The invention discloses a
microwave rapid
sintering method for high-quality aluminum
nitride ceramic substrates. The method belongs to
microwave firing of
ceramic materials and comprises the following steps: after discharging glue, putting aluminum
nitride ceramic substrate blanks into an
auxiliary heating insulation structure in a
microwave sintering cavity, uniformly spraying
boron nitride powder among the blanks, wherein the aluminum nitride
ceramic substrate blanks are overlapped orderly and the
auxiliary heating insulation structure comprises an aluminum nitride
fiber plate, a
boron nitride sagger and a high-purity
graphite plate;
sintering in a nitride
atmosphere containing 6-10% of
hydrogen under the conditions that the
microwave sintering frequency is 2.45GHz, the normal-pressure
microwave sintering temperature is 1700-1750 DEG C and the heating rate is 8-10 DEG C per minute; preserving the heat for two hours, cooling along with a furnace, opening the furnace and taking out the aluminum nitride
ceramic substrate blanks when the temperature is below 400 DEG C, thus obtaining high-quality aluminum nitride
ceramic substrate sintering bodies which are small in deformation and has a heat
conductivity being greater than 150W / (m K). Different from a conventional methods adopting a
convection, conduction or
radiation heating manner, the method adopts a heating manner that the microwave with a special waveband is used to be coupled with basic structures of the materials so as to generate heat and the materials are heated completely by adopting medium loss of the materials; and in combination with special
microwave sintering structures and sintering process, the method is capable of rapidly and uniformly sintering the materials and has the advantages of low sintering temperature, short time, low
energy consumption, high quality and high efficiency.