The invention discloses a low-temperature glass solder bonding and packaging method based on
wafer-level glass microcavities, which comprises the following steps: firstly, utilizing a silk-
screen printing process to coat low-temperature glass solder on a packaging contact part of a Pyrex7740 glass substrate provided with a microcavity structure, preliminarily
drying the low-temperature glass solder, and making the low-temperature glass solder be cured and cling to the Pyrex7740 glass substrate provided with the microcavity structure; secondly, aligning a Pyrex7740 glass packaging
wafer which is cured with the low-temperature glass solder and a
silicon substrate
wafer comprising an MEMS device or a
CMOS circuit, and making the microcavity structure on the Pyrex7740 glass substrate correspond to the position of the MEMS device or the
CMOS circuit to be packaged of a
silicon substrate; and thirdly, using a
clamper to firmly clamp the two aligned wafers, applying the pressure,
sintering the glass solder in a specified packaging
atmosphere, and cooling the glass solder. The whole process is based on integral
processing of the
silicon wafer and the Pyrex7740 glass wafer, belongs to a process for manufacturing and packaging a wafer-level MEMS, and has the characteristics of simple method, adjustable packaging space and low cost.