Plasma cleaning equipment in two-sided turnover door structure
A technology of plasma cleaning and flipping door, applied in the directions of plasma, ion implantation plating, gaseous chemical plating, etc., can solve the problem of high price, and achieve the effect of improving surface activity and enhancing adhesion
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[0021] Below in conjunction with accompanying drawing, the present invention is described in detail.
[0022] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0023] Such as figure 1 As shown, a plasma cleaning device with a double-sided reversible door structure includes a vacuum system 1, a door 2, a vacuum chamber body 3, a hinge 4, a hanger assembly 5, a high-voltage lead-in electrode 6, a bracket 7, and a high-voltage bombardment plate 8.
[0024] The vacuum system 1 is composed of a Roots pump as the main pump, a screw pump as a backing pump, and a roughing valve. The Roots pump and the screw pump are directly connected through a bellows, and...
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