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CVI/CVD process tail gas recovery device and method

A process tail gas and recovery device technology, applied in chemical instruments and methods, hydrogen/synthesis gas production, inorganic chemistry, etc., can solve the problem of low utilization rate of source gas, and achieve easy control of reaction temperature, stable performance, and easy scale-up Effect

Active Publication Date: 2019-12-10
上海康碳复合材料科技有限公司 +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the utilization rate of source gas in the preparation process of carbon / carbon materials is low, only about 10%.

Method used

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  • CVI/CVD process tail gas recovery device and method
  • CVI/CVD process tail gas recovery device and method
  • CVI/CVD process tail gas recovery device and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] like Figure 1~3 Shown is an embodiment of the present invention,

[0037] (1) Equipment:

[0038] A recovery device for CVI / CVD process tail gas, comprising a cooling filter device 1, a vacuum pump 2, an isothermal cracking furnace 3 and a later comprehensive treatment device 4, the cooling filter device 1 includes a circulating liquid cooling module 11, an oil filter 12 and a drying Filter 13; the cooling and filtering equipment also includes an oil tank 14, which communicates with the oil filter 12, and a butterfly valve 141 and a waste oil outlet 142 are arranged at the end of the oil tank. The vacuum pump 2 is arranged between the cooling filter equipment 1 and the isothermal cracking furnace 3; the bottom of the isothermal cracking furnace 3 is provided with a preheating zone module 31, and an isothermal zone module 32 is arranged above the preheating zone module 31; The hot zone module 31 is a multilayer labyrinth graphite plate 313; the bottom of the isotherma...

Embodiment 2

[0047] like Figure 4~6 Shown is an embodiment of the present invention,

[0048] (1) Equipment:

[0049] A recovery device for CVI / CVD process tail gas, comprising a cooling filter device 1, a vacuum pump 2, an isothermal cracking furnace 3 and a later comprehensive treatment device 4, and the cooling filter device 1 includes a circulating liquid cooling module 11, an oil filter 12 and a drying Filter 13; the cooling and filtering equipment also includes an oil tank 14, which communicates with the oil filter 12, and a butterfly valve 141 and a waste oil outlet 142 are arranged at the end of the oil tank. The vacuum pump 2 is arranged between the cooling filter equipment 1 and the isothermal cracking furnace 3; the bottom of the isothermal cracking furnace 3 is provided with a preheating zone module 31, and an isothermal zone module 32 is arranged above the preheating zone module 31; The hot zone module 31 is a multilayer labyrinth graphite plate 313; the bottom of the isoth...

Embodiment 3

[0058] like Figure 7-9 Shown is an embodiment of the present invention,

[0059] (1) Equipment:

[0060] A recovery device for CVI / CVD process tail gas, comprising a cooling filter device 1, a vacuum pump 2, an isothermal cracking furnace 3 and a later comprehensive treatment device 4, and the cooling filter device 1 includes a circulating liquid cooling module 11, an oil filter 12 and a drying Filter 13; the cooling and filtering equipment also includes an oil tank 14, which communicates with the oil filter 12, and a butterfly valve 141 and a waste oil outlet 142 are arranged at the end of the oil tank. The vacuum pump 2 is arranged between the cooling filter equipment 1 and the isothermal cracking furnace 3; the bottom of the isothermal cracking furnace 3 is provided with a preheating zone module 31, and an isothermal zone module 32 is arranged above the preheating zone module 31; The hot zone module 31 is a multilayer labyrinth graphite plate 313; the bottom of the isoth...

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Abstract

The invention discloses a CVI / CVD process tail gas recovery device and method, wherein the device includes a cooling filter device, a vacuum pump, an isothermal cracking furnace and a post comprehensive treatment device; the cooling filter device comprises a circulating liquid cooling module, an oil filter and a drying filter; a preheating zone module is arranged at the bottom of the interior of the isothermal cracking furnace, and an isothermal zone module is arranged above the preheating zone module. The preheating zone module is a multilayer labyrinth graphite plate. The lower part of the isothermal zone module is a delay buffer zone, the upper part of the isothermal zone module is an upper cavity of the isothermal zone, and the upper cavity of the isothermal zone is provided with a multilayer graphite plate structure; the graphite plate is provided with an active carbon growth structure, and the surface of the active carbon growth structure is provided with a carbon black catalyst.The top of the isothermal cracking furnace is provided with a gas outlet, and the gas outlet is connected with the post comprehensive treatment device through a pipeline. The later comprehensive treatment device includes a pressure swing separator and a solid filter. The invention provides the CVI / CVD process tail gas recovery device and method with high treatment efficiency, good safety performance and high ecological environment friendliness.

Description

technical field [0001] The invention relates to an industrial tail gas treatment device and method, in particular to a recovery device and method for a CVI / CVD process tail gas. Background technique [0002] People pay more and more attention to environmental protection, and the voice of advocating green energy is also getting higher and higher. How to recycle waste gas in industrial production and turn waste into treasure has become a vital part of the entire industrial system. The field of environmental protection is becoming more and more important. received more and more attention. The present invention mainly aims at the market demand of carbon / carbon composite materials, and focuses on the efficient utilization of alkane tail gas in the production process of carbon / carbon composite materials. Carbon / carbon composite materials have excellent properties such as high temperature resistance, high specific strength, and high specific modulus, and are widely used in photovo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B32/16C01B32/15C01B3/26C09C1/48
CPCC01B32/16C01B32/15C01B3/26C09C1/48C01B2203/0277C01B2203/04C01B2203/066C01B2203/1058C01B2203/1047C01B2203/1241C01B2203/1258
Inventor 邵忠贾林涛吴彪李爱军
Owner 上海康碳复合材料科技有限公司
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