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Digital phase estimator, digital phase locked loop and optical coherent receiver

The present invention provides a digital phase estimator, a digital phase locked loop and an optical coherent receiver. The optical coherent receiver comprises a local oscillator laser, for supplying a local oscillator optical signal; an optical 90 degree frequency mixer, for mixing a received optical signal with the local oscillator optical signal; first and second balancing photoelectric detectors, for converting the optical signals outputted from the optical 90 degree frequency mixer into baseband electrical signals; first and second A / D converters, for respectively converting output signals from the first and the second balancing photoelectric detectors into digital signals; a digital phase locked loop, for compensating a phase difference between a carrier signal of the received optical signal and the local oscillator optical signal, and outputting the compensated signal; and a data recovering unit, for recovering data from the compensated signal.
Owner:FUJITSU LTD

Inspection Apparatus, Inspection Method and Manufacturing Method

A product structure (407, 330′) is formed with defects (360-366). A spot (S) of EUV radiation which is at least partially coherent is provided on the product structure (604) to capture at least one diffraction pattern (606) formed by the radiation after scattering by the product structure. Reference data (612) describes a nominal product structure. At least one synthetic image (616) of the product structure is calculated from the captured image data. Data from the synthetic image is compared with the reference data to identify defects (660-666) in the product structure. In one embodiment, a plurality of diffraction patterns are obtained using a series overlapping spots (S(1)-S(N)), and the synthetic image is calculated using the diffraction patterns and knowledge of the relative displacement. The EUV radiation may have wavelengths in the range 5 to 50 nm, close to dimensions of the structures of interest.
Owner:ASML NETHERLANDS BV

Micro-LED (Micro-light emitting diode) array backlight source-based ink-jet printing quantum dot display device

The invention relates to a Micro-LED (Micro-light emitting diode) array backlight source-based ink-jet printing quantum dot display device, which comprises a Micro-LED substrate, wherein a plurality of RGB (red, green and blue) pixel units arranged in an array are arranged on the Micro-LED substrate; each RGB pixel unit comprises a red quantum dot unit, a green quantum dot unit and a transparent unit; each red quantum dot unit comprises a Micro-LED chip and a red quantum dot material, and the red quantum dot material is excited by blue light emitted by the Micro-LED chip to emit red light; each green quantum dot unit comprises a Micro-LED chip and a green quantum dot material, and the green quantum dot material is excited by blue light emitted by the Micro-LED chip to emit green light; each transparent unit comprises a Micro-LED chip and a transparent material, and the transparent material is used for directly transmitting blue light emitted by the Micro-LED chip; a transparent material for packaging is arranged outside the RGB pixel units. According to the device, an ink-jet printing technology is adopted for film forming of quantum dots, so that the problems of complexity and low yield of an RGB tri-color process for manufacturing a Micro-LED full-color product are solved, and batch operation is realized.
Owner:FUZHOU UNIV
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