The invention relates to a
coating for a furnace wall on the internal side of the furnace body of a
polycrystalline silicon reduction furnace (a lining
coating for short) and a production method of the
coating, in particular to a lining anticorrosive
infrared reflection coating of an improved-Siemens-process
polycrystalline silicon reduction furnace. The coating is made of a
metal-
ceramic material. The coating is directly coated on the furnace wall on the internal side of the furnace body of the improved-Siemens-process
polycrystalline silicon reduction furnace. The adopted coating method is a
physical vapor deposition method or a
chemical vapor deposition method. The thickness of the lining coating of the polycrystalline
silicon reduction furnace is 1-10 micrometers, the production cost is low and the
adhesive force of the coating on the furnace wall is strong. The coating can
resist high temperature, strong acid and alkali
corrosion and
mechanical impact and scraping, the
infrared reflection efficiency is high, the service life is long and the loss of heat in the improved-Siemens-process polycrystalline
silicon reduction furnace because of
heat transfer towards the outside of the furnace can be effectively reduced. Since the coating replaces a pure-gold
infrared reflection coating, the expense of the coating material is greatly decreased and the cost of producing polycrystalline
silicon products by adopting an improved Siemens process can be greatly decreased.