beams via the beam-expanding prism group 2, then the light beams with different wavelengths are diffracted to be different deflection angles via the polarization independent transmission phase grating 3, focused by the focusing lens and emitted to different micro-mirrors on the MEMS micro-mirror array 5; each micro-mirror independently controls the reflection direction of every wavelength; the light beams are output to the target output port in the collimator array 1 through the focusing lens 4, the polarization independent transmission phase grating 3 and the beam-expanding prism group 2.
Owner:孙方红 +2
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