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Nitriding PVD composite coating and preparation method thereof

A composite coating and nitriding technology, applied in the field of high-performance die steel coating, can solve problems such as increasing the cost of coating preparation, and achieve the effects of improving interface stress concentration, improving bearing capacity, and improving film-matrix bonding force

Active Publication Date: 2015-04-01
安徽工业大学科技园有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, mechanical polishing to remove the compound layer will increase the preparation cost of the coating

Method used

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  • Nitriding PVD composite coating and preparation method thereof
  • Nitriding PVD composite coating and preparation method thereof
  • Nitriding PVD composite coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] Mechanically polish the SKD 11 cold-working die steel samples purchased in the market to a surface roughness of ≤0.1 μm, then perform ultrasonic cleaning with acetone and absolute ethanol, then put them in alcohol and acetone, and use ultrasonic cleaning for 30 minutes, then Dry the cleaned samples with an air gun and place them on the substrate holder in the furnace cavity. Turn on the mechanical pump and the molecular pump to pump the background vacuum of the vacuum chamber to less than 1×10 -2 Pa, feed Ar gas and control the flow rate at 50-200sccm, the air pressure is less than 0.2Pa, the sample temperature is 300-500°C, the negative bias voltage is 1000V, and the bombardment time is 10-40min. After glow cleaning, adjust the vacuum to 0.1-5Pa, turn on the turret, Cr target and AlCr target, keep the sample bias at -30--200V, and turn on the N 2 , control the air pressure at 0-5Pa, keep the sample temperature at 300-500°C, target current at 50-100A, deposit for 1-3h,...

Embodiment 2

[0031] The SKD 11 cold work die steel samples purchased in the market were quenched for austenitization, and then tempered at high temperature to make the internal structure mainly tempered sorbite. Mechanically polish the sample to a surface roughness of ≤0.1 μm, then perform ultrasonic cleaning with acetone and absolute ethanol, put the cleaned workpiece into the frame of the ion nitriding furnace, and inject ammonia gas for glow heating. The vacuum degree of the vacuum chamber in the nitriding furnace is less than 1×10 -4 Pa, feed ammonia and control the flow rate at 100-200 sccm, feed acetone and control the flow rate at 20-50 sccm, and the furnace pressure is 5 × 10 -2 , the sample temperature is 520-590°C, the bias voltage is 400-800V, and the nitriding time is 3-9h, and the nitrided sample is prepared.

[0032] The nitrided sample is annealed in a salt bath furnace, the annealing temperature is controlled at 180-500°C and the annealing time is 1-14h. After the annealed...

Embodiment 3

[0034] The SKD 11 cold work die steel samples purchased in the market were quenched for austenitization, and then tempered at high temperature to make the internal structure mainly tempered sorbite. Mechanically polish the sample to a surface roughness of ≤0.1 μm, then perform ultrasonic cleaning with acetone and absolute ethanol, put the cleaned workpiece into the frame of the ion nitriding furnace, and inject ammonia gas for glow heating. The vacuum degree of the vacuum chamber in the nitriding furnace is less than 1×10 -4 Pa, feed ammonia and control the flow rate at 100-200 sccm, feed acetone and control the flow rate at 20-50 sccm, and the furnace pressure is 5 × 10 -2 , the sample temperature is 520-590°C, the negative bias voltage is 400-800V, and the nitriding time is 3-9h, and the nitrided sample is prepared.

[0035] The nitrided sample is annealed in a salt bath furnace, the annealing temperature is controlled at 180-500°C and the annealing time is 1-14h, the annea...

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Abstract

The invention discloses a nitriding PVD (Physical Vapor Decomposition) composite coating and a preparation method thereof. The internal structure of a diffusion layer comprises a nitrogen-containing oversaturated martensitic structure, a metal nitrogen compound, a metal carbon compound and Fe4N phase; the internal structure of a compound layer comprises Fe4N phase of a face-centered cubic structure, CrN phase of the face-centered cubic structure, and Fe2-3N phase of a close-packed hexagonal structure; the internal structure of a PVD hard film layer mainly comprises fcc-(Cr, Al)N phase of the face-centered cubic structure and further comprises a small number of hcp-AlN phase of the close-packed hexagonal structure, and fcc-(Ti, Al)N phase of the face-centered cubic structure. With the adoption of the reasonable technologic optimization and adjustment and control of the structure, the decomposition of the compound layer can be inhibited; the Fe4N phase and the CrN phase in the compound layer become nucleation particles for phase epitaxial growth of the PVD hard film, so as to obviously increase the film-matrix binding force; the compound layer provides powerful support for the PVD hard film; moreover, the compound layer enables the stress on the film-matrix interface to be continuously changed, so as to improve the interfacial stress concentration situation, and improve the bearing capacity, the surface hardness and other mechanical properties of the composite coating.

Description

technical field [0001] The invention relates to a high-performance die steel coating, in particular to a nitrided PVD composite coating and a preparation method thereof. Background technique [0002] With the rapid development of modern manufacturing industry, more and more products require mold processing, and the mold industry has become the basis for the development of modern manufacturing industry. my country has become a big country in mold consumption, and the mold industry is increasing at an annual rate of 15%, but it is not a powerhouse in mold manufacturing. At present, domestic medium and high-grade mold steel mainly depends on foreign imports. The mold industry is also facing many challenges. For example, the rapid development of extrusion, stamping and other forming technologies has put forward high wear resistance, high load capacity, high toughness, high fatigue strength and high thermal stability requirements for tools and molds. The surface quality of the m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F17/00
Inventor 陈汪林张世宏权植哲郑洁李福星吴东青
Owner 安徽工业大学科技园有限公司
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