The invention discloses a
recovery device for CVI / CVD process
tail gas, which comprises cooling filter equipment, a
vacuum pump, an isothermal
cracking furnace and later comprehensive treatment equipment. The cooling filter equipment includes a circulating liquid cooling module, an
oil filter and a dry filter; isothermal
cracking A preheating zone module is placed at the bottom of the furnace, and an isothermal zone module is set above the preheating zone module. The preheating zone module is a multi-layer labyrinth
graphite plate. The lower part of the isothermal zone module is the
delay buffer zone, and the upper part of the isothermal zone module is the upper cavity of the isothermal zone. The upper cavity of the isothermal zone is equipped with a multi-layer
graphite plate structure. The
graphite plate is equipped with an
activated carbon growth structure, and the surface of the
activated carbon growth structure is loaded with
carbon black catalyst. . The top of the isothermal
cracking furnace is a gas outlet, and the gas outlet is connected to the later comprehensive
processing equipment through pipelines. The post-comprehensive treatment equipment includes a pressure change separator and a
solid filter. The invention is a
recovery device and method of CVI / CVD process
tail gas with high treatment efficiency, good safety performance and high eco-environmental friendliness.