The invention provides a micro-nano structure
machining machine tool comprising a tool apron, a work steady, and a vibration device; the tool apron can move in the X-axis direction of the
machine tooland is provided with a rotating shaft with an axis perpendicular to the X-axis direction of the
machine tool; a tool is arranged at the end portion of the rotating shaft; the work steady is arrangedrelative to the tool apron and can move in the Z-axis direction of the
machine tool; the vibration device is fixed on the work steady and comprises a
base station, a first flexible vibration body, a second flexible vibration body, a workpiece platform, and a first flexible vibration portion for driving the first flexible vibration body and the second flexible vibration body to vibrate; the first flexible vibration body is connected with the
base station and the workpiece platform, and the
vibration sensing direction of the first flexible vibration body is the X-axis direction of the
machine tool; the second flexible vibration body is connected with the
base station and the workpiece platform, and the
vibration sensing direction of the second flexible vibration body is the Z-axis directionof the
machine tool; the first flexible vibration body and the second flexible vibration body are separately located on two adjacent sides of the workpiece platform; and one side, not connected with the first flexible vibration body and the second flexible vibration body, of the workpiece platform is disposed opposite to the tool. The invention also provides two micro-nano structure
machining methods.