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405 results about "Phase grating" patented technology

Alignment method and micro-device manufacturing method used for shadow cast scan photo-etching machine

The invention discloses an alignment method of phase grating detection by using three basic grating periods applied in a scanning projection lithography tool and a micro-device manufacturing way by using the method. The alignment method of the invention applied in the scanning projection lithography tool uses three periods phase grating in a substrate marker or a substrate station reference marker, uses a first order diffraction light of the three periods as an alignment signal, simultaneously realizes a big capture range and gets high alignment precision and strong signal intensity, improves system signal to noise ratio, simplifies optical design and debugging difficulty, simplifies hardware realization, reduces signal processing cost and improves alignment efficiency.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Absolute position miniature grating encoder readhead using fiber optic receiver channels

ActiveUS7053362B2Highly accurate and economical and high configurationOvercome disadvantagesMaterial analysis by optical meansUsing optical meansFiberPhase grating
An absolute position fiber optic encoder readhead having multiple readhead portions for sensing the displacement of respective scale grating tracks of a scale is disclosed. The detector channels of the readhead portions are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead portions are configured to detect the displacement of a self-image of a respective scale grating track of the scale. In various exemplary embodiments, the fiber optic readhead portions are constructed according to various design relationships that provide a relatively high signal-to-noise ratio. Accordingly, high levels of displacement signal interpolation may be achieved, allowing submicrometer displacement measurements. The fiber optic encoder readhead portions may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1–2 millimeters, resulting in a very small overall absolute readhead dimension that is dependent on the number of readhead portions that are incorporated. Optical fiber receiver channels carrying binary optical signals derived from a scale code track may be provided in the readhead, to provide an extended absolute measurement range.
Owner:MITUTOYO CORP
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